GB2264718B - Coatings produced by vapour deposition - Google Patents
Coatings produced by vapour depositionInfo
- Publication number
- GB2264718B GB2264718B GB9204807A GB9204807A GB2264718B GB 2264718 B GB2264718 B GB 2264718B GB 9204807 A GB9204807 A GB 9204807A GB 9204807 A GB9204807 A GB 9204807A GB 2264718 B GB2264718 B GB 2264718B
- Authority
- GB
- United Kingdom
- Prior art keywords
- vapour deposition
- coatings produced
- coatings
- produced
- vapour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9204807A GB2264718B (en) | 1992-03-04 | 1992-03-04 | Coatings produced by vapour deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9204807A GB2264718B (en) | 1992-03-04 | 1992-03-04 | Coatings produced by vapour deposition |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9204807D0 GB9204807D0 (en) | 1992-04-22 |
GB2264718A GB2264718A (en) | 1993-09-08 |
GB2264718B true GB2264718B (en) | 1995-04-26 |
Family
ID=10711569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9204807A Expired - Fee Related GB2264718B (en) | 1992-03-04 | 1992-03-04 | Coatings produced by vapour deposition |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2264718B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19742619C1 (en) * | 1997-09-26 | 1999-01-28 | Siemens Ag | Method and apparatus for introducing powdery solids or liquids into an inductively coupled plasma |
DE19742691C1 (en) * | 1997-09-26 | 1999-01-28 | Siemens Ag | Method and apparatus for coating substrates |
ITRM20010060A1 (en) * | 2001-02-06 | 2001-05-07 | Carlo Misiano | PERFECTION OF A METHOD AND APPARATUS FOR THE DEPOSITION OF THIN FILMS, ESPECIALLY IN REACTIVE CONDITIONS. |
DE10342398B4 (en) * | 2003-09-13 | 2008-05-29 | Schott Ag | Protective layer for a body, and methods of making and using protective layers |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1265545A (en) * | 1968-06-24 | 1972-03-01 | ||
GB1334599A (en) * | 1970-01-30 | 1973-10-24 | Bosch Gmbh Robert | Vacuum deposition of vapourized metals or metal compounds |
GB1496590A (en) * | 1974-12-06 | 1977-12-30 | Bell Northern Research Ltd | Sputtered dielectric thin films |
GB2010919A (en) * | 1977-12-23 | 1979-07-04 | Balzers Hochvakuum | Method for the manufacture of gold-coloured coatings |
US4440618A (en) * | 1982-03-19 | 1984-04-03 | Anelva Corporation | Gas discharge device comprising a pressure controller for controlling a pressure over a wide range |
US4591509A (en) * | 1980-03-27 | 1986-05-27 | Kernforschungszentrum Karlsruhe Gmbh | Process for the preparation of superconducting compound materials |
EP0345487A1 (en) * | 1988-06-10 | 1989-12-13 | Fujitsu Limited | A sputtering method for fabricating thin film |
US4933065A (en) * | 1988-10-08 | 1990-06-12 | Leybold Aktiengesellschaft | Apparatus for applying dielectric or metallic materials |
US4963394A (en) * | 1988-04-12 | 1990-10-16 | Siemens Aktiengesellschaft | Method for producing thin metal films by vapor-deposition |
US5015353A (en) * | 1987-09-30 | 1991-05-14 | The United States Of America As Represented By The Secretary Of The Navy | Method for producing substoichiometric silicon nitride of preselected proportions |
GB2242442A (en) * | 1990-03-09 | 1991-10-02 | Allan Matthews | Modulated composition composites produced by vapour deposition |
GB2243162A (en) * | 1990-04-17 | 1991-10-23 | Riken Kk | A chromium nitride coating having a steadily increasing nitrogen concentration |
-
1992
- 1992-03-04 GB GB9204807A patent/GB2264718B/en not_active Expired - Fee Related
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1265545A (en) * | 1968-06-24 | 1972-03-01 | ||
GB1334599A (en) * | 1970-01-30 | 1973-10-24 | Bosch Gmbh Robert | Vacuum deposition of vapourized metals or metal compounds |
GB1496590A (en) * | 1974-12-06 | 1977-12-30 | Bell Northern Research Ltd | Sputtered dielectric thin films |
GB2010919A (en) * | 1977-12-23 | 1979-07-04 | Balzers Hochvakuum | Method for the manufacture of gold-coloured coatings |
US4591509A (en) * | 1980-03-27 | 1986-05-27 | Kernforschungszentrum Karlsruhe Gmbh | Process for the preparation of superconducting compound materials |
US4440618A (en) * | 1982-03-19 | 1984-04-03 | Anelva Corporation | Gas discharge device comprising a pressure controller for controlling a pressure over a wide range |
US5015353A (en) * | 1987-09-30 | 1991-05-14 | The United States Of America As Represented By The Secretary Of The Navy | Method for producing substoichiometric silicon nitride of preselected proportions |
US4963394A (en) * | 1988-04-12 | 1990-10-16 | Siemens Aktiengesellschaft | Method for producing thin metal films by vapor-deposition |
EP0345487A1 (en) * | 1988-06-10 | 1989-12-13 | Fujitsu Limited | A sputtering method for fabricating thin film |
US4933065A (en) * | 1988-10-08 | 1990-06-12 | Leybold Aktiengesellschaft | Apparatus for applying dielectric or metallic materials |
GB2242442A (en) * | 1990-03-09 | 1991-10-02 | Allan Matthews | Modulated composition composites produced by vapour deposition |
GB2243162A (en) * | 1990-04-17 | 1991-10-23 | Riken Kk | A chromium nitride coating having a steadily increasing nitrogen concentration |
Also Published As
Publication number | Publication date |
---|---|
GB9204807D0 (en) | 1992-04-22 |
GB2264718A (en) | 1993-09-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2229454B (en) | Vapor deposition system | |
AU5097490A (en) | Modular continuous vapor deposition system | |
AU5005393A (en) | Antireflection coatings | |
GB9321786D0 (en) | Droplet deposition apparatus | |
AU8472691A (en) | Deposition process | |
GB9206783D0 (en) | Deposition process | |
GB2267291B (en) | Plasma deposition process | |
AU8473591A (en) | Deposition process | |
AU639339B2 (en) | Improved coatings | |
GB9218859D0 (en) | Aluminide-silicide coatings | |
GB9105128D0 (en) | Coatings | |
GB2252559B (en) | Coating process | |
GB2264718B (en) | Coatings produced by vapour deposition | |
GB9322203D0 (en) | Droplet deposition apparatus | |
SG49867A1 (en) | Superplastic titanium by vapor deposition | |
GB9421335D0 (en) | Chemical vapour deposition | |
EP0470442A3 (en) | Improved scuff-masking coatings for glass articles | |
AU1255092A (en) | Vapour deposition | |
GB9219340D0 (en) | Chemical vapour deposition | |
GB2273933B (en) | Coating | |
GB2242442B (en) | Modulated composition composites produced by vapour deposition | |
GB9214516D0 (en) | Coating process | |
GB9213817D0 (en) | Coatings on glass | |
GB9014908D0 (en) | Spray deposition process | |
GB9107653D0 (en) | Deposition process |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |