GB1314923A - Method of manufacturing an insulated gate type field effect device - Google Patents
Method of manufacturing an insulated gate type field effect deviceInfo
- Publication number
- GB1314923A GB1314923A GB2779271A GB2779271A GB1314923A GB 1314923 A GB1314923 A GB 1314923A GB 2779271 A GB2779271 A GB 2779271A GB 2779271 A GB2779271 A GB 2779271A GB 1314923 A GB1314923 A GB 1314923A
- Authority
- GB
- United Kingdom
- Prior art keywords
- oxide layer
- regions
- manufacturing
- field effect
- type field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005669 field effect Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 150000004767 nitrides Chemical class 0.000 abstract 2
- 230000003647 oxidation Effects 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- -1 silicon nitrile Chemical class 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
- Element Separation (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5100170 | 1970-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1314923A true GB1314923A (en) | 1973-04-26 |
Family
ID=12874527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2779271A Expired GB1314923A (en) | 1970-06-15 | 1971-06-14 | Method of manufacturing an insulated gate type field effect device |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2128470A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2095259B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1314923A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL152707B (nl) * | 1967-06-08 | 1977-03-15 | Philips Nv | Halfgeleiderinrichting bevattende een veldeffecttransistor van het type met geisoleerde poortelektrode en werkwijze ter vervaardiging daarvan. |
-
1971
- 1971-06-08 DE DE19712128470 patent/DE2128470A1/de active Pending
- 1971-06-14 GB GB2779271A patent/GB1314923A/en not_active Expired
- 1971-06-14 FR FR7121454A patent/FR2095259B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2095259B1 (enrdf_load_stackoverflow) | 1975-07-11 |
| DE2128470A1 (de) | 1972-01-20 |
| FR2095259A1 (enrdf_load_stackoverflow) | 1972-02-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |