GB1308839A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
GB1308839A
GB1308839A GB2731271*A GB2731271A GB1308839A GB 1308839 A GB1308839 A GB 1308839A GB 2731271 A GB2731271 A GB 2731271A GB 1308839 A GB1308839 A GB 1308839A
Authority
GB
United Kingdom
Prior art keywords
specimen
polepieces
centre
lens
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2731271*A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1308839A publication Critical patent/GB1308839A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
GB2731271*A 1970-04-18 1971-04-19 Scanning electron microscope Expired GB1308839A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45033284A JPS4936496B1 (enrdf_load_stackoverflow) 1970-04-18 1970-04-18

Publications (1)

Publication Number Publication Date
GB1308839A true GB1308839A (en) 1973-03-07

Family

ID=12382218

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2731271*A Expired GB1308839A (en) 1970-04-18 1971-04-19 Scanning electron microscope

Country Status (5)

Country Link
US (1) US3717761A (enrdf_load_stackoverflow)
JP (1) JPS4936496B1 (enrdf_load_stackoverflow)
DE (1) DE2116289C3 (enrdf_load_stackoverflow)
GB (1) GB1308839A (enrdf_load_stackoverflow)
NL (1) NL147883B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4982091A (en) * 1986-12-12 1991-01-01 Texas Instruments Incorporated Electron beam apparatus and method for detecting secondary electrons

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU521225B2 (en) * 1977-04-19 1982-03-25 Delalande S.A. Alkylenedioxy phenyl derivatives
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
JPS5842935B2 (ja) * 1978-04-07 1983-09-22 日本電子株式会社 走査電子顕微鏡等の対物レンズ
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
DE3138926A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Elektronenoptische anordnung fuer die hochaufloesende elektronenstrahl-messtechnik
DE3236271A1 (de) * 1982-09-30 1984-04-05 Siemens AG, 1000 Berlin und 8000 München Spektrometerobjektiv fuer die korpuskularstrahl-messtechnik
US4544846A (en) * 1983-06-28 1985-10-01 International Business Machines Corporation Variable axis immersion lens electron beam projection system
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
JPS60212953A (ja) * 1984-04-06 1985-10-25 Hitachi Ltd 電子線装置
JPS60220541A (ja) * 1984-04-17 1985-11-05 Jeol Ltd 透過電子顕微鏡
FR2584234B1 (fr) * 1985-06-28 1988-12-09 Cameca Testeur de circuit integre a faisceau d'electrons
GB8604181D0 (en) * 1986-02-20 1986-03-26 Texas Instruments Ltd Electron beam apparatus
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
JP4200104B2 (ja) * 2003-01-31 2008-12-24 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4982091A (en) * 1986-12-12 1991-01-01 Texas Instruments Incorporated Electron beam apparatus and method for detecting secondary electrons

Also Published As

Publication number Publication date
US3717761A (en) 1973-02-20
JPS4936496B1 (enrdf_load_stackoverflow) 1974-10-01
DE2116289C3 (de) 1982-04-01
NL7103034A (enrdf_load_stackoverflow) 1971-10-20
DE2116289A1 (de) 1971-11-11
NL147883B (nl) 1975-11-17
DE2116289B2 (enrdf_load_stackoverflow) 1974-05-09

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years