NL7103034A - - Google Patents

Info

Publication number
NL7103034A
NL7103034A NL7103034A NL7103034A NL7103034A NL 7103034 A NL7103034 A NL 7103034A NL 7103034 A NL7103034 A NL 7103034A NL 7103034 A NL7103034 A NL 7103034A NL 7103034 A NL7103034 A NL 7103034A
Authority
NL
Netherlands
Application number
NL7103034A
Other versions
NL147883B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7103034A publication Critical patent/NL7103034A/xx
Publication of NL147883B publication Critical patent/NL147883B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
NL717103034A 1970-04-18 1971-03-08 Aftastelektronenmicroscoop. NL147883B (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45033284A JPS4936496B1 (enrdf_load_stackoverflow) 1970-04-18 1970-04-18

Publications (2)

Publication Number Publication Date
NL7103034A true NL7103034A (enrdf_load_stackoverflow) 1971-10-20
NL147883B NL147883B (nl) 1975-11-17

Family

ID=12382218

Family Applications (1)

Application Number Title Priority Date Filing Date
NL717103034A NL147883B (nl) 1970-04-18 1971-03-08 Aftastelektronenmicroscoop.

Country Status (5)

Country Link
US (1) US3717761A (enrdf_load_stackoverflow)
JP (1) JPS4936496B1 (enrdf_load_stackoverflow)
DE (1) DE2116289C3 (enrdf_load_stackoverflow)
GB (1) GB1308839A (enrdf_load_stackoverflow)
NL (1) NL147883B (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU521225B2 (en) * 1977-04-19 1982-03-25 Delalande S.A. Alkylenedioxy phenyl derivatives
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
JPS5842935B2 (ja) * 1978-04-07 1983-09-22 日本電子株式会社 走査電子顕微鏡等の対物レンズ
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
DE3138926A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Elektronenoptische anordnung fuer die hochaufloesende elektronenstrahl-messtechnik
DE3236271A1 (de) * 1982-09-30 1984-04-05 Siemens AG, 1000 Berlin und 8000 München Spektrometerobjektiv fuer die korpuskularstrahl-messtechnik
US4544846A (en) * 1983-06-28 1985-10-01 International Business Machines Corporation Variable axis immersion lens electron beam projection system
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
JPS60212953A (ja) * 1984-04-06 1985-10-25 Hitachi Ltd 電子線装置
JPS60220541A (ja) * 1984-04-17 1985-11-05 Jeol Ltd 透過電子顕微鏡
FR2584234B1 (fr) * 1985-06-28 1988-12-09 Cameca Testeur de circuit integre a faisceau d'electrons
GB8604181D0 (en) * 1986-02-20 1986-03-26 Texas Instruments Ltd Electron beam apparatus
GB2201288B (en) * 1986-12-12 1990-08-22 Texas Instruments Ltd Electron beam apparatus
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
JP4200104B2 (ja) * 2003-01-31 2008-12-24 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope

Also Published As

Publication number Publication date
US3717761A (en) 1973-02-20
GB1308839A (en) 1973-03-07
JPS4936496B1 (enrdf_load_stackoverflow) 1974-10-01
DE2116289C3 (de) 1982-04-01
DE2116289A1 (de) 1971-11-11
NL147883B (nl) 1975-11-17
DE2116289B2 (enrdf_load_stackoverflow) 1974-05-09

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Legal Events

Date Code Title Description
NL80 Information provided on patent owner name for an already discontinued patent

Owner name: DENSHI

V4 Discontinued because of reaching the maximum lifetime of a patent