JPS4936496B1 - - Google Patents
Info
- Publication number
- JPS4936496B1 JPS4936496B1 JP45033284A JP3328470A JPS4936496B1 JP S4936496 B1 JPS4936496 B1 JP S4936496B1 JP 45033284 A JP45033284 A JP 45033284A JP 3328470 A JP3328470 A JP 3328470A JP S4936496 B1 JPS4936496 B1 JP S4936496B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45033284A JPS4936496B1 (ja) | 1970-04-18 | 1970-04-18 | |
| NL717103034A NL147883B (nl) | 1970-04-18 | 1971-03-08 | Aftastelektronenmicroscoop. |
| DE2116289A DE2116289C3 (de) | 1970-04-18 | 1971-04-02 | Rasterelektronenmikroskop |
| US00133894A US3717761A (en) | 1970-04-18 | 1971-04-14 | Scanning electron microscope |
| GB2731271*A GB1308839A (en) | 1970-04-18 | 1971-04-19 | Scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45033284A JPS4936496B1 (ja) | 1970-04-18 | 1970-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4936496B1 true JPS4936496B1 (ja) | 1974-10-01 |
Family
ID=12382218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45033284A Pending JPS4936496B1 (ja) | 1970-04-18 | 1970-04-18 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3717761A (ja) |
| JP (1) | JPS4936496B1 (ja) |
| DE (1) | DE2116289C3 (ja) |
| GB (1) | GB1308839A (ja) |
| NL (1) | NL147883B (ja) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU521225B2 (en) * | 1977-04-19 | 1982-03-25 | Delalande S.A. | Alkylenedioxy phenyl derivatives |
| NL175245C (nl) * | 1977-05-26 | 1984-10-01 | Philips Nv | Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor. |
| JPS5842935B2 (ja) * | 1978-04-07 | 1983-09-22 | 日本電子株式会社 | 走査電子顕微鏡等の対物レンズ |
| JPS57118357A (en) * | 1981-01-14 | 1982-07-23 | Jeol Ltd | Objective lens for scan type electron microscope |
| DE3138926A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Elektronenoptische anordnung fuer die hochaufloesende elektronenstrahl-messtechnik |
| DE3236271A1 (de) * | 1982-09-30 | 1984-04-05 | Siemens AG, 1000 Berlin und 8000 München | Spektrometerobjektiv fuer die korpuskularstrahl-messtechnik |
| US4544846A (en) * | 1983-06-28 | 1985-10-01 | International Business Machines Corporation | Variable axis immersion lens electron beam projection system |
| GB8327737D0 (en) * | 1983-10-17 | 1983-11-16 | Texas Instruments Ltd | Electron detector |
| JPS60212953A (ja) * | 1984-04-06 | 1985-10-25 | Hitachi Ltd | 電子線装置 |
| JPS60220541A (ja) * | 1984-04-17 | 1985-11-05 | Jeol Ltd | 透過電子顕微鏡 |
| FR2584234B1 (fr) * | 1985-06-28 | 1988-12-09 | Cameca | Testeur de circuit integre a faisceau d'electrons |
| GB8604181D0 (en) * | 1986-02-20 | 1986-03-26 | Texas Instruments Ltd | Electron beam apparatus |
| GB2201288B (en) * | 1986-12-12 | 1990-08-22 | Texas Instruments Ltd | Electron beam apparatus |
| US4962306A (en) * | 1989-12-04 | 1990-10-09 | Intenational Business Machines Corporation | Magnetically filtered low loss scanning electron microscopy |
| JP4200104B2 (ja) * | 2003-01-31 | 2008-12-24 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1128107A (en) * | 1965-06-23 | 1968-09-25 | Hitachi Ltd | Scanning electron microscope |
-
1970
- 1970-04-18 JP JP45033284A patent/JPS4936496B1/ja active Pending
-
1971
- 1971-03-08 NL NL717103034A patent/NL147883B/xx not_active IP Right Cessation
- 1971-04-02 DE DE2116289A patent/DE2116289C3/de not_active Expired
- 1971-04-14 US US00133894A patent/US3717761A/en not_active Expired - Lifetime
- 1971-04-19 GB GB2731271*A patent/GB1308839A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2116289C3 (de) | 1982-04-01 |
| DE2116289B2 (ja) | 1974-05-09 |
| NL7103034A (ja) | 1971-10-20 |
| DE2116289A1 (de) | 1971-11-11 |
| GB1308839A (en) | 1973-03-07 |
| US3717761A (en) | 1973-02-20 |
| NL147883B (nl) | 1975-11-17 |