GB1308764A - Production of semiconductor components - Google Patents

Production of semiconductor components

Info

Publication number
GB1308764A
GB1308764A GB1095171*[A GB1095171A GB1308764A GB 1308764 A GB1308764 A GB 1308764A GB 1095171 A GB1095171 A GB 1095171A GB 1308764 A GB1308764 A GB 1308764A
Authority
GB
United Kingdom
Prior art keywords
layer
windows
opened
semi
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1095171*[A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1308764A publication Critical patent/GB1308764A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/113—Nitrides of boron or aluminum or gallium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/114—Nitrides of silicon

Landscapes

  • Bipolar Transistors (AREA)
  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
GB1095171*[A 1970-04-27 1971-04-23 Production of semiconductor components Expired GB1308764A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2020531A DE2020531C2 (de) 1970-04-27 1970-04-27 Verfahren zur Herstellung von Silizium-Höchstfrequenz-Planartransistoren

Publications (1)

Publication Number Publication Date
GB1308764A true GB1308764A (en) 1973-03-07

Family

ID=5769521

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1095171*[A Expired GB1308764A (en) 1970-04-27 1971-04-23 Production of semiconductor components

Country Status (8)

Country Link
US (1) US3798080A (enExample)
JP (1) JPS5652444B1 (enExample)
CA (1) CA918307A (enExample)
CH (1) CH522291A (enExample)
DE (1) DE2020531C2 (enExample)
FR (1) FR2086373B1 (enExample)
GB (1) GB1308764A (enExample)
NL (1) NL7104800A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977920A (en) * 1970-10-30 1976-08-31 Hitachi, Ltd. Method of fabricating semiconductor device using at least two sorts of insulating films different from each other
US3860466A (en) * 1971-10-22 1975-01-14 Texas Instruments Inc Nitride composed masking for integrated circuits
JPS6028397B2 (ja) * 1978-10-26 1985-07-04 株式会社東芝 半導体装置の製造方法
US4402128A (en) * 1981-07-20 1983-09-06 Rca Corporation Method of forming closely spaced lines or contacts in semiconductor devices
JPS6192150U (enExample) * 1984-11-22 1986-06-14
JP6900727B2 (ja) 2017-03-28 2021-07-07 横河電機株式会社 エンジニアリング支援システム、エンジニアリング支援方法、クライアント装置、及びクライアントプログラム
JP2019057196A (ja) 2017-09-22 2019-04-11 横河電機株式会社 情報収集装置、情報収集方法
JP6897452B2 (ja) 2017-09-22 2021-06-30 横河電機株式会社 情報収集システム

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477886A (en) * 1964-12-07 1969-11-11 Motorola Inc Controlled diffusions in semiconductive materials
US3597667A (en) * 1966-03-01 1971-08-03 Gen Electric Silicon oxide-silicon nitride coatings for semiconductor devices
DE158928C (enExample) * 1966-09-26
DE1614435B2 (de) * 1967-02-23 1979-05-23 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von aus Germanium bestehenden, doppeldiffundierten Halbleiteranordnungen
US3475234A (en) * 1967-03-27 1969-10-28 Bell Telephone Labor Inc Method for making mis structures
NL6807952A (enExample) * 1967-07-06 1969-01-08
FR2020020B1 (enExample) * 1968-10-07 1974-09-20 Ibm
US3615940A (en) * 1969-03-24 1971-10-26 Motorola Inc Method of forming a silicon nitride diffusion mask

Also Published As

Publication number Publication date
FR2086373B1 (enExample) 1977-08-05
US3798080A (en) 1974-03-19
NL7104800A (enExample) 1971-10-29
DE2020531C2 (de) 1982-10-21
DE2020531A1 (de) 1971-11-18
JPS5652444B1 (enExample) 1981-12-12
FR2086373A1 (enExample) 1971-12-31
CA918307A (en) 1973-01-02
CH522291A (de) 1972-06-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee