GB1301285A - - Google Patents

Info

Publication number
GB1301285A
GB1301285A GB1301285DA GB1301285A GB 1301285 A GB1301285 A GB 1301285A GB 1301285D A GB1301285D A GB 1301285DA GB 1301285 A GB1301285 A GB 1301285A
Authority
GB
United Kingdom
Prior art keywords
wafers
plenum chamber
conveyer
grooves
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1301285A publication Critical patent/GB1301285A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Feeding Of Workpieces (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Formation Of Insulating Films (AREA)
  • Silicon Compounds (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB1301285D 1968-11-26 1969-11-25 Expired GB1301285A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77903368A 1968-11-26 1968-11-26

Publications (1)

Publication Number Publication Date
GB1301285A true GB1301285A (de) 1972-12-29

Family

ID=25115107

Family Applications (2)

Application Number Title Priority Date Filing Date
GB1301285D Expired GB1301285A (de) 1968-11-26 1969-11-25
GB1301286D Expired GB1301286A (de) 1968-11-26 1969-11-25

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB1301286D Expired GB1301286A (de) 1968-11-26 1969-11-25

Country Status (4)

Country Link
US (1) US3645581A (de)
JP (1) JPS549027B1 (de)
DE (1) DE1959093C2 (de)
GB (2) GB1301285A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2276150A (en) * 1993-03-16 1994-09-21 Heidelberger Druckmasch Ag Sheet guiding in printing press
CN113490885A (zh) * 2019-02-25 2021-10-08 应用材料公司 用于光刻系统的热稳定的动态冷却控制

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US6076652A (en) 1971-04-16 2000-06-20 Texas Instruments Incorporated Assembly line system and apparatus controlling transfer of a workpiece
US3731823A (en) * 1971-06-01 1973-05-08 Ibm Wafer transport system
US3930684A (en) * 1971-06-22 1976-01-06 Lasch Jr Cecil A Automatic wafer feeding and pre-alignment apparatus and method
US3947236A (en) * 1971-11-29 1976-03-30 Lasch Jr Cecil A Fluid bearing transfer and heat treating apparatus and method
US3730595A (en) * 1971-11-30 1973-05-01 Ibm Linear carrier sender and receiver
US3822025A (en) * 1973-03-16 1974-07-02 Gerber Scientific Instr Co Pressurized gas selector mechanism
JPS501639A (de) * 1973-05-07 1975-01-09
US3823836A (en) * 1973-05-22 1974-07-16 Plat General Inc Vacuum apparatus for handling sheets
JPS5013948U (de) * 1973-06-01 1975-02-13
JPS5013949U (de) * 1973-06-01 1975-02-13
US3982979A (en) * 1973-06-28 1976-09-28 Western Electric Company, Inc. Methods for mounting an article on an adherent site on a substrate
US3948564A (en) * 1974-01-17 1976-04-06 Gca Corporation Fluid bearing apparatus and method utilizing selective turntable diverter structure
US3923342A (en) * 1974-06-10 1975-12-02 Motorola Inc Apparatus and method for handling frangible objects
GB1513444A (en) * 1974-09-06 1978-06-07 Chemical Reactor Equip As Pick-up devices for lifting and moving semiconductor wafers
US4047627A (en) * 1974-09-30 1977-09-13 Gca Corporation Mask plate handling method
US3960277A (en) * 1974-09-30 1976-06-01 Flint Alan G Mask plate handling apparatus
US4009785A (en) * 1974-10-02 1977-03-01 Motorola, Inc. Fixture and system for handling plate like objects
US4030622A (en) * 1975-05-23 1977-06-21 Pass-Port Systems, Inc. Wafer transport system
US4014576A (en) * 1975-06-19 1977-03-29 International Business Machines Corporation Article carrier
US4024944A (en) * 1975-12-24 1977-05-24 Texas Instruments Incorporated Semiconductor slice prealignment system
US4062463A (en) * 1976-05-11 1977-12-13 Machine Technology, Inc. Automated single cassette load mechanism for scrubber
US4278366A (en) * 1977-03-18 1981-07-14 Gca Corporation Automatic wafer processing system and method
US4315705A (en) * 1977-03-18 1982-02-16 Gca Corporation Apparatus for handling and treating wafers
US4178113A (en) * 1977-12-05 1979-12-11 Macronetics, Inc. Buffer storage apparatus for semiconductor wafer processing
US4190015A (en) * 1977-12-08 1980-02-26 Machine Technology, Inc. Apparatus for dispensing liquid to spinning workpieces
US4236851A (en) * 1978-01-05 1980-12-02 Kasper Instruments, Inc. Disc handling system and method
US4313266A (en) * 1980-05-01 1982-02-02 The Silicon Valley Group, Inc. Method and apparatus for drying wafers
US4495399A (en) * 1981-03-26 1985-01-22 Cann Gordon L Micro-arc milling of metallic and non-metallic substrates
US4600471A (en) * 1981-08-26 1986-07-15 Integrated Automation, Limited Method and apparatus for transport and processing of substrate with developing agent
US4392915A (en) * 1982-02-16 1983-07-12 Eaton Corporation Wafer support system
US4462796A (en) * 1982-05-19 1984-07-31 Micro Component Technology, Inc. Integrated circuit component handler movement and heating system
US4983093A (en) * 1982-05-24 1991-01-08 Proconics International, Inc. Wafer transfer apparatus
DE3219502C2 (de) * 1982-05-25 1990-04-19 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum automatischen Transport scheibenförmiger Objekte
NL8203318A (nl) * 1982-08-24 1984-03-16 Integrated Automation Inrichting voor processing van substraten.
US4554814A (en) * 1982-10-13 1985-11-26 The Minster Machine Company Air transfer system and method for a shell press
CA1226764A (en) * 1982-10-13 1987-09-15 Arthur L. Grow Air transfer system for a shell press
US4502215A (en) * 1982-12-20 1985-03-05 At&T Technologies, Inc. Feeding articles to successive stations for treatment
US4513600A (en) * 1983-01-03 1985-04-30 The Minster Machine Company Cam actuated ejector for a shell press
US4627264A (en) * 1983-01-03 1986-12-09 The Minster Machine Company Cam actuated ejector for a shell press
US4539479A (en) * 1983-02-28 1985-09-03 Sheets Ronald E Automatic apparatus and method for exposing, registering, and handling double-sided printed circuit boards
US4555630A (en) * 1983-02-28 1985-11-26 Tamarack Scientific Co., Inc. Automatic system for exposing and handling double-sided printed circuit boards
US4534695A (en) * 1983-05-23 1985-08-13 Eaton Corporation Wafer transport system
JPS6074626A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd ウエハー処理方法及び装置
JPS59171121A (ja) * 1984-01-30 1984-09-27 Hitachi Ltd マスク取り扱い装置
US4724621A (en) * 1986-04-17 1988-02-16 Varian Associates, Inc. Wafer processing chuck using slanted clamping pins
US4924890A (en) * 1986-05-16 1990-05-15 Eastman Kodak Company Method and apparatus for cleaning semiconductor wafers
US4817556A (en) * 1987-05-04 1989-04-04 Varian Associates, Inc. Apparatus for retaining wafers
US5040484A (en) * 1987-05-04 1991-08-20 Varian Associates, Inc. Apparatus for retaining wafers
US4862578A (en) * 1987-08-20 1989-09-05 Holcomb Gregory W Tube magazine component feeder
DE3732113C1 (de) * 1987-09-24 1988-10-20 Convac Gmbh Einrichtung zur Inline-Belackung von Compact-Discs
US4930634A (en) * 1987-09-29 1990-06-05 Fluoroware, Inc. Carrier for flat panel displays
US4815601A (en) * 1987-09-29 1989-03-28 Fluoroware, Inc. Carrier for flat panel displays
US4949848A (en) * 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
EP0385934A1 (de) * 1989-02-27 1990-09-05 SPT AG, SPANLOSE PRODUKTIONSTECHNIK i.K. Vorrichtung zur Aufnahme eines Coil sowie Verfahren zu dessen Lagerung
DE3912589A1 (de) * 1989-04-17 1990-10-25 Ekkehard Ueberreiter Einrichtung zum testen von elektronischen bauelementen mit einer ladestation, einer teststation und eine entladestation fuer die bauelemente
JPH0727957B2 (ja) * 1989-10-09 1995-03-29 株式会社東芝 半導体製造装置
US5111936A (en) * 1990-11-30 1992-05-12 Fluoroware Wafer carrier
DE4100526A1 (de) * 1991-01-10 1992-07-16 Wacker Chemitronic Vorrichtung und verfahren zum automatischen vereinzeln von gestapelten scheiben
US5271706A (en) * 1991-10-31 1993-12-21 Hkm Corporation Self-loading paper transport system
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
US5432653A (en) * 1993-06-22 1995-07-11 Minnesota Mining And Manufacturing Company Loop-shaped pneumatic drive
US5485325A (en) * 1994-04-04 1996-01-16 Minnesota Mining And Manufacturing Company Magazine storage system for recording strips
US5745946A (en) * 1994-07-15 1998-05-05 Ontrak Systems, Inc. Substrate processing system
US5548505A (en) * 1994-07-15 1996-08-20 Oktrak Systems, Inc. Scrubber control system
US5762084A (en) * 1994-07-15 1998-06-09 Ontrak Systems, Inc. Megasonic bath
US5692873A (en) * 1995-03-31 1997-12-02 Motorola, Inc. Apparatus for holding a piece of semiconductor
KR100191268B1 (ko) * 1996-06-11 1999-06-15 윤종용 반도체 제조 장치
US5924154A (en) * 1996-08-29 1999-07-20 Ontrak Systems, Inc. Brush assembly apparatus
US6039059A (en) * 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
DE19649488A1 (de) * 1996-11-29 1997-11-06 Schott Glaswerke Vorrichtung zur Handhabung von dünnen Glasscheiben
SE509367C2 (sv) * 1997-05-16 1999-01-18 Cetelab Ab Förfarande och anordning för hantering av kretsar
US6415804B1 (en) * 1999-12-23 2002-07-09 Lam Research Corporation Bowl for processing semiconductor wafers
US20030115214A1 (en) * 2001-12-17 2003-06-19 Nir Essar Medical reporting system and method
US6860947B2 (en) * 2002-07-08 2005-03-01 Dimension Bond Corporation Apparatus for simultaneously coating and measuring parts
US6998147B2 (en) * 2002-07-08 2006-02-14 Dimension Bond Corporation Method for simultaneously coating and measuring parts
US6832577B2 (en) * 2002-07-08 2004-12-21 Dimension Bond Corporation Apparatus and method for simultaneously coating and measuring parts
WO2004004926A1 (en) * 2002-07-08 2004-01-15 Dimension Bond Corporation Apparatus and method for simultaneously coating and measuring parts
TWI352628B (en) * 2006-07-21 2011-11-21 Akrion Technologies Inc Nozzle for use in the megasonic cleaning of substr
JP4751460B2 (ja) * 2009-02-18 2011-08-17 東京エレクトロン株式会社 基板搬送装置及び基板処理システム
CN101875036A (zh) * 2009-04-30 2010-11-03 深圳富泰宏精密工业有限公司 转动装置
JP5316689B1 (ja) * 2012-10-31 2013-10-16 千住金属工業株式会社 位置出し治具及び位置調整方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
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US3103388A (en) * 1963-09-10 High speed pneumatic conveyor
US2801884A (en) * 1955-03-31 1957-08-06 Nat Machinery Co Pneumatic elevating and handling means
US2778691A (en) * 1955-06-07 1957-01-22 Melpar Inc Stapling machines
US2842923A (en) * 1956-06-18 1958-07-15 Rca Corp Light element transport apparatus
NL281857A (de) * 1961-08-11
US3160443A (en) * 1962-10-23 1964-12-08 Western Electric Co Apparatus for pneumatically conveying articles
US3222110A (en) * 1964-03-11 1965-12-07 American Tobacco Co Cigarette transfer apparatus
US3318640A (en) * 1965-04-23 1967-05-09 Pitney Bowes Inc Pneumatic sheet handling apparatus and method of making same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2276150A (en) * 1993-03-16 1994-09-21 Heidelberger Druckmasch Ag Sheet guiding in printing press
FR2702749A1 (fr) * 1993-03-16 1994-09-23 Heidelberger Druckmasch Ag Dispositif de conduite d'une feuille.
US5497987A (en) * 1993-03-16 1996-03-12 Heidelberger Druckmaschinen Ag Sheet-guiding device
GB2276150B (en) * 1993-03-16 1996-07-31 Heidelberger Druckmasch Ag Guiding apparatus for a sheet
CN113490885A (zh) * 2019-02-25 2021-10-08 应用材料公司 用于光刻系统的热稳定的动态冷却控制
CN113490885B (zh) * 2019-02-25 2024-04-02 应用材料公司 用于光刻系统的热稳定的动态冷却控制

Also Published As

Publication number Publication date
DE1959093A1 (de) 1970-06-11
US3645581A (en) 1972-02-29
JPS549027B1 (de) 1979-04-20
DE1959093C2 (de) 1984-02-23
GB1301286A (de) 1972-12-29

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee