GB1285853A - Improvements in or relating to the manufacture of semiconductor monocrystals - Google Patents

Improvements in or relating to the manufacture of semiconductor monocrystals

Info

Publication number
GB1285853A
GB1285853A GB2401571A GB2401571A GB1285853A GB 1285853 A GB1285853 A GB 1285853A GB 2401571 A GB2401571 A GB 2401571A GB 2401571 A GB2401571 A GB 2401571A GB 1285853 A GB1285853 A GB 1285853A
Authority
GB
United Kingdom
Prior art keywords
zone
relating
manufacture
melting
feed rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2401571A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1285853A publication Critical patent/GB1285853A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating

Abstract

1285853 Zone-melting SIEMENS AG 19 April 1971 [16 March 1970] 24015/71 Heading B1S In a zone-melting process, using a singleturn induction coil 3 in an argon atmosphere at normal pressures, flashover is prevented by providing an earthed centre tap 20 for the coil 3 and monocrystalline rods of over 40mm in diameter are obtained by displacing holder 8 laterally, after constriction 7 has been formed. The seed crystal is a mono-crystalline silicon rod of smaller diameter than feed rod 2 and is drawn in the (III) direction, with a misalignment of 1.5‹. The feed rod 2 is not rotated during the process.
GB2401571A 1970-03-16 1971-04-19 Improvements in or relating to the manufacture of semiconductor monocrystals Expired GB1285853A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702012454 DE2012454A1 (en) 1970-03-16 1970-03-16 Process for the production of dislocation-free semiconductor incisions

Publications (1)

Publication Number Publication Date
GB1285853A true GB1285853A (en) 1972-08-16

Family

ID=5765240

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2401571A Expired GB1285853A (en) 1970-03-16 1971-04-19 Improvements in or relating to the manufacture of semiconductor monocrystals

Country Status (6)

Country Link
BE (1) BE764332A (en)
CA (1) CA962559A (en)
DE (1) DE2012454A1 (en)
FR (1) FR2084555A5 (en)
GB (1) GB1285853A (en)
NL (1) NL7103509A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020106291B4 (en) 2020-03-09 2024-02-08 Ebner Industrieofenbau Gmbh Heating device and method for crystal growth with a movable seed crystal holder

Also Published As

Publication number Publication date
DE2012454A1 (en) 1972-02-17
CA962559A (en) 1975-02-11
FR2084555A5 (en) 1971-12-17
BE764332A (en) 1971-09-16
NL7103509A (en) 1971-09-20

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees