GB1280612A - Method of vapour-depositing a plurality of mutually electrically insulated metal layers - Google Patents

Method of vapour-depositing a plurality of mutually electrically insulated metal layers

Info

Publication number
GB1280612A
GB1280612A GB5021070A GB5021070A GB1280612A GB 1280612 A GB1280612 A GB 1280612A GB 5021070 A GB5021070 A GB 5021070A GB 5021070 A GB5021070 A GB 5021070A GB 1280612 A GB1280612 A GB 1280612A
Authority
GB
United Kingdom
Prior art keywords
grooves
metal layers
vapour
depositing
electrically insulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5021070A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1280612A publication Critical patent/GB1280612A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

1280612 Image pick-up tubes PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 22 Oct 1970 [25 Oct 1969] 50210/70 Heading H1D [Also in Division C7] The glass wall 1 of a camera tube enclosing electron gun 5 and photoconductive layered input window 4, has grooves 9, 0À5 mm. wide Î 1 mm. deep formed therein. Metal springs 10 are placed in the grooves prior to vacuum evaporation on sputtering of metal filaments 11 to form metal layers 6, 7, 8, 0À1 micron thick insulated from each other by grooves 9 when the springs are removed. Potentials may be supplied to the coatings through contact strips 13.
GB5021070A 1969-10-25 1970-10-22 Method of vapour-depositing a plurality of mutually electrically insulated metal layers Expired GB1280612A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6916124A NL6916124A (en) 1969-10-25 1969-10-25

Publications (1)

Publication Number Publication Date
GB1280612A true GB1280612A (en) 1972-07-05

Family

ID=19808217

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5021070A Expired GB1280612A (en) 1969-10-25 1970-10-22 Method of vapour-depositing a plurality of mutually electrically insulated metal layers

Country Status (7)

Country Link
AU (1) AU2142470A (en)
BE (1) BE757966A (en)
CA (1) CA929042A (en)
DE (1) DE2049462A1 (en)
FR (1) FR2066288A5 (en)
GB (1) GB1280612A (en)
NL (1) NL6916124A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59207545A (en) * 1983-05-12 1984-11-24 Sony Corp Image pick-up tube

Also Published As

Publication number Publication date
DE2049462A1 (en) 1971-05-06
BE757966A (en) 1971-04-23
CA929042A (en) 1973-06-26
FR2066288A5 (en) 1971-08-06
AU2142470A (en) 1972-04-27
NL6916124A (en) 1971-04-27

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees