GB1187549A - Method of Cleaning Etched Silicon Surfaces - Google Patents

Method of Cleaning Etched Silicon Surfaces

Info

Publication number
GB1187549A
GB1187549A GB31416/68A GB3141668A GB1187549A GB 1187549 A GB1187549 A GB 1187549A GB 31416/68 A GB31416/68 A GB 31416/68A GB 3141668 A GB3141668 A GB 3141668A GB 1187549 A GB1187549 A GB 1187549A
Authority
GB
United Kingdom
Prior art keywords
etched silicon
etched
silicon surfaces
july
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31416/68A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1187549A publication Critical patent/GB1187549A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
    • H10P95/00—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/974—Substrate surface preparation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
GB31416/68A 1967-07-05 1968-07-01 Method of Cleaning Etched Silicon Surfaces Expired GB1187549A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0110675 1967-07-05

Publications (1)

Publication Number Publication Date
GB1187549A true GB1187549A (en) 1970-04-08

Family

ID=7530411

Family Applications (1)

Application Number Title Priority Date Filing Date
GB31416/68A Expired GB1187549A (en) 1967-07-05 1968-07-01 Method of Cleaning Etched Silicon Surfaces

Country Status (4)

Country Link
US (1) US3549433A (enExample)
FR (1) FR1573414A (enExample)
GB (1) GB1187549A (enExample)
NL (1) NL6807368A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994014188A1 (en) * 1992-12-16 1994-06-23 Semilab Félvezetö Fizikai Laboratórium Rt. Method for chemical surface passivation for in-situ bulk lifetime measurement of silicon semiconductor material

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3951710A (en) * 1974-09-13 1976-04-20 International Business Machines Corporation Method for removing copper contaminant from semiconductor surfaces
EP0308814B1 (en) * 1987-09-21 1993-01-27 National Semiconductor Corporation Modification of interfacial fields between dielectrics and semiconductors

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3436284A (en) * 1965-04-23 1969-04-01 Bell Telephone Labor Inc Method for the preparation of atomically clean silicon

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994014188A1 (en) * 1992-12-16 1994-06-23 Semilab Félvezetö Fizikai Laboratórium Rt. Method for chemical surface passivation for in-situ bulk lifetime measurement of silicon semiconductor material

Also Published As

Publication number Publication date
US3549433A (en) 1970-12-22
FR1573414A (enExample) 1969-07-04
NL6807368A (enExample) 1969-01-07

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees