GB1168813A - Control System for Vapour-Deposition Coating apparatus - Google Patents

Control System for Vapour-Deposition Coating apparatus

Info

Publication number
GB1168813A
GB1168813A GB48945/66A GB4894566A GB1168813A GB 1168813 A GB1168813 A GB 1168813A GB 48945/66 A GB48945/66 A GB 48945/66A GB 4894566 A GB4894566 A GB 4894566A GB 1168813 A GB1168813 A GB 1168813A
Authority
GB
United Kingdom
Prior art keywords
strip
crucible
coating
automatically controlled
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB48945/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Publication of GB1168813A publication Critical patent/GB1168813A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,168,813. Automatic control of coating. UNITED STATES STEEL CORP. Nov.1, 1966 [Nov.10, 1965], No.48945/66. Heading G3R. In a system for coating a moving strip of material in a vacuum, the intensity of an electron beam heating metal in a crucible adjacent to the path of the strip is automatically controlled in dependence on the speed of the strip to keep the coating thickness constant. In Fig.1, strip 14 passing through an evacuated chamber 10 is coated on both sides with metal deposited from vapour generated by crucibles 17, 18. The crucibles are heated by beams from electron guns 19 which are suitably deflected by electromagnets 20. Each crucible has five electron beams arranged transversely relative to the direction of strip travel, those further from the centre of the strip being of greater power so as to produce a uniform coating. This distribution of power is produced by suitably biasing magnetic amplifiers controlling the supply to the gun filaments. Deviations of coating thickness are detected by gauges 23 which control, through systems including servos 60, three potentiometers, Fig. 1a (not shown), adjusting the HT and filament supplies and the rate of feed of wire 21 associated with the appropriate crucible. The automatically controlled quantities are suitably modified to suit the speed of the strip by applying the output of a tachometer generator 24 to the system controlling the three potentiometers. Manually adjusted potentiometers 63, 64 further modify the automatically controlled quantities in accordance with the width of strip and thickness of coating desired. Selector switches (not shown) are provided for modifying the automatically controlled quantities to suit the number of crucibles in use. One of the three servo-controlled potentiometers adjusts, through a saturable reactor, the datum of a closed loop system controlling the total HT power supplied to all five guns. A second potentiometer adjusts the datum of closed loop systems controlling the current supplies to the gun filaments. A Zener diode is arranged so that HT variations outside a predetermined range modify the filament currents. The third potentiometer adjusts the datum of a closed loop speed control system associated with a motor 56 so that wire 21 is fed to the crucible at a suitable rate. A current regulator 67 associated with electromagnets 20 is automatically varied in dependence on the HT power supplied to the guns. Tachometer generator 24 also modifies the "off" time of a photocell-operated timer 65 so that servo 60 is interrupted for periods sufficient to permit corrections at the crucible to be detected by gauge 23. The strip is pre-heated to a desired temperature by electron guns 15 the different powers of which are automatically controlled by a temperature detector 22 arranged in a control system similar to those provided for controlling the crucibles.
GB48945/66A 1965-11-10 1966-11-01 Control System for Vapour-Deposition Coating apparatus Expired GB1168813A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US507103A US3397672A (en) 1965-11-10 1965-11-10 Control system for vapor-deposition coating apparatus

Publications (1)

Publication Number Publication Date
GB1168813A true GB1168813A (en) 1969-10-29

Family

ID=24017264

Family Applications (1)

Application Number Title Priority Date Filing Date
GB48945/66A Expired GB1168813A (en) 1965-11-10 1966-11-01 Control System for Vapour-Deposition Coating apparatus

Country Status (7)

Country Link
US (1) US3397672A (en)
BE (1) BE689369A (en)
DE (1) DE1521573A1 (en)
ES (1) ES333150A1 (en)
FR (1) FR1498949A (en)
GB (1) GB1168813A (en)
NL (1) NL6615541A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2145543A (en) * 1983-08-20 1985-03-27 Leybold Heraeus Gmbh & Co Kg Film thickness in a vacuum deposition processes

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3636916A (en) * 1966-03-14 1972-01-25 Optical Coating Laboratory Inc Coating apparatus and system
GB1168641A (en) * 1966-05-19 1969-10-29 British Iron Steel Research Formation of Polymer Coatings on Substrates.
BE705239A (en) * 1966-06-15 1968-03-01
GB1173978A (en) * 1967-11-14 1969-12-10 Edwards High Vaccum Internat L Vacuum Deposition Apparatus
GB1281572A (en) * 1968-11-22 1972-07-12 Vepa Ag Device and method for treating a material length
US3907607A (en) * 1969-07-14 1975-09-23 Corning Glass Works Continuous processing of ribbon material
US3853093A (en) * 1970-01-14 1974-12-10 Optical Coating Laboratory Inc Optical thickness rate monitor
US3709192A (en) * 1970-06-01 1973-01-09 Sierracin Corp Coating control system
DE2345157C2 (en) * 1973-09-07 1975-09-18 August Thyssen-Huette Ag, 4100 Duisburg Device for stripping metal when hot-metallizing metal strips
DE3706495A1 (en) * 1987-04-29 1988-09-15 Vtu Angel Kancev POWER SUPPLY CIRCUIT FOR ELECTRON BEAM EVAPORATOR
US6652654B1 (en) * 2000-09-27 2003-11-25 Bechtel Bwxt Idaho, Llc System configured for applying multiple modifying agents to a substrate
US6623686B1 (en) 2000-09-28 2003-09-23 Bechtel Bwxt Idaho, Llc System configured for applying a modifying agent to a non-equidimensional substrate
US20050244580A1 (en) * 2004-04-30 2005-11-03 Eastman Kodak Company Deposition apparatus for temperature sensitive materials
WO2015092998A1 (en) * 2013-12-20 2015-06-25 株式会社アルバック Electron gun device and vacuum deposition device
DE102020200366A1 (en) * 2019-04-23 2020-10-29 Sms Group Gmbh PVD thickness control
CN113817992A (en) * 2021-10-28 2021-12-21 成都天一国泰真空设备有限公司 Electromagnet deflection structure for vacuum coating machine electron gun
CN115491663B (en) * 2022-11-21 2023-03-24 常州翊迈新材料科技有限公司 Fuel cell metal polar plate coating thickness on-line monitoring device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2860075A (en) * 1951-01-27 1958-11-11 Continental Can Co Method of making a heater for vacuum deposition
CH311812A (en) * 1951-11-05 1955-12-15 Zeiss Carl Fa Evaporation device.
US2872341A (en) * 1954-09-10 1959-02-03 Int Resistance Co Method of providing an adherent metal coating on a fluorocarbon resin
US2903547A (en) * 1957-08-21 1959-09-08 Continental Can Co Vaporizing element connector and method
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
DE1156521B (en) * 1961-09-05 1963-10-31 Heraeus Gmbh W C Electron beam gun for heating metals
US3146335A (en) * 1962-03-29 1964-08-25 United Aircraft Corp Focusing device for electron beams
DE1199097B (en) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Device for vacuum evaporation of wide strips, especially with metals, by heating the material to be evaporated by means of electron beams
DE1261971B (en) * 1963-02-13 1968-02-29 United Aircraft Corp Equipment for welding, cutting or material processing by means of a charge carrier beam
US3235480A (en) * 1963-04-08 1966-02-15 Electra Mfg Company Thermionic evaporation rate controller
GB1065060A (en) * 1963-04-19 1967-04-12 United Aircraft Corp Improvements in and relating to apparatus for working articles with energised beams
US3235647A (en) * 1963-06-06 1966-02-15 Temescal Metallurgical Corp Electron bombardment heating with adjustable impact pattern
US3244855A (en) * 1963-07-19 1966-04-05 United States Steel Corp System for correcting the shift of an electron-gun beam from the desired region of impingement
US3281265A (en) * 1963-09-17 1966-10-25 United States Steel Corp Method and apparatus for controlling coating thickness by electron beam evaporation
US3276902A (en) * 1963-10-01 1966-10-04 Itt Method of vapor deposition employing an electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2145543A (en) * 1983-08-20 1985-03-27 Leybold Heraeus Gmbh & Co Kg Film thickness in a vacuum deposition processes

Also Published As

Publication number Publication date
US3397672A (en) 1968-08-20
BE689369A (en) 1967-05-08
FR1498949A (en) 1967-10-20
DE1521573A1 (en) 1969-11-06
NL6615541A (en) 1967-05-11
ES333150A1 (en) 1967-07-16

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