CH311812A - Evaporation device. - Google Patents
Evaporation device.Info
- Publication number
- CH311812A CH311812A CH311812DA CH311812A CH 311812 A CH311812 A CH 311812A CH 311812D A CH311812D A CH 311812DA CH 311812 A CH311812 A CH 311812A
- Authority
- CH
- Switzerland
- Prior art keywords
- evaporation device
- evaporation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S164/00—Metal founding
- Y10S164/04—Dental
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE311812X | 1951-11-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH311812A true CH311812A (en) | 1955-12-15 |
Family
ID=6131705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH311812D CH311812A (en) | 1951-11-05 | 1952-10-18 | Evaporation device. |
Country Status (4)
Country | Link |
---|---|
US (1) | US2746420A (en) |
CH (1) | CH311812A (en) |
FR (1) | FR1065922A (en) |
GB (1) | GB738592A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1295311B (en) * | 1963-07-19 | 1969-05-14 | United States Steel Corp | Device for the production of metal coatings by vacuum evaporation |
DE1298833B (en) * | 1962-04-13 | 1969-07-03 | Air Reduction | Device for vacuum deposition of a large number of firmly adhering layers of a certain thickness made of different materials on a substrate by means of electron bombardment |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2960457A (en) * | 1956-02-28 | 1960-11-15 | Servomechanisms Inc | Apparatus for vaporizing coating materials |
US2912351A (en) * | 1956-09-21 | 1959-11-10 | Sylvania Electric Prod | Lens coating apparatus and process |
US2906235A (en) * | 1957-03-22 | 1959-09-29 | Bulova Res And Dev Lab Inc | Frequency adjustment plating control |
US4831230B1 (en) * | 1957-06-27 | 1996-10-29 | Bankers Trust Company | Surface shaping and finishing apparatus and method |
US5064989B1 (en) * | 1957-06-27 | 1996-10-29 | Jerome H Lemelson | Surface shaping and finishing apparatus and method |
NL240710A (en) * | 1958-07-01 | |||
US3020389A (en) * | 1958-11-10 | 1962-02-06 | Union Carbide Corp | Portable air lock for welding chambers |
NL248568A (en) * | 1959-02-20 | |||
US5552675A (en) * | 1959-04-08 | 1996-09-03 | Lemelson; Jerome H. | High temperature reaction apparatus |
US3117024A (en) * | 1961-07-31 | 1964-01-07 | Sperry Rand Corp | Detection of evaporant temperature |
US3205087A (en) * | 1961-12-15 | 1965-09-07 | Martin Marietta Corp | Selective vacuum deposition of thin film |
US3271180A (en) * | 1962-06-19 | 1966-09-06 | Ibm | Photolytic processes for fabricating thin film patterns |
NL297262A (en) * | 1962-09-04 | |||
DE1260575B (en) * | 1962-09-04 | 1968-02-08 | United Aircraft Corp | Procedure for the non-destructive testing of electronic components |
US3271179A (en) * | 1962-09-24 | 1966-09-06 | Temescal Metallurgical Corp | Method for the manufacture of an optical filter |
US3250694A (en) * | 1962-10-17 | 1966-05-10 | Ibm | Apparatus for coating articles by cathode sputtering |
US3156810A (en) * | 1962-10-24 | 1964-11-10 | United Aircraft Corp | Protective device for movable gun viewing system |
US3235480A (en) * | 1963-04-08 | 1966-02-15 | Electra Mfg Company | Thermionic evaporation rate controller |
US3329524A (en) * | 1963-06-12 | 1967-07-04 | Temescal Metallurgical Corp | Centrifugal-type vapor source |
US3243661A (en) * | 1963-06-25 | 1966-03-29 | United Aircraft Corp | Enhanced micro-modules |
US3275789A (en) * | 1963-09-09 | 1966-09-27 | Varian Associates | Vacuum brazing system |
US3404255A (en) * | 1965-06-23 | 1968-10-01 | Bendix Corp | Source of vaporizable material for bombardment thereof by an electron bombarding means |
DE1515200C3 (en) * | 1964-08-05 | 1974-06-27 | Steigerwald Strahltechnik Gmbh, 8000 Muenchen | Device for material processing by means of a charge carrier beam |
US3352282A (en) * | 1965-07-23 | 1967-11-14 | Bendix Corp | Vacuum deposit device including means to register and manipulate mask and substrate elements |
US3397672A (en) * | 1965-11-10 | 1968-08-20 | United States Steel Corp | Control system for vapor-deposition coating apparatus |
CH427744A (en) * | 1965-11-26 | 1967-01-15 | Balzers Patent Beteilig Ag | Process for the thermal evaporation of mixtures of substances in a vacuum |
US3485998A (en) * | 1967-06-29 | 1969-12-23 | Rohr Corp | Adaptor type electron beam welding apparatus |
US3466420A (en) * | 1967-07-10 | 1969-09-09 | Gen Electric | Electron beam welding apparatus |
GB1235469A (en) * | 1967-11-09 | 1971-06-16 | Pilkington Brothers Ltd | Improvements in or relating to the manufacture of flat glass |
FR1561258A (en) * | 1968-01-15 | 1969-03-28 | ||
US3570449A (en) * | 1969-03-13 | 1971-03-16 | United Aircraft Corp | Sensor system for a vacuum deposition apparatus |
US3590777A (en) * | 1969-03-13 | 1971-07-06 | United Aircarft Corp | Ingot feed drive |
US3568632A (en) * | 1969-03-24 | 1971-03-09 | Gary F Cawthon | Lens coating apparatus |
US3620956A (en) * | 1969-07-15 | 1971-11-16 | Bendix Corp | Mechanism for thin film deposition |
US3649339A (en) * | 1969-09-05 | 1972-03-14 | Eugene C Smith | Apparatus and method for securing a high vacuum for particle coating process |
DE2008387C3 (en) * | 1970-02-24 | 1974-07-25 | Steigerwald Strahltechnik Gmbh, 8000 Muenchen | X-ray shielding device |
US3662708A (en) * | 1970-03-23 | 1972-05-16 | Airco Inc | Apparatus for supporting a substrate holder |
FR2087764A5 (en) * | 1970-05-29 | 1971-12-31 | Commissariat Energie Atomique | |
LU61048A1 (en) * | 1970-06-02 | 1971-08-13 | ||
US3667421A (en) * | 1970-09-17 | 1972-06-06 | United Aircraft Corp | Mechanism for controlling the thickness of a coating in a vapor deposition apparatus |
US3656454A (en) * | 1970-11-23 | 1972-04-18 | Air Reduction | Vacuum coating apparatus |
US3641973A (en) * | 1970-11-25 | 1972-02-15 | Air Reduction | Vacuum coating apparatus |
US3708889A (en) * | 1970-12-28 | 1973-01-09 | Armstrong Cork Co | Apparatus for bleaching furniture |
US3770934A (en) * | 1971-10-29 | 1973-11-06 | Machlett Lab Inc | Electron beam heating apparatus |
BE792552A (en) * | 1971-12-21 | 1973-06-12 | Cit Alcatel | VACUUM THIN LAYER DEPOSIT CONTAINER |
US3756193A (en) * | 1972-05-01 | 1973-09-04 | Battelle Memorial Institute | Coating apparatus |
CH573985A5 (en) * | 1973-11-22 | 1976-03-31 | Balzers Patent Beteilig Ag | |
BE814046A (en) * | 1974-04-22 | 1974-08-16 | METHOD AND INSTALLATION FOR THE CONTINUOUS APPLICATION OF A METAL COATING ON A TAPE SHEET. | |
US4163889A (en) * | 1974-05-27 | 1979-08-07 | U.S. Philips Corporation | Device for the simultaneous operation of a number of gas discharge electron guns |
US4009680A (en) * | 1974-09-16 | 1977-03-01 | Fengler Werner H | Apparatus for producing high wear-resistant composite seal |
JPS52139432A (en) * | 1976-05-18 | 1977-11-21 | Olympus Optical Co Ltd | Producing apparatus for photosensitive screen |
CA1264025A (en) * | 1987-05-29 | 1989-12-27 | James A.E. Bell | Apparatus and process for coloring objects by plasma coating |
CA1313335C (en) * | 1987-08-24 | 1993-02-02 | Keizo Harada | Process for preparing a thin film of superconducting compound oxide |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB481842A (en) * | 1936-06-17 | 1938-03-18 | Bernhard Berghaus | Improvements in and relating to the coating of articles by vaporisation of the coating materials |
US2206509A (en) * | 1939-05-27 | 1940-07-02 | Rca Corp | Radio tube manufacture |
US2301456A (en) * | 1940-09-28 | 1942-11-10 | Eastman Kodak Co | Evaporation of metallic salts |
US2426016A (en) * | 1941-11-29 | 1947-08-19 | Westinghouse Electric Corp | Electrostatic coating apparatus |
US2463180A (en) * | 1943-04-29 | 1949-03-01 | Bell Telephone Labor Inc | Method and apparatus for making mosaic targets for electron beams |
US2416211A (en) * | 1943-09-15 | 1947-02-18 | American Optical Corp | Apparatus for coating articles |
US2428868A (en) * | 1944-05-01 | 1947-10-14 | Rca Corp | Apparatus for producing hardened optical coatings by electron bombardment |
US2516908A (en) * | 1945-09-24 | 1950-08-01 | American Can Co | Apparatus for lining can ends |
US2527747A (en) * | 1946-01-03 | 1950-10-31 | Margaret N Lewis | Apparatus for coating articles by thermal evaporation |
US2482329A (en) * | 1946-05-27 | 1949-09-20 | Rca Corp | Apparatus for selective vapor coating |
-
1952
- 1952-10-18 CH CH311812D patent/CH311812A/en unknown
- 1952-11-04 US US318580A patent/US2746420A/en not_active Expired - Lifetime
- 1952-11-05 FR FR1065922D patent/FR1065922A/en not_active Expired
- 1952-11-05 GB GB27907/52A patent/GB738592A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1298833B (en) * | 1962-04-13 | 1969-07-03 | Air Reduction | Device for vacuum deposition of a large number of firmly adhering layers of a certain thickness made of different materials on a substrate by means of electron bombardment |
DE1295311B (en) * | 1963-07-19 | 1969-05-14 | United States Steel Corp | Device for the production of metal coatings by vacuum evaporation |
Also Published As
Publication number | Publication date |
---|---|
FR1065922A (en) | 1954-05-31 |
GB738592A (en) | 1955-10-19 |
US2746420A (en) | 1956-05-22 |
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