ES333150A1 - Improvements in control systems for coating appliances. (Machine-translation by Google Translate, not legally binding) - Google Patents

Improvements in control systems for coating appliances. (Machine-translation by Google Translate, not legally binding)

Info

Publication number
ES333150A1
ES333150A1 ES0333150A ES333150A ES333150A1 ES 333150 A1 ES333150 A1 ES 333150A1 ES 0333150 A ES0333150 A ES 0333150A ES 333150 A ES333150 A ES 333150A ES 333150 A1 ES333150 A1 ES 333150A1
Authority
ES
Spain
Prior art keywords
coating
translation
machine
legally binding
google translate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES0333150A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Publication of ES333150A1 publication Critical patent/ES333150A1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Improvements in control systems for coating apparatuses, especially of strip coating in metal displacement by means of vapor deposition in a vacuum, characterized in that a crucible is arranged next to the path of the strip adapted to contain coating metal, a cannon electronic adjacent to the crucible and provided with a thermionic emitter, which also discharges an electron beam to the metal contained therein, means for supplying electric power to said electronic cannon, which means includes voltage control elements, and means responsive to the speed of the strip to vary the aforementioned voltage control elements. (Machine-translation by Google Translate, not legally binding)
ES0333150A 1965-11-10 1966-11-08 Improvements in control systems for coating appliances. (Machine-translation by Google Translate, not legally binding) Expired ES333150A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US507103A US3397672A (en) 1965-11-10 1965-11-10 Control system for vapor-deposition coating apparatus

Publications (1)

Publication Number Publication Date
ES333150A1 true ES333150A1 (en) 1967-07-16

Family

ID=24017264

Family Applications (1)

Application Number Title Priority Date Filing Date
ES0333150A Expired ES333150A1 (en) 1965-11-10 1966-11-08 Improvements in control systems for coating appliances. (Machine-translation by Google Translate, not legally binding)

Country Status (7)

Country Link
US (1) US3397672A (en)
BE (1) BE689369A (en)
DE (1) DE1521573A1 (en)
ES (1) ES333150A1 (en)
FR (1) FR1498949A (en)
GB (1) GB1168813A (en)
NL (1) NL6615541A (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3636916A (en) * 1966-03-14 1972-01-25 Optical Coating Laboratory Inc Coating apparatus and system
GB1168641A (en) * 1966-05-19 1969-10-29 British Iron Steel Research Formation of Polymer Coatings on Substrates.
BE705239A (en) * 1966-06-15 1968-03-01
GB1173978A (en) * 1967-11-14 1969-12-10 Edwards High Vaccum Internat L Vacuum Deposition Apparatus
GB1281572A (en) * 1968-11-22 1972-07-12 Vepa Ag Device and method for treating a material length
US3907607A (en) * 1969-07-14 1975-09-23 Corning Glass Works Continuous processing of ribbon material
US3853093A (en) * 1970-01-14 1974-12-10 Optical Coating Laboratory Inc Optical thickness rate monitor
US3709192A (en) * 1970-06-01 1973-01-09 Sierracin Corp Coating control system
DE2345157C2 (en) * 1973-09-07 1975-09-18 August Thyssen-Huette Ag, 4100 Duisburg Device for stripping metal when hot-metallizing metal strips
DE3330092A1 (en) * 1983-08-20 1985-03-07 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR ADJUSTING THE LOCAL EVAPORATION PERFORMANCE ON EVAPORATORS IN VACUUM EVAPORATION PROCESSES
FR2611983A1 (en) * 1987-04-29 1988-09-09 Vtu Angel Kantchev ELECTRICAL SUPPLY CIRCUIT FOR AN ELECTRON BEAM EVAPORATOR
US6652654B1 (en) * 2000-09-27 2003-11-25 Bechtel Bwxt Idaho, Llc System configured for applying multiple modifying agents to a substrate
US6623686B1 (en) * 2000-09-28 2003-09-23 Bechtel Bwxt Idaho, Llc System configured for applying a modifying agent to a non-equidimensional substrate
US20050244580A1 (en) * 2004-04-30 2005-11-03 Eastman Kodak Company Deposition apparatus for temperature sensitive materials
CN105555994B (en) * 2013-12-20 2018-05-29 株式会社爱发科 Electron gun arrangements and vacuum deposition apparatus
DE102020200366A1 (en) * 2019-04-23 2020-10-29 Sms Group Gmbh PVD thickness control
CN113817992A (en) * 2021-10-28 2021-12-21 成都天一国泰真空设备有限公司 Electromagnet deflection structure for vacuum coating machine electron gun
CN115491663B (en) * 2022-11-21 2023-03-24 常州翊迈新材料科技有限公司 Fuel cell metal polar plate coating thickness on-line monitoring device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2860075A (en) * 1951-01-27 1958-11-11 Continental Can Co Method of making a heater for vacuum deposition
CH311812A (en) * 1951-11-05 1955-12-15 Zeiss Carl Fa Evaporation device.
US2872341A (en) * 1954-09-10 1959-02-03 Int Resistance Co Method of providing an adherent metal coating on a fluorocarbon resin
US2903547A (en) * 1957-08-21 1959-09-08 Continental Can Co Vaporizing element connector and method
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
DE1156521B (en) * 1961-09-05 1963-10-31 Heraeus Gmbh W C Electron beam gun for heating metals
US3146335A (en) * 1962-03-29 1964-08-25 United Aircraft Corp Focusing device for electron beams
DE1199097B (en) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Device for vacuum evaporation of wide strips, especially with metals, by heating the material to be evaporated by means of electron beams
DE1261971B (en) * 1963-02-13 1968-02-29 United Aircraft Corp Equipment for welding, cutting or material processing by means of a charge carrier beam
US3235480A (en) * 1963-04-08 1966-02-15 Electra Mfg Company Thermionic evaporation rate controller
GB1065060A (en) * 1963-04-19 1967-04-12 United Aircraft Corp Improvements in and relating to apparatus for working articles with energised beams
US3235647A (en) * 1963-06-06 1966-02-15 Temescal Metallurgical Corp Electron bombardment heating with adjustable impact pattern
US3244855A (en) * 1963-07-19 1966-04-05 United States Steel Corp System for correcting the shift of an electron-gun beam from the desired region of impingement
US3281265A (en) * 1963-09-17 1966-10-25 United States Steel Corp Method and apparatus for controlling coating thickness by electron beam evaporation
US3276902A (en) * 1963-10-01 1966-10-04 Itt Method of vapor deposition employing an electron beam

Also Published As

Publication number Publication date
NL6615541A (en) 1967-05-11
FR1498949A (en) 1967-10-20
GB1168813A (en) 1969-10-29
DE1521573A1 (en) 1969-11-06
BE689369A (en) 1967-05-08
US3397672A (en) 1968-08-20

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