GB1051402A - - Google Patents

Info

Publication number
GB1051402A
GB1051402A GB1051402DA GB1051402A GB 1051402 A GB1051402 A GB 1051402A GB 1051402D A GB1051402D A GB 1051402DA GB 1051402 A GB1051402 A GB 1051402A
Authority
GB
United Kingdom
Prior art keywords
gauges
amplifier
pair
attenuator
sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of GB1051402A publication Critical patent/GB1051402A/en
Active legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,051,402. Automatic vaporization control. COMPAGNIE GENERALE D'ELECTRICITE. May 8, 1964 [May 8, 1963], No.19204/64. Heading G3R. [Also in Division C7] In the vapour deposition of two materials e. g. Al and B on a substrate of e. g. Si from two separate sources, the heating of the sources is controlled by ionisation gauges. Part of the flow of vapour from each source passes through a slot in a rotating shutter to a screened gauge comprising a pair of gauges having a common filament. The signals from each pair of gauges are fed in turn to an amplifier, subtracting amplifier, amplifier, rectifier, recorder, and a regulating system comprising an attenuator followed by a feed back loop. The attenuator is adjustable during operation either manually or automatically to a fixed programme.
GB1051402D 1963-05-08 Active GB1051402A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR934112A FR1364093A (en) 1963-05-08 1963-05-08 Device for obtaining thin mixed layers by vacuum evaporation

Publications (1)

Publication Number Publication Date
GB1051402A true GB1051402A (en)

Family

ID=8803369

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1051402D Active GB1051402A (en) 1963-05-08

Country Status (5)

Country Link
BE (1) BE646776A (en)
DE (1) DE1282410B (en)
FR (1) FR1364093A (en)
GB (1) GB1051402A (en)
NL (1) NL6405174A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3570449A (en) * 1969-03-13 1971-03-16 United Aircraft Corp Sensor system for a vacuum deposition apparatus
US3636916A (en) * 1966-03-14 1972-01-25 Optical Coating Laboratory Inc Coating apparatus and system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2412729C3 (en) * 1974-03-16 1982-04-29 Leybold-Heraeus GmbH, 5000 Köln Method and arrangement for regulating the evaporation rate and the layer structure in the production of optically effective thin layers
US4837044A (en) * 1987-01-23 1989-06-06 Itt Research Institute Rugate optical filter systems

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1301197A (en) * 1960-10-04 1962-08-10 Rca Corp Evaporation chamber with hole

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3636916A (en) * 1966-03-14 1972-01-25 Optical Coating Laboratory Inc Coating apparatus and system
US3570449A (en) * 1969-03-13 1971-03-16 United Aircraft Corp Sensor system for a vacuum deposition apparatus

Also Published As

Publication number Publication date
NL6405174A (en) 1964-11-09
BE646776A (en) 1964-10-20
FR1364093A (en) 1964-06-19
DE1282410B (en) 1968-11-07

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