GB1140694A - Apparatus for forming electron beam - Google Patents

Apparatus for forming electron beam

Info

Publication number
GB1140694A
GB1140694A GB1850766A GB1850766A GB1140694A GB 1140694 A GB1140694 A GB 1140694A GB 1850766 A GB1850766 A GB 1850766A GB 1850766 A GB1850766 A GB 1850766A GB 1140694 A GB1140694 A GB 1140694A
Authority
GB
United Kingdom
Prior art keywords
gun
window
electron
electron beam
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1850766A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP40026053A external-priority patent/JPS494571B1/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of GB1140694A publication Critical patent/GB1140694A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB1850766A 1965-04-30 1966-04-27 Apparatus for forming electron beam Expired GB1140694A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP40026053A JPS494571B1 (enrdf_load_html_response) 1965-04-30 1965-04-30
JP4472565 1965-07-22

Publications (1)

Publication Number Publication Date
GB1140694A true GB1140694A (en) 1969-01-22

Family

ID=26363790

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1850766A Expired GB1140694A (en) 1965-04-30 1966-04-27 Apparatus for forming electron beam

Country Status (2)

Country Link
GB (1) GB1140694A (enrdf_load_html_response)
NL (1) NL6605803A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988001424A1 (en) * 1986-08-11 1988-02-25 Crewe Albert V Electron beam memory system with ultra-compact, high current density electron gun
WO2001035438A1 (en) * 1999-11-05 2001-05-17 Energy Sciences, Inc. Particle beam processing apparatus
US7348580B2 (en) 1999-11-05 2008-03-25 Energy Sciences, Inc. Particle beam processing apparatus and materials treatable using the apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988001424A1 (en) * 1986-08-11 1988-02-25 Crewe Albert V Electron beam memory system with ultra-compact, high current density electron gun
WO2001035438A1 (en) * 1999-11-05 2001-05-17 Energy Sciences, Inc. Particle beam processing apparatus
US6426507B1 (en) 1999-11-05 2002-07-30 Energy Sciences, Inc. Particle beam processing apparatus
US6610376B1 (en) 1999-11-05 2003-08-26 Energy Sciences, Inc. Particle beam processing apparatus
US7348580B2 (en) 1999-11-05 2008-03-25 Energy Sciences, Inc. Particle beam processing apparatus and materials treatable using the apparatus

Also Published As

Publication number Publication date
NL6605803A (enrdf_load_html_response) 1966-10-31

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