NL6605803A - - Google Patents

Info

Publication number
NL6605803A
NL6605803A NL6605803A NL6605803A NL6605803A NL 6605803 A NL6605803 A NL 6605803A NL 6605803 A NL6605803 A NL 6605803A NL 6605803 A NL6605803 A NL 6605803A NL 6605803 A NL6605803 A NL 6605803A
Authority
NL
Netherlands
Application number
NL6605803A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP40026053A external-priority patent/JPS494571B1/ja
Application filed filed Critical
Publication of NL6605803A publication Critical patent/NL6605803A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/021Electron guns using a field emission, photo emission, or secondary emission electron source
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/073Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL6605803A 1965-04-30 1966-04-29 NL6605803A (enrdf_load_html_response)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP40026053A JPS494571B1 (enrdf_load_html_response) 1965-04-30 1965-04-30
JP4472565 1965-07-22

Publications (1)

Publication Number Publication Date
NL6605803A true NL6605803A (enrdf_load_html_response) 1966-10-31

Family

ID=26363790

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6605803A NL6605803A (enrdf_load_html_response) 1965-04-30 1966-04-29

Country Status (2)

Country Link
GB (1) GB1140694A (enrdf_load_html_response)
NL (1) NL6605803A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
US20030001108A1 (en) 1999-11-05 2003-01-02 Energy Sciences, Inc. Particle beam processing apparatus and materials treatable using the apparatus
US6426507B1 (en) 1999-11-05 2002-07-30 Energy Sciences, Inc. Particle beam processing apparatus

Also Published As

Publication number Publication date
GB1140694A (en) 1969-01-22

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