GB1036293A - Improvements in or relating to the manufacture of semiconductor devices - Google Patents

Improvements in or relating to the manufacture of semiconductor devices

Info

Publication number
GB1036293A
GB1036293A GB2756364A GB2756364A GB1036293A GB 1036293 A GB1036293 A GB 1036293A GB 2756364 A GB2756364 A GB 2756364A GB 2756364 A GB2756364 A GB 2756364A GB 1036293 A GB1036293 A GB 1036293A
Authority
GB
United Kingdom
Prior art keywords
semi
manufacture
july
outermost layer
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2756364A
Inventor
Carl Peter Sandbank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB2756364A priority Critical patent/GB1036293A/en
Publication of GB1036293A publication Critical patent/GB1036293A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Bipolar Transistors (AREA)

Abstract

1,036,293. Semi-conductor devices. STANDARD TELEPHONES & CABLES Ltd. July 2, 1965 [July 3, 1964], No. 27563/64. Heading H1K. A semi-conductor device is made from a body including two or more superimposed uniform layers, of which at least one is of semi-conductive material, by a method which includes the step of removing material over one or more areas of a surface of the body, to at least the total depth of the outermost layer, by the erosive action of a repetitive electrical spark discharge between the body and an electrode near the relevant surface, to form one or more isolated regions in the material of at least the outermost layer. The Speecification describes in particular the manufacture of an integrated circuit including a transistor, Figs. 1 and 2 (not shown), and of a field-effect transistor, Figs. 3 and 4 (not shown).
GB2756364A 1964-07-03 1964-07-03 Improvements in or relating to the manufacture of semiconductor devices Expired GB1036293A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2756364A GB1036293A (en) 1964-07-03 1964-07-03 Improvements in or relating to the manufacture of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2756364A GB1036293A (en) 1964-07-03 1964-07-03 Improvements in or relating to the manufacture of semiconductor devices

Publications (1)

Publication Number Publication Date
GB1036293A true GB1036293A (en) 1966-07-20

Family

ID=10261658

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2756364A Expired GB1036293A (en) 1964-07-03 1964-07-03 Improvements in or relating to the manufacture of semiconductor devices

Country Status (1)

Country Link
GB (1) GB1036293A (en)

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