FR3139735B1 - Procédé et dispositif de dépôt de couche mince sur surface courbe - Google Patents

Procédé et dispositif de dépôt de couche mince sur surface courbe

Info

Publication number
FR3139735B1
FR3139735B1 FR2209399A FR2209399A FR3139735B1 FR 3139735 B1 FR3139735 B1 FR 3139735B1 FR 2209399 A FR2209399 A FR 2209399A FR 2209399 A FR2209399 A FR 2209399A FR 3139735 B1 FR3139735 B1 FR 3139735B1
Authority
FR
France
Prior art keywords
substrate
axis
thin film
material particles
curved surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2209399A
Other languages
English (en)
Other versions
FR3139735A1 (fr
Inventor
Arnaud Davenel
Pascal Marie Joseph Pont
Geoffrey Jamart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Safran Electronics and Defense SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Safran Electronics and Defense SAS filed Critical Safran Electronics and Defense SAS
Priority to FR2209399A priority Critical patent/FR3139735B1/fr
Publication of FR3139735A1 publication Critical patent/FR3139735A1/fr
Application granted granted Critical
Publication of FR3139735B1 publication Critical patent/FR3139735B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0228—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the movement of the objects being rotative
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Procédé de réalisation d’une couche mince de matériau sur une surface (S) d’un substrat (O), comprenant les étapes de projeter des particules de matériau depuis une source (3) de particules de matériau, déplacer le support (4) sur une trajectoire fermée autour d’un premier axe de rotation (A1), faire pivoter le substrat (O) sur lui-même autour d’un deuxième axe de rotation (A3) correspondant à un axe de symétrie de la surface (S) du substrat (O). Le procédé comprend l’étape de déplacer le support pour exposer à une projection directe des particules de matériau différentes portions de la surface (S) du substrat (O) pendant un temps d’exposition dépendant de l’épaisseur de matériau souhaitée sur lesdites portions de surface. Dispositif pour la mise en œuvre de ce procédé. FIGURE DE L’ABREGE : Fig. 1
FR2209399A 2022-09-19 2022-09-19 Procédé et dispositif de dépôt de couche mince sur surface courbe Active FR3139735B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR2209399A FR3139735B1 (fr) 2022-09-19 2022-09-19 Procédé et dispositif de dépôt de couche mince sur surface courbe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2209399 2022-09-19
FR2209399A FR3139735B1 (fr) 2022-09-19 2022-09-19 Procédé et dispositif de dépôt de couche mince sur surface courbe

Publications (2)

Publication Number Publication Date
FR3139735A1 FR3139735A1 (fr) 2024-03-22
FR3139735B1 true FR3139735B1 (fr) 2025-10-24

Family

ID=86764467

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2209399A Active FR3139735B1 (fr) 2022-09-19 2022-09-19 Procédé et dispositif de dépôt de couche mince sur surface courbe

Country Status (1)

Country Link
FR (1) FR3139735B1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5558909A (en) * 1996-01-17 1996-09-24 Textron Automotive Interiors, Inc. Apparatus and method for vacuum-metallizing articles with significant deposition onto three-dimensional surfaces
CN111206225B (zh) * 2018-11-21 2022-03-08 聚昌科技股份有限公司 3d蒸镀的公自转镀锅结构

Also Published As

Publication number Publication date
FR3139735A1 (fr) 2024-03-22

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