FR3097142B1 - Procédé de dépôt - Google Patents

Procédé de dépôt Download PDF

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Publication number
FR3097142B1
FR3097142B1 FR1906194A FR1906194A FR3097142B1 FR 3097142 B1 FR3097142 B1 FR 3097142B1 FR 1906194 A FR1906194 A FR 1906194A FR 1906194 A FR1906194 A FR 1906194A FR 3097142 B1 FR3097142 B1 FR 3097142B1
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FR
France
Prior art keywords
deposition process
substrate
pouring
abstract
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1906194A
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English (en)
Other versions
FR3097142A1 (fr
Inventor
Bernard Viala
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1906194A priority Critical patent/FR3097142B1/fr
Priority to PCT/EP2020/065874 priority patent/WO2020249523A1/fr
Priority to US17/617,569 priority patent/US20220234070A1/en
Priority to EP20730086.4A priority patent/EP3983138A1/fr
Publication of FR3097142A1 publication Critical patent/FR3097142A1/fr
Application granted granted Critical
Publication of FR3097142B1 publication Critical patent/FR3097142B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B05D1/005—Spin coating

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Procédé de dépôt La présente description concerne un procédé de dépôt d’une couche d’un matériau comprenant l’étape de verser ledit matériau en surface (212) d’un substrat (202), ledit substrat étant soumis à un mouvement oscillant. Figure pour l'abrégé : Fig. 2
FR1906194A 2019-06-11 2019-06-11 Procédé de dépôt Active FR3097142B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1906194A FR3097142B1 (fr) 2019-06-11 2019-06-11 Procédé de dépôt
PCT/EP2020/065874 WO2020249523A1 (fr) 2019-06-11 2020-06-08 Procede de depot
US17/617,569 US20220234070A1 (en) 2019-06-11 2020-06-08 Deposition method
EP20730086.4A EP3983138A1 (fr) 2019-06-11 2020-06-08 Procede de depot

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1906194 2019-06-11
FR1906194A FR3097142B1 (fr) 2019-06-11 2019-06-11 Procédé de dépôt

Publications (2)

Publication Number Publication Date
FR3097142A1 FR3097142A1 (fr) 2020-12-18
FR3097142B1 true FR3097142B1 (fr) 2022-05-27

Family

ID=68072708

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1906194A Active FR3097142B1 (fr) 2019-06-11 2019-06-11 Procédé de dépôt

Country Status (4)

Country Link
US (1) US20220234070A1 (fr)
EP (1) EP3983138A1 (fr)
FR (1) FR3097142B1 (fr)
WO (1) WO2020249523A1 (fr)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1566113A (en) * 1976-08-31 1980-04-30 Philips Electronic Associated Providing a layer on a substrate
DE3736391C1 (de) * 1987-10-28 1989-02-16 Du Pont Deutschland Verfahren zum Beschichten von vorher klebrig gemachten Oberflaechenbereichen
US4850299A (en) * 1988-05-24 1989-07-25 Merullo John G Semiconductor wafer coating apparatus with angular oscillation means
ATE148641T1 (de) * 1992-08-10 1997-02-15 Intermetallics Co Ltd Beschichtungsverfahren
US5474846A (en) * 1993-01-26 1995-12-12 Haldenby; George A. Uniform polymeric coated interior cylinder surface
KR100307852B1 (ko) * 1993-11-12 2001-12-01 제리 에스터슨 평탄한기판의박막코팅방법및장치
US5925410A (en) * 1997-05-06 1999-07-20 Micron Technology, Inc. Vibration-enhanced spin-on film techniques for semiconductor device processing
EP0949012A1 (fr) * 1998-04-10 1999-10-13 Sommer Revêtements France S.A. Procédé et dispositif de lissage d'un dépÔt de matières solides divisées
JP4301596B2 (ja) * 1998-06-12 2009-07-22 三菱電機株式会社 電子デバイスの製造方法および該製造方法に用いるスリット滴下ノズル
US20030224105A1 (en) * 2002-05-30 2003-12-04 Symyx Technologies, Inc. Apparatus and methods for forming films on substrates
US20040071888A1 (en) * 2002-05-30 2004-04-15 Symyx Technologies, Inc. Apparatus and method of research for creating and testing thin films
TWI221427B (en) * 2003-10-07 2004-10-01 Ind Tech Res Inst Micro-dispensing film forming apparatus with vibration-induced method
KR100980788B1 (ko) * 2008-11-04 2010-09-10 한국기계연구원 유동체의 표면패턴 형성장치 및 그 형성방법
WO2012094200A2 (fr) * 2011-01-04 2012-07-12 San Diego State University Research Foundation Procédés d'application de polymères sur des surfaces et surfaces revêtues de polymères
US8889222B1 (en) * 2013-12-03 2014-11-18 Advenira Enterprises, Inc. Coating material distribution using simultaneous rotation and vibration
DE102016122721B4 (de) * 2016-11-24 2021-12-30 Iso Flock Gmbh Verfahren und Vorrichtung zur mechanischen Beflockung von Bauteilen

Also Published As

Publication number Publication date
FR3097142A1 (fr) 2020-12-18
US20220234070A1 (en) 2022-07-28
WO2020249523A1 (fr) 2020-12-17
EP3983138A1 (fr) 2022-04-20

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