FR3039277B1 - Methode ultra-precise pour la determination de la dilatation thermique - Google Patents

Methode ultra-precise pour la determination de la dilatation thermique Download PDF

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Publication number
FR3039277B1
FR3039277B1 FR1657029A FR1657029A FR3039277B1 FR 3039277 B1 FR3039277 B1 FR 3039277B1 FR 1657029 A FR1657029 A FR 1657029A FR 1657029 A FR1657029 A FR 1657029A FR 3039277 B1 FR3039277 B1 FR 3039277B1
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France
Prior art keywords
thermal expansion
ultra
precise method
determining thermal
determining
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FR1657029A
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FR3039277A1 (fr
Inventor
Axel Engel
Clemens Kunish
Ralf Jedamzik
Gerhard Westenberger
Peter Fischer
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Schott AG
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Schott AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003—Generation of the force
    • G01N2203/0057—Generation of the force using stresses due to heating, e.g. conductive heating, radiative heating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

Méthode ultra-précise pour la détermination de la dilatation thermique L’invention concerne un procédé de détermination de la dilatation thermique d’un matériau à faible dilatation thermique, avec une précision de mesure très élevée d’au maximum +/- 3 ppb/K ou moins et/ou une reproductibilité d’au maximum +/- 1 ppb/K ou moins. Pour la réalisation de la mesure, on utilise un dispositif de mesure sur la base d’un dilatomètre à tige poussoir perfectionné. Référence : figure 1
FR1657029A 2015-07-24 2016-07-22 Methode ultra-precise pour la determination de la dilatation thermique Active FR3039277B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015112150 2015-07-24
DE102015113548.5A DE102015113548A1 (de) 2015-07-24 2015-08-17 Hochgenaues Verfahren zur Bestimmung der thermischen Ausdehnung

Publications (2)

Publication Number Publication Date
FR3039277A1 FR3039277A1 (fr) 2017-01-27
FR3039277B1 true FR3039277B1 (fr) 2023-10-27

Family

ID=57738783

Family Applications (1)

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FR1657029A Active FR3039277B1 (fr) 2015-07-24 2016-07-22 Methode ultra-precise pour la determination de la dilatation thermique

Country Status (5)

Country Link
US (1) US10942138B2 (fr)
JP (1) JP6789023B2 (fr)
BE (1) BE1023729B1 (fr)
DE (1) DE102015113548A1 (fr)
FR (1) FR3039277B1 (fr)

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* Cited by examiner, † Cited by third party
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CN107655931B (zh) * 2017-08-09 2020-06-09 北京空间机电研究所 一种高精度筒体线膨胀系数测量装置及方法
DE102018104309A1 (de) * 2018-02-26 2019-08-29 Leibniz-Institut für Werkstofforientierte Technologien - IWT Dilatometer zur automatisierten Untersuchung von Proben sowie Verfahren zur automatisierten dilatometrischen Untersuchung von Proben
CN109856181A (zh) * 2019-02-19 2019-06-07 商洛学院 一种升降式大学物理教学用金属线膨胀系数测定装置
JP2022142778A (ja) 2021-03-16 2022-09-30 ショット アクチエンゲゼルシャフト 特定の熱膨張挙動を示すガラスセラミック
JP2024511363A (ja) 2021-03-16 2024-03-13 ショット アクチエンゲゼルシャフト 特定の熱膨張挙動を示すｅｕｖｌ精密部品
DE102022123616A1 (de) 2022-09-15 2024-03-21 Schott Ag Glaskeramik mit spezifischem thermischen Ausdehnungsverhalten

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US3898836A (en) 1974-04-08 1975-08-12 Theta Ind Inc Differential dilatometer
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FR2468902A1 (fr) * 1979-11-05 1981-05-08 Vettori De Almeida Rodrigues C Dilatometre differentiel
US4618274A (en) * 1984-04-16 1986-10-21 Clusener Gerhard R Dilatometer housing
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US4636090A (en) * 1985-05-22 1987-01-13 Theta Industries, Inc. Low temperature dilatometer
DE3714988A1 (de) * 1987-05-06 1988-11-17 Mtu Muenchen Gmbh Dilatometer
US5121987A (en) 1989-03-02 1992-06-16 Honeywell Inc. Method and apparatus for measuring coefficient of thermal expansion
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TW527526B (en) * 2000-08-24 2003-04-11 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby
US6724488B1 (en) * 2002-05-07 2004-04-20 Paul L. Guilmette Interferometer for length measurement
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DE10317792A1 (de) * 2003-04-16 2004-11-11 Schott Glas Maskenrohling zur Verwendung in der EUV-Lithographie und Verfahren zu dessen Herstellung
JP4567414B2 (ja) * 2003-10-31 2010-10-20 エスアイアイ・ナノテクノロジー株式会社 熱機械的測定装置、熱重量測定装置及び熱分析装置
US7239397B2 (en) * 2003-12-31 2007-07-03 Corning Incorporated Device for high-accuracy measurement of dimensional changes
US7224475B2 (en) * 2004-04-29 2007-05-29 Battelle Energy Alliance, Llc Methods and apparatus for measurement of a dimensional characteristic and methods of predictive modeling related thereto
US7635092B2 (en) * 2004-08-04 2009-12-22 Waters Technologies Corporation Humidity-controlled chamber for a thermogravimetric instrument
JP2007040715A (ja) 2005-07-29 2007-02-15 Ulvac-Riko Inc マイケルソン光干渉計、この光干渉計を用いた熱膨張計及び熱膨張量測定方法
US7812964B2 (en) * 2006-11-15 2010-10-12 Zygo Corporation Distance measuring interferometer and encoder metrology systems for use in lithography tools
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RU2593917C1 (ru) 2012-10-24 2016-08-10 Шотт Аг Способ определения запаздывающих во времени изменений физических величин, зависящих от температуры или механического напряжения, для стекла или стеклокерамики
DE102012110177B4 (de) * 2012-10-24 2014-08-07 Schott Ag Verfahren zur Bestimmung thermomechanischer Parameter von Glas- oder Glaskeramikprodukten
DE102014102077A1 (de) * 2014-02-19 2015-08-20 Netzsch-Gerätebau GmbH Vorrichtung und Verfahren zur Messung einer Längenänderung einer Probe und/oder zur Messung einer Deformationskraft an einer Probe
TWI585363B (zh) * 2015-12-01 2017-06-01 國立清華大學 應用於量測之雙球桿系統及其誤差補償方法
US10458936B2 (en) * 2016-05-11 2019-10-29 Corning Incorporated Apparatus and method for the determination of the absolute coefficient of thermal expansion in ultralow expansion materials

Also Published As

Publication number Publication date
US20170023502A1 (en) 2017-01-26
JP2017040648A (ja) 2017-02-23
BE1023729A1 (de) 2017-06-30
JP6789023B2 (ja) 2020-11-25
FR3039277A1 (fr) 2017-01-27
DE102015113548A1 (de) 2017-01-26
US10942138B2 (en) 2021-03-09
BE1023729B1 (de) 2017-06-30

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