FR2903181B1 - Procede et dispositif pour mesurer l'epaisseur de couches minces avec une sonde de mesure - Google Patents

Procede et dispositif pour mesurer l'epaisseur de couches minces avec une sonde de mesure

Info

Publication number
FR2903181B1
FR2903181B1 FR0703363A FR0703363A FR2903181B1 FR 2903181 B1 FR2903181 B1 FR 2903181B1 FR 0703363 A FR0703363 A FR 0703363A FR 0703363 A FR0703363 A FR 0703363A FR 2903181 B1 FR2903181 B1 FR 2903181B1
Authority
FR
France
Prior art keywords
measuring
layer thickness
thick layer
probe
measuring probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0703363A
Other languages
English (en)
French (fr)
Other versions
FR2903181A1 (fr
Inventor
Helmut Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Original Assignee
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Immobiliengesellschaft Helmut Fischer GmbH and Co KG filed Critical Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Publication of FR2903181A1 publication Critical patent/FR2903181A1/fr
Application granted granted Critical
Publication of FR2903181B1 publication Critical patent/FR2903181B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B38/00—Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product
    • B21B38/04—Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product for measuring thickness, width, diameter or other transverse dimensions of the product
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness
    • G01B13/06—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FR0703363A 2006-05-15 2007-05-11 Procede et dispositif pour mesurer l'epaisseur de couches minces avec une sonde de mesure Expired - Fee Related FR2903181B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006022882.0A DE102006022882B4 (de) 2006-05-15 2006-05-15 Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde

Publications (2)

Publication Number Publication Date
FR2903181A1 FR2903181A1 (fr) 2008-01-04
FR2903181B1 true FR2903181B1 (fr) 2012-09-21

Family

ID=38219216

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0703363A Expired - Fee Related FR2903181B1 (fr) 2006-05-15 2007-05-11 Procede et dispositif pour mesurer l'epaisseur de couches minces avec une sonde de mesure

Country Status (6)

Country Link
US (1) US7690243B2 (enExample)
JP (1) JP5395334B2 (enExample)
CN (1) CN101074864B (enExample)
DE (1) DE102006022882B4 (enExample)
FR (1) FR2903181B1 (enExample)
GB (1) GB2438944B (enExample)

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SE527204C2 (sv) * 2004-05-28 2006-01-17 Daprox Ab Mätanordning och förfarande
DE102005051675B3 (de) 2005-10-28 2007-04-19 Windmöller & Hölscher Kg Foliendickensensor mit porösem Bläser
GB2468766B (en) * 2009-03-18 2013-03-27 Helmut Fischer Gmbh Inst Fa R Elektronik Und Messtechnik Measurement stand and method of its electrical control
JP5481755B2 (ja) * 2011-05-06 2014-04-23 レーザーテック株式会社 反り測定装置、及び反り測定方法
EP2715334B1 (de) * 2011-05-25 2020-04-08 Helmut Fischer GmbH Messsonde zur messung der dicke dünner schichten
CN103712549A (zh) * 2013-12-18 2014-04-09 江苏瑞新科技股份有限公司 一种共轭磁介质电涡流传感器
CN105115411B (zh) * 2015-09-09 2018-03-02 海安迪斯凯瑞探测仪器有限公司 一种涂层测厚仪探头
CN105783830B (zh) * 2016-05-17 2018-06-08 山东福贞金属包装有限公司 带有气动装置的干膜测厚仪
DE102017129150B4 (de) * 2017-12-07 2020-03-05 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke von nicht magnetisierbaren Schichten auf einem magnetisierbaren Grundwerkstoff
CN109470184A (zh) * 2018-12-25 2019-03-15 中国航发哈尔滨轴承有限公司 一种用于测量轴承内径的电子柱气电测微仪
DE102024131425B3 (de) * 2024-10-28 2025-11-06 Jenoptik Industrial Metrology Germany Gmbh Messvorrichtung

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US3513555A (en) * 1967-03-30 1970-05-26 Bradstreet J Vachon Thickness gauging apparatus
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SE434997B (sv) * 1983-01-12 1984-08-27 Per Roode Berglund Anordning for metning av tjockleken av en rorlig bana
JPS59122506U (ja) * 1983-02-04 1984-08-17 オムロン株式会社 リニアエンコ−ダ
JPH0431526Y2 (enExample) * 1985-06-10 1992-07-29
JPH0668441B2 (ja) * 1986-04-24 1994-08-31 横河電機株式会社 シ−ト状物質の厚さ測定装置
JPH0518644Y2 (enExample) * 1986-09-17 1993-05-18
US4742299A (en) * 1986-10-15 1988-05-03 The United States Of America As Represented By The Department Of Energy Methods of and apparatus for levitating an eddy current probe
JPS63308503A (ja) * 1987-06-10 1988-12-15 Yokogawa Electric Corp シ−ト状物質の厚さ測定装置
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JPH01155204A (ja) * 1987-12-14 1989-06-19 Yokogawa Electric Corp 厚さ測定装置の校正方法
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JPH0740166Y2 (ja) * 1989-03-30 1995-09-13 横河電機株式会社 シート状物質の厚さ測定装置
JPH076482Y2 (ja) * 1989-03-31 1995-02-15 横河電機株式会社 シート状物質の厚さ測定装置
JP2568958Y2 (ja) * 1989-11-14 1998-04-22 横河電機株式会社 シート状物体特性測定装置の吸着力調整機構
US5742167A (en) * 1991-05-23 1998-04-21 Sussex Instruments Plc. Film thickness measuring capacitive sensors
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JP3398244B2 (ja) * 1995-02-07 2003-04-21 京セラ株式会社 非接触型測長器
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EP2264522A3 (en) * 2000-07-16 2011-12-14 The Board of Regents of The University of Texas System Method of forming a pattern on a substrate
JP4128344B2 (ja) * 2001-08-14 2008-07-30 大日本スクリーン製造株式会社 基板処理装置
JP2003097935A (ja) * 2001-09-20 2003-04-03 Nippei Toyama Corp 距離検出装置および厚さ検出装置
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US7271888B2 (en) * 2003-12-31 2007-09-18 Microfabrica Inc. Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
SE527204C2 (sv) * 2004-05-28 2006-01-17 Daprox Ab Mätanordning och förfarande
CN100356135C (zh) * 2004-08-31 2007-12-19 精碟科技股份有限公司 薄膜厚度量测装置

Also Published As

Publication number Publication date
GB2438944B (en) 2009-07-22
JP2007309935A (ja) 2007-11-29
CN101074864B (zh) 2012-10-10
GB2438944A (en) 2007-12-12
US7690243B2 (en) 2010-04-06
US20070289361A1 (en) 2007-12-20
CN101074864A (zh) 2007-11-21
GB0709051D0 (en) 2007-06-20
FR2903181A1 (fr) 2008-01-04
DE102006022882A1 (de) 2007-11-22
JP5395334B2 (ja) 2014-01-22
DE102006022882B4 (de) 2016-04-14

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