CN101074864B - 用于通过测量探头测量薄层厚度的方法和设备 - Google Patents

用于通过测量探头测量薄层厚度的方法和设备 Download PDF

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Publication number
CN101074864B
CN101074864B CN200710103923XA CN200710103923A CN101074864B CN 101074864 B CN101074864 B CN 101074864B CN 200710103923X A CN200710103923X A CN 200710103923XA CN 200710103923 A CN200710103923 A CN 200710103923A CN 101074864 B CN101074864 B CN 101074864B
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CN
China
Prior art keywords
sensor element
measuring sonde
housing
exit opening
surface measurements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN200710103923XA
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English (en)
Chinese (zh)
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CN101074864A (zh
Inventor
H·费希尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
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Immobiliengesellschaft Helmut Fischer GmbH and Co KG
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Publication of CN101074864A publication Critical patent/CN101074864A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B38/00—Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product
    • B21B38/04—Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product for measuring thickness, width, diameter or other transverse dimensions of the product
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness
    • G01B13/06—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CN200710103923XA 2006-05-15 2007-05-15 用于通过测量探头测量薄层厚度的方法和设备 Expired - Fee Related CN101074864B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006022882.0 2006-05-15
DE102006022882.0A DE102006022882B4 (de) 2006-05-15 2006-05-15 Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde

Publications (2)

Publication Number Publication Date
CN101074864A CN101074864A (zh) 2007-11-21
CN101074864B true CN101074864B (zh) 2012-10-10

Family

ID=38219216

Family Applications (1)

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CN200710103923XA Expired - Fee Related CN101074864B (zh) 2006-05-15 2007-05-15 用于通过测量探头测量薄层厚度的方法和设备

Country Status (6)

Country Link
US (1) US7690243B2 (enExample)
JP (1) JP5395334B2 (enExample)
CN (1) CN101074864B (enExample)
DE (1) DE102006022882B4 (enExample)
FR (1) FR2903181B1 (enExample)
GB (1) GB2438944B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
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SE527204C2 (sv) * 2004-05-28 2006-01-17 Daprox Ab Mätanordning och förfarande
DE102005051675B3 (de) 2005-10-28 2007-04-19 Windmöller & Hölscher Kg Foliendickensensor mit porösem Bläser
GB2468766B (en) * 2009-03-18 2013-03-27 Helmut Fischer Gmbh Inst Fa R Elektronik Und Messtechnik Measurement stand and method of its electrical control
JP5481755B2 (ja) * 2011-05-06 2014-04-23 レーザーテック株式会社 反り測定装置、及び反り測定方法
EP2715334B1 (de) * 2011-05-25 2020-04-08 Helmut Fischer GmbH Messsonde zur messung der dicke dünner schichten
CN103712549A (zh) * 2013-12-18 2014-04-09 江苏瑞新科技股份有限公司 一种共轭磁介质电涡流传感器
CN105115411B (zh) * 2015-09-09 2018-03-02 海安迪斯凯瑞探测仪器有限公司 一种涂层测厚仪探头
CN105783830B (zh) * 2016-05-17 2018-06-08 山东福贞金属包装有限公司 带有气动装置的干膜测厚仪
DE102017129150B4 (de) * 2017-12-07 2020-03-05 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke von nicht magnetisierbaren Schichten auf einem magnetisierbaren Grundwerkstoff
CN109470184A (zh) * 2018-12-25 2019-03-15 中国航发哈尔滨轴承有限公司 一种用于测量轴承内径的电子柱气电测微仪
DE102024131425B3 (de) * 2024-10-28 2025-11-06 Jenoptik Industrial Metrology Germany Gmbh Messvorrichtung

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US4912410A (en) * 1987-09-29 1990-03-27 Bnf Metals Technology Centre Apparatus for measuring the thickness of an electrically non-conductive material on a metallic base
US6318153B1 (en) * 1996-09-30 2001-11-20 Micro-Epsilon Messtechnik Gmbh & Co. Kg Non-contact film thickness gauging sensor
CN1743791A (zh) * 2004-08-31 2006-03-08 精碟科技股份有限公司 薄膜厚度量测装置

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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3855524A (en) * 1972-09-05 1974-12-17 Industrial Nucleonics Corp Measuring gauge with air bearing and resistant to tilt
US4912410A (en) * 1987-09-29 1990-03-27 Bnf Metals Technology Centre Apparatus for measuring the thickness of an electrically non-conductive material on a metallic base
US6318153B1 (en) * 1996-09-30 2001-11-20 Micro-Epsilon Messtechnik Gmbh & Co. Kg Non-contact film thickness gauging sensor
CN1743791A (zh) * 2004-08-31 2006-03-08 精碟科技股份有限公司 薄膜厚度量测装置

Also Published As

Publication number Publication date
GB2438944B (en) 2009-07-22
JP2007309935A (ja) 2007-11-29
GB2438944A (en) 2007-12-12
US7690243B2 (en) 2010-04-06
US20070289361A1 (en) 2007-12-20
CN101074864A (zh) 2007-11-21
GB0709051D0 (en) 2007-06-20
FR2903181A1 (fr) 2008-01-04
FR2903181B1 (fr) 2012-09-21
DE102006022882A1 (de) 2007-11-22
JP5395334B2 (ja) 2014-01-22
DE102006022882B4 (de) 2016-04-14

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