DE102006022882B4 - Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde - Google Patents

Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde Download PDF

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Publication number
DE102006022882B4
DE102006022882B4 DE102006022882.0A DE102006022882A DE102006022882B4 DE 102006022882 B4 DE102006022882 B4 DE 102006022882B4 DE 102006022882 A DE102006022882 A DE 102006022882A DE 102006022882 B4 DE102006022882 B4 DE 102006022882B4
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DE
Germany
Prior art keywords
measuring
housing
measuring probe
sensor element
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102006022882.0A
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German (de)
English (en)
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DE102006022882A1 (de
Inventor
Auf Nichtnennung Antrag
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Original Assignee
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Immobiliengesellschaft Helmut Fischer GmbH and Co KG filed Critical Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Priority to DE102006022882.0A priority Critical patent/DE102006022882B4/de
Priority to GB0709051A priority patent/GB2438944B/en
Priority to FR0703363A priority patent/FR2903181B1/fr
Priority to US11/803,703 priority patent/US7690243B2/en
Priority to JP2007129002A priority patent/JP5395334B2/ja
Priority to CN200710103923XA priority patent/CN101074864B/zh
Publication of DE102006022882A1 publication Critical patent/DE102006022882A1/de
Application granted granted Critical
Publication of DE102006022882B4 publication Critical patent/DE102006022882B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B38/00—Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product
    • B21B38/04—Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product for measuring thickness, width, diameter or other transverse dimensions of the product
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness
    • G01B13/06—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE102006022882.0A 2006-05-15 2006-05-15 Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde Expired - Fee Related DE102006022882B4 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102006022882.0A DE102006022882B4 (de) 2006-05-15 2006-05-15 Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde
GB0709051A GB2438944B (en) 2006-05-15 2007-05-10 Method and apparatus for measurement of the thickness of thin films by means of a measurement probe
FR0703363A FR2903181B1 (fr) 2006-05-15 2007-05-11 Procede et dispositif pour mesurer l'epaisseur de couches minces avec une sonde de mesure
US11/803,703 US7690243B2 (en) 2006-05-15 2007-05-15 Method and apparatus for measurement of the thickness of thin layers by means of measurement probe
JP2007129002A JP5395334B2 (ja) 2006-05-15 2007-05-15 測定プローブにより薄層の厚さを測定する方法と装置
CN200710103923XA CN101074864B (zh) 2006-05-15 2007-05-15 用于通过测量探头测量薄层厚度的方法和设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006022882.0A DE102006022882B4 (de) 2006-05-15 2006-05-15 Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde

Publications (2)

Publication Number Publication Date
DE102006022882A1 DE102006022882A1 (de) 2007-11-22
DE102006022882B4 true DE102006022882B4 (de) 2016-04-14

Family

ID=38219216

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102006022882.0A Expired - Fee Related DE102006022882B4 (de) 2006-05-15 2006-05-15 Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde

Country Status (6)

Country Link
US (1) US7690243B2 (enExample)
JP (1) JP5395334B2 (enExample)
CN (1) CN101074864B (enExample)
DE (1) DE102006022882B4 (enExample)
FR (1) FR2903181B1 (enExample)
GB (1) GB2438944B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE527204C2 (sv) * 2004-05-28 2006-01-17 Daprox Ab Mätanordning och förfarande
DE102005051675B3 (de) * 2005-10-28 2007-04-19 Windmöller & Hölscher Kg Foliendickensensor mit porösem Bläser
DE102010011633B4 (de) * 2009-03-18 2020-09-24 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messstativ und Verfahren zu dessen elektrischer Ansteuerung
JP5481755B2 (ja) * 2011-05-06 2014-04-23 レーザーテック株式会社 反り測定装置、及び反り測定方法
WO2012160132A1 (de) * 2011-05-25 2012-11-29 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur messung der dicke dünner schichten sowie verfahren zur herstellung eines sensorelementes für die messsonde
CN103712549A (zh) * 2013-12-18 2014-04-09 江苏瑞新科技股份有限公司 一种共轭磁介质电涡流传感器
CN105115411B (zh) * 2015-09-09 2018-03-02 海安迪斯凯瑞探测仪器有限公司 一种涂层测厚仪探头
CN105783830B (zh) * 2016-05-17 2018-06-08 山东福贞金属包装有限公司 带有气动装置的干膜测厚仪
DE102017129150B4 (de) * 2017-12-07 2020-03-05 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke von nicht magnetisierbaren Schichten auf einem magnetisierbaren Grundwerkstoff
CN109470184A (zh) * 2018-12-25 2019-03-15 中国航发哈尔滨轴承有限公司 一种用于测量轴承内径的电子柱气电测微仪
DE102024131425B3 (de) * 2024-10-28 2025-11-06 Jenoptik Industrial Metrology Germany Gmbh Messvorrichtung

Citations (6)

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GB839996A (en) * 1957-04-13 1960-06-29 Ti Group Services Ltd Pneumatic servo system
US3884076A (en) * 1971-12-07 1975-05-20 Zumbach Electronic Automatic Measuring device
US4854156A (en) * 1989-01-03 1989-08-08 Systems Research Laboratories, Inc. Pneumatic surface-following control system
DE4119903A1 (de) * 1991-06-17 1992-12-24 Helmut Fischer Gmbh & Co Verfahren und vorrichtung zur messung duenner schichten
US6318153B1 (en) * 1996-09-30 2001-11-20 Micro-Epsilon Messtechnik Gmbh & Co. Kg Non-contact film thickness gauging sensor
US20030000286A1 (en) * 2000-01-14 2003-01-02 Bengt Akerblom Measuring device in which a measuring head is movably supported

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US3194055A (en) * 1963-05-06 1965-07-13 Knobel Max Work dimension and position detecting, indicating and controlling method and apparatus
US3513555A (en) * 1967-03-30 1970-05-26 Bradstreet J Vachon Thickness gauging apparatus
US3528002A (en) * 1968-01-04 1970-09-08 Conrac Corp Caliper with air bearings for continuously moving sheet material
CH542426A (de) * 1970-03-11 1973-09-30 Zumbach Electronic Automatic Verfahren und Einrichtung zur berührungslosen Messung einer Schichtdicke
US3948082A (en) * 1970-03-11 1976-04-06 Zumbach Electronic-Automatic Method and device for contactless measuring of the thickness of layers, particularly of insulating layers on metallic parts
US3855524A (en) * 1972-09-05 1974-12-17 Industrial Nucleonics Corp Measuring gauge with air bearing and resistant to tilt
GB1576994A (en) * 1976-12-14 1980-10-15 Measurex Corp Apparatus for measuring the thickness of a sheet of non-magnetic material
JPS5534267U (enExample) * 1978-08-28 1980-03-05
SE415801C (sv) * 1979-01-30 1982-10-18 Per Roode Berglund Sjelvstabiliserande pneumatisk legesgivare
JPS5832311U (ja) * 1981-08-21 1983-03-02 株式会社横河電機製作所 非接触の厚さ計
SE454913B (sv) * 1982-07-27 1988-06-06 Esselte Security Syst Ab Anordning for beroringsfri metning av skiv- eller arkformiga objekts tjocklek
SE434997B (sv) * 1983-01-12 1984-08-27 Per Roode Berglund Anordning for metning av tjockleken av en rorlig bana
JPS59122506U (ja) * 1983-02-04 1984-08-17 オムロン株式会社 リニアエンコ−ダ
JPH0431526Y2 (enExample) * 1985-06-10 1992-07-29
JPH0668441B2 (ja) * 1986-04-24 1994-08-31 横河電機株式会社 シ−ト状物質の厚さ測定装置
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JPS63308503A (ja) * 1987-06-10 1988-12-15 Yokogawa Electric Corp シ−ト状物質の厚さ測定装置
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JPH01155204A (ja) * 1987-12-14 1989-06-19 Yokogawa Electric Corp 厚さ測定装置の校正方法
JPH0740166Y2 (ja) * 1989-03-30 1995-09-13 横河電機株式会社 シート状物質の厚さ測定装置
JPH076482Y2 (ja) * 1989-03-31 1995-02-15 横河電機株式会社 シート状物質の厚さ測定装置
JP2568958Y2 (ja) * 1989-11-14 1998-04-22 横河電機株式会社 シート状物体特性測定装置の吸着力調整機構
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JP3398244B2 (ja) * 1995-02-07 2003-04-21 京セラ株式会社 非接触型測長器
IT1282789B1 (it) * 1996-06-07 1998-03-31 Electronic Systems Spa Dispositivo di misurazione senza contatto di spessore per materiali non metallici in film,fogli,nastri o simili
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JP2000155002A (ja) * 1998-11-19 2000-06-06 Mitsutoyo Corp 形状計測用プローブ
JP4067307B2 (ja) * 2000-04-27 2008-03-26 株式会社荏原製作所 回転保持装置
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US6588118B2 (en) * 2001-10-10 2003-07-08 Abb Inc. Non-contact sheet sensing system and related method
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SE527204C2 (sv) * 2004-05-28 2006-01-17 Daprox Ab Mätanordning och förfarande
CN100356135C (zh) * 2004-08-31 2007-12-19 精碟科技股份有限公司 薄膜厚度量测装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB839996A (en) * 1957-04-13 1960-06-29 Ti Group Services Ltd Pneumatic servo system
US3884076A (en) * 1971-12-07 1975-05-20 Zumbach Electronic Automatic Measuring device
US4854156A (en) * 1989-01-03 1989-08-08 Systems Research Laboratories, Inc. Pneumatic surface-following control system
DE4119903A1 (de) * 1991-06-17 1992-12-24 Helmut Fischer Gmbh & Co Verfahren und vorrichtung zur messung duenner schichten
US6318153B1 (en) * 1996-09-30 2001-11-20 Micro-Epsilon Messtechnik Gmbh & Co. Kg Non-contact film thickness gauging sensor
US20030000286A1 (en) * 2000-01-14 2003-01-02 Bengt Akerblom Measuring device in which a measuring head is movably supported

Also Published As

Publication number Publication date
GB2438944A (en) 2007-12-12
US7690243B2 (en) 2010-04-06
GB2438944B (en) 2009-07-22
JP2007309935A (ja) 2007-11-29
GB0709051D0 (en) 2007-06-20
FR2903181A1 (fr) 2008-01-04
CN101074864B (zh) 2012-10-10
FR2903181B1 (fr) 2012-09-21
JP5395334B2 (ja) 2014-01-22
DE102006022882A1 (de) 2007-11-22
US20070289361A1 (en) 2007-12-20
CN101074864A (zh) 2007-11-21

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