FR2880232B1 - Transducteur a ultrasons micro-usine capacitif fabrique avec membrane de silicium epitaxiale - Google Patents

Transducteur a ultrasons micro-usine capacitif fabrique avec membrane de silicium epitaxiale

Info

Publication number
FR2880232B1
FR2880232B1 FR0513347A FR0513347A FR2880232B1 FR 2880232 B1 FR2880232 B1 FR 2880232B1 FR 0513347 A FR0513347 A FR 0513347A FR 0513347 A FR0513347 A FR 0513347A FR 2880232 B1 FR2880232 B1 FR 2880232B1
Authority
FR
France
Prior art keywords
ultrasonic transducer
epitaxial silicon
silicon membrane
capacitive micro
transducer made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0513347A
Other languages
English (en)
French (fr)
Other versions
FR2880232A1 (fr
Inventor
Lowell Scott Smith
David M Mills
Jeffrey Bernard Fortin
Wei Cheng Tian
John Robert Logan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of FR2880232A1 publication Critical patent/FR2880232A1/fr
Application granted granted Critical
Publication of FR2880232B1 publication Critical patent/FR2880232B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Sensors (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
FR0513347A 2004-12-27 2005-12-27 Transducteur a ultrasons micro-usine capacitif fabrique avec membrane de silicium epitaxiale Expired - Fee Related FR2880232B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/023,252 US7037746B1 (en) 2004-12-27 2004-12-27 Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane

Publications (2)

Publication Number Publication Date
FR2880232A1 FR2880232A1 (fr) 2006-06-30
FR2880232B1 true FR2880232B1 (fr) 2009-10-09

Family

ID=36215997

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0513347A Expired - Fee Related FR2880232B1 (fr) 2004-12-27 2005-12-27 Transducteur a ultrasons micro-usine capacitif fabrique avec membrane de silicium epitaxiale

Country Status (3)

Country Link
US (2) US7037746B1 (https=)
JP (1) JP2006186999A (https=)
FR (1) FR2880232B1 (https=)

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US10870577B2 (en) 2018-10-05 2020-12-22 Knowles Electronics, Llc Methods of forming MEMS diaphragms including corrugations
DE112019004970T5 (de) 2018-10-05 2021-06-24 Knowles Electronics, Llc Mikrofonvorrichtung mit Eindringschutz
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US11435461B2 (en) 2019-07-19 2022-09-06 GE Precision Healthcare LLC Method and system to prevent depoling of ultrasound transducer
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Also Published As

Publication number Publication date
FR2880232A1 (fr) 2006-06-30
US20060170014A1 (en) 2006-08-03
US7545012B2 (en) 2009-06-09
US7037746B1 (en) 2006-05-02
JP2006186999A (ja) 2006-07-13

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Effective date: 20140829