FR2875903B1 - Capteur de debit de type thermique et procede pour sa fabrication - Google Patents

Capteur de debit de type thermique et procede pour sa fabrication

Info

Publication number
FR2875903B1
FR2875903B1 FR0509704A FR0509704A FR2875903B1 FR 2875903 B1 FR2875903 B1 FR 2875903B1 FR 0509704 A FR0509704 A FR 0509704A FR 0509704 A FR0509704 A FR 0509704A FR 2875903 B1 FR2875903 B1 FR 2875903B1
Authority
FR
France
Prior art keywords
manufacturing
same
flow sensor
type flow
thermal type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0509704A
Other languages
English (en)
Other versions
FR2875903A1 (fr
Inventor
Masaaki Tanaka
Tiaki Mizuno
Hiromi Ariyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2875903A1 publication Critical patent/FR2875903A1/fr
Application granted granted Critical
Publication of FR2875903B1 publication Critical patent/FR2875903B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845Micromachined devices
FR0509704A 2004-09-24 2005-09-22 Capteur de debit de type thermique et procede pour sa fabrication Expired - Fee Related FR2875903B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004277794A JP4609019B2 (ja) 2004-09-24 2004-09-24 熱式流量センサ及びその製造方法

Publications (2)

Publication Number Publication Date
FR2875903A1 FR2875903A1 (fr) 2006-03-31
FR2875903B1 true FR2875903B1 (fr) 2014-07-25

Family

ID=36011818

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0509704A Expired - Fee Related FR2875903B1 (fr) 2004-09-24 2005-09-22 Capteur de debit de type thermique et procede pour sa fabrication

Country Status (6)

Country Link
US (1) US7219544B2 (fr)
JP (1) JP4609019B2 (fr)
KR (1) KR100720613B1 (fr)
CN (1) CN1752721B (fr)
DE (1) DE102005042549B4 (fr)
FR (1) FR2875903B1 (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4609019B2 (ja) 2004-09-24 2011-01-12 株式会社デンソー 熱式流量センサ及びその製造方法
JP4830391B2 (ja) * 2005-07-29 2011-12-07 株式会社デンソー センサ装置の製造方法及びセンサ装置
US7316507B2 (en) 2005-11-03 2008-01-08 Covidien Ag Electronic thermometer with flex circuit location
JP2007286007A (ja) * 2006-04-20 2007-11-01 Denso Corp 熱式流量センサの製造方法
JP4882732B2 (ja) * 2006-12-22 2012-02-22 株式会社デンソー 半導体装置
JP4894531B2 (ja) * 2007-01-22 2012-03-14 株式会社デンソー 熱式流量センサ
EP2140232A2 (fr) * 2007-04-26 2010-01-06 Heraeus Sensor Technology Gmbh Résistance à couche dans un tuyau d'échappement
WO2008139237A1 (fr) * 2007-05-10 2008-11-20 Acque Ingegneria S.R.L. Détecteur de débit pour conduits d'eau et procédé de mesure d'écoulement d'eau
US7749170B2 (en) * 2007-05-22 2010-07-06 Tyco Healthcare Group Lp Multiple configurable electronic thermometer
JP4426606B2 (ja) * 2007-06-29 2010-03-03 三菱電機株式会社 流量測定装置
JP5012330B2 (ja) * 2007-08-29 2012-08-29 株式会社デンソー センサ装置の製造方法及びセンサ装置
US8496377B2 (en) 2007-12-31 2013-07-30 Covidien Lp Thermometer having molded probe component
DE102008037206B4 (de) * 2008-08-11 2014-07-03 Heraeus Sensor Technology Gmbh 300°C-Flowsensor
JP5168091B2 (ja) * 2008-11-05 2013-03-21 株式会社デンソー 熱式フローセンサの製造方法及び熱式フローセンサ
JP5182314B2 (ja) * 2009-05-01 2013-04-17 株式会社デンソー 空気流量測定装置
JP5243348B2 (ja) * 2009-06-12 2013-07-24 三菱電機株式会社 流量検出装置
JP5208099B2 (ja) * 2009-12-11 2013-06-12 日立オートモティブシステムズ株式会社 流量センサとその製造方法、及び流量センサモジュール
WO2012049742A1 (fr) * 2010-10-13 2012-04-19 日立オートモティブシステムズ株式会社 Capteur d'écoulement et son procédé de production, et module de capteur d'écoulement et son procédé de production
JP5178806B2 (ja) * 2010-11-01 2013-04-10 三菱電機株式会社 流量測定装置
JP5333529B2 (ja) 2011-07-05 2013-11-06 株式会社デンソー モールドパッケージの製造方法
FR2977886B1 (fr) * 2011-07-13 2017-03-03 Centre Nat Rech Scient Capteur miniaturise a element chauffant et procede de fabrication associe.
MX338351B (es) * 2011-12-07 2016-03-30 Hitachi Automotive Systems Ltd Aparatos de medición de flujo.
JP5763575B2 (ja) * 2012-03-19 2015-08-12 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法
JP6096070B2 (ja) * 2013-06-20 2017-03-15 日立オートモティブシステムズ株式会社 熱式流量計の製造方法
JP6043248B2 (ja) * 2013-07-24 2016-12-14 日立オートモティブシステムズ株式会社 熱式空気流量計
US9448130B2 (en) * 2013-08-31 2016-09-20 Infineon Technologies Ag Sensor arrangement
JP6101619B2 (ja) * 2013-11-12 2017-03-22 日立オートモティブシステムズ株式会社 熱式空気流量計
US10655991B2 (en) * 2014-07-30 2020-05-19 Hitachi Automotive Systems, Ltd. Physical-quantity detection device for intake air in an internal combustion engine
JP6669957B2 (ja) * 2015-09-30 2020-03-18 ミツミ電機株式会社 流量センサ
DE102016200263A1 (de) * 2016-01-13 2017-07-13 Robert Bosch Gmbh Mikromechanischer Drucksensor
US10942050B2 (en) * 2016-06-24 2021-03-09 Hitachi Automotive Systems, Ltd. Thermal flowmeter
JP6416357B1 (ja) * 2017-10-05 2018-10-31 三菱電機株式会社 流量測定装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2784286B2 (ja) * 1991-12-09 1998-08-06 三菱電機株式会社 半導体センサー装置の製造方法
JP3228547B2 (ja) 1992-03-27 2001-11-12 オリンパス光学工業株式会社 発光装置
DE19524634B4 (de) * 1995-07-06 2006-03-30 Robert Bosch Gmbh Vorrichtung zur Messung der Masse eines strömenden Mediums
JP3328547B2 (ja) * 1997-06-16 2002-09-24 株式会社日立製作所 熱式空気流量センサ
DE19743409A1 (de) * 1997-10-01 1999-04-08 Bosch Gmbh Robert Meßvorrichtung zur Messung der Masse eines strömenden Mediums
JP3545637B2 (ja) * 1999-03-24 2004-07-21 三菱電機株式会社 感熱式流量センサ
EP1128168A3 (fr) * 2000-02-23 2002-07-03 Hitachi, Ltd. Appareil pour la mesure d' une grandeur physique comme l' écoulement d' un fluide
JP3712907B2 (ja) * 2000-03-06 2005-11-02 株式会社日立製作所 流量計測装置
JP2001304933A (ja) * 2000-04-24 2001-10-31 Denso Corp 熱式流量センサおよびその製造方法
JP4058225B2 (ja) * 2000-06-20 2008-03-05 株式会社日立製作所 流量計測装置
EP1319929A4 (fr) * 2000-07-27 2006-07-12 Hitachi Ltd Debitmetre a air de type thermique
JP3709339B2 (ja) 2000-12-05 2005-10-26 株式会社日立製作所 流量計測装置
JP2002318147A (ja) 2001-04-20 2002-10-31 Denso Corp 空気流量測定装置
JP2003270016A (ja) 2002-03-18 2003-09-25 Hitachi Ltd 流量計測装置
JP4349144B2 (ja) * 2004-02-13 2009-10-21 株式会社デンソー 熱式空気流量センサ、及び、熱式空気流量センサの製造方法
JP4609019B2 (ja) * 2004-09-24 2011-01-12 株式会社デンソー 熱式流量センサ及びその製造方法

Also Published As

Publication number Publication date
FR2875903A1 (fr) 2006-03-31
KR100720613B1 (ko) 2007-05-21
DE102005042549A1 (de) 2006-03-30
US20060075815A1 (en) 2006-04-13
JP4609019B2 (ja) 2011-01-12
CN1752721A (zh) 2006-03-29
JP2006090889A (ja) 2006-04-06
KR20060046756A (ko) 2006-05-17
DE102005042549B4 (de) 2014-01-23
CN1752721B (zh) 2010-05-05
US7219544B2 (en) 2007-05-22

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Effective date: 20180531