MX338351B - Aparatos de medición de flujo. - Google Patents

Aparatos de medición de flujo.

Info

Publication number
MX338351B
MX338351B MX2014006661A MX2014006661A MX338351B MX 338351 B MX338351 B MX 338351B MX 2014006661 A MX2014006661 A MX 2014006661A MX 2014006661 A MX2014006661 A MX 2014006661A MX 338351 B MX338351 B MX 338351B
Authority
MX
Mexico
Prior art keywords
sensor element
lead frame
section
measuring apparatus
fluid flow
Prior art date
Application number
MX2014006661A
Other languages
English (en)
Other versions
MX2014006661A (es
Inventor
Keiji Hanzawa
Noboru Tokuyasu
Shinobu Tashiro
Ryosuke Doi
Takeshi Morino
Original Assignee
Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Publication of MX2014006661A publication Critical patent/MX2014006661A/es
Publication of MX338351B publication Critical patent/MX338351B/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02D—CONTROLLING COMBUSTION ENGINES
    • F02D41/00—Electrical control of supply of combustible mixture or its constituents
    • F02D41/02—Circuit arrangements for generating control signals
    • F02D41/18—Circuit arrangements for generating control signals by measuring intake air flow
    • F02D41/187—Circuit arrangements for generating control signals by measuring intake air flow using a hot wire flow sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Volume Flow (AREA)

Abstract

Se proporciona un aparato medidor de flujo de aire con buena precisión de medición. Un aparato medidor de flujo de aire que incluye: conducto en derivación que lleva una parte de un flujo de fluido que fluye a través de una tubería de entrada; un elemento sensor que está dispuesto en el conducto en derivación para medir el flujo de fluido; una parte de circuito que convierte el flujo de fluido detectado por el elemento sensor en una señal eléctrica; una parte del conector que tiene un conector que está conectado eléctricamente a la parte del circuito a la salida de una señal externa; y una carcasa que soporta el elemento del sensor y la parte del circuito, el elemento sensor está dispuesto en la tubería de entrada. El elemento sensor incluye una cavidad que está dispuesta en un sustrato del semiconductor, y un diafragma que incluye una parte de película delgada que cubre la cavidad. El elemento sensor está montado en un montaje de conector. El elemento sensor y el montaje de conector tienen superficies que son encapsuladas con resina de manera que una parte del diafragma del elemento del sensor y una parte del montaje de conector están expuestos. Al menos un orificio está dispuesto en el montaje de conector para la comunicación entre la cavidad y el exterior del encapsulado.
MX2014006661A 2011-12-07 2011-12-07 Aparatos de medición de flujo. MX338351B (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/006833 WO2013084259A1 (ja) 2011-12-07 2011-12-07 空気流量測定装置

Publications (2)

Publication Number Publication Date
MX2014006661A MX2014006661A (es) 2015-04-16
MX338351B true MX338351B (es) 2016-03-30

Family

ID=48573671

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2014006661A MX338351B (es) 2011-12-07 2011-12-07 Aparatos de medición de flujo.

Country Status (6)

Country Link
US (1) US9587970B2 (es)
EP (1) EP2789994B1 (es)
JP (1) JP5703390B2 (es)
CN (1) CN103998901B (es)
MX (1) MX338351B (es)
WO (1) WO2013084259A1 (es)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6043248B2 (ja) * 2013-07-24 2016-12-14 日立オートモティブシステムズ株式会社 熱式空気流量計
WO2015033589A1 (ja) * 2013-09-05 2015-03-12 日立オートモティブシステムズ株式会社 流量センサおよび流量センサ装置
JP6336833B2 (ja) * 2014-06-30 2018-06-06 日立オートモティブシステムズ株式会社 熱式空気流量計
CN104482971B (zh) * 2014-12-05 2019-05-24 北京控制工程研究所 一种基于mems技术的热式流量传感器
JP5936744B1 (ja) * 2015-05-15 2016-06-22 三菱電機株式会社 流量測定装置
JP6551080B2 (ja) * 2015-09-04 2019-07-31 株式会社デンソー 流量測定装置
JP6720200B2 (ja) * 2015-09-30 2020-07-08 日立オートモティブシステムズ株式会社 物理量検出装置
GB201609905D0 (en) * 2016-06-07 2016-07-20 Ge Oil & Gas Device and system for fluid flow measurement
DE102017218893A1 (de) * 2017-10-23 2019-04-25 Robert Bosch Gmbh Sensoranordnung zur Bestimmung wenigstens eines Parameters eines durch einen Messkanal strömenden fluiden Mediums
US11927466B2 (en) 2018-11-29 2024-03-12 Hitachi Astemo, Ltd. Physical quantity measurement device including a thermal flow rate sensor with a ventilation flow path
JP2020180884A (ja) * 2019-04-25 2020-11-05 日立オートモティブシステムズ株式会社 流量センサ
JP7399348B2 (ja) 2021-03-29 2023-12-15 日立Astemo株式会社 流量測定装置
DE102021203217A1 (de) * 2021-03-30 2022-03-24 Vitesco Technologies GmbH Luftmassensensor und Kraftfahrzeug

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19524634B4 (de) * 1995-07-06 2006-03-30 Robert Bosch Gmbh Vorrichtung zur Messung der Masse eines strömenden Mediums
JP3355291B2 (ja) * 1997-08-11 2002-12-09 株式会社日立製作所 空気流量測定装置及び内燃機関制御装置
KR100511049B1 (ko) * 2000-07-27 2005-08-31 가부시끼가이샤 히다치 세이사꾸쇼 열식 공기유량계
JP4177183B2 (ja) * 2003-06-18 2008-11-05 株式会社日立製作所 熱式空気流量計
JP4265351B2 (ja) * 2003-09-24 2009-05-20 株式会社デンソー メンブレンを有するセンサ装置
US7211873B2 (en) * 2003-09-24 2007-05-01 Denso Corporation Sensor device having thin membrane and method of manufacturing the same
JP4609019B2 (ja) * 2004-09-24 2011-01-12 株式会社デンソー 熱式流量センサ及びその製造方法
JP4881554B2 (ja) 2004-09-28 2012-02-22 日立オートモティブシステムズ株式会社 流量センサ
JP2008020193A (ja) 2006-07-10 2008-01-31 Mitsubishi Electric Corp 熱式流量センサ
JP2008058131A (ja) * 2006-08-31 2008-03-13 Hitachi Ltd 熱式ガス流量計
JP5208099B2 (ja) * 2009-12-11 2013-06-12 日立オートモティブシステムズ株式会社 流量センサとその製造方法、及び流量センサモジュール
JP5256264B2 (ja) * 2010-09-03 2013-08-07 日立オートモティブシステムズ株式会社 熱式空気流量センサ
JP5456815B2 (ja) * 2010-10-13 2014-04-02 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法
WO2012049742A1 (ja) * 2010-10-13 2012-04-19 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法並びに流量センサモジュールおよびその製造方法
JP5220955B2 (ja) * 2010-10-13 2013-06-26 日立オートモティブシステムズ株式会社 流量センサ

Also Published As

Publication number Publication date
US20140352424A1 (en) 2014-12-04
EP2789994B1 (en) 2018-02-28
WO2013084259A1 (ja) 2013-06-13
CN103998901B (zh) 2016-10-19
JP5703390B2 (ja) 2015-04-15
CN103998901A (zh) 2014-08-20
EP2789994A1 (en) 2014-10-15
EP2789994A4 (en) 2015-07-29
US9587970B2 (en) 2017-03-07
JPWO2013084259A1 (ja) 2015-04-27
MX2014006661A (es) 2015-04-16

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