FR2792633B1 - Derive 9-anthracene alkylacrylate,procede de preparation et polymeres qu'il permet d'obtenir - Google Patents

Derive 9-anthracene alkylacrylate,procede de preparation et polymeres qu'il permet d'obtenir

Info

Publication number
FR2792633B1
FR2792633B1 FR0000392A FR0000392A FR2792633B1 FR 2792633 B1 FR2792633 B1 FR 2792633B1 FR 0000392 A FR0000392 A FR 0000392A FR 0000392 A FR0000392 A FR 0000392A FR 2792633 B1 FR2792633 B1 FR 2792633B1
Authority
FR
France
Prior art keywords
alkylacrylate
anthracene
derivative
preparation
polymers used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0000392A
Other languages
English (en)
French (fr)
Other versions
FR2792633A1 (fr
Inventor
Min Ho Jung
Sung Eun Hong
Ki Ho Baik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Hynix Inc
Original Assignee
Hyundai Electronics Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Industries Co Ltd filed Critical Hyundai Electronics Industries Co Ltd
Publication of FR2792633A1 publication Critical patent/FR2792633A1/fr
Application granted granted Critical
Publication of FR2792633B1 publication Critical patent/FR2792633B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
    • C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
    • C08F20/10—Esters
    • C08F20/12—Esters of monohydric alcohols or phenols
    • C08F20/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F20/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
    • C07C69/017—Esters of hydroxy compounds having the esterified hydroxy group bound to a carbon atom of a six-membered aromatic ring
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
    • C07C69/52—Esters of acyclic unsaturated carboxylic acids having the esterified carboxyl group bound to an acyclic carbon atom
    • C07C69/533—Monocarboxylic acid esters having only one carbon-to-carbon double bond
    • C07C69/54—Acrylic acid esters; Methacrylic acid esters
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2603/00—Systems containing at least three condensed rings
    • C07C2603/02—Ortho- or ortho- and peri-condensed systems
    • C07C2603/04—Ortho- or ortho- and peri-condensed systems containing three rings
    • C07C2603/22—Ortho- or ortho- and peri-condensed systems containing three rings containing only six-membered rings
    • C07C2603/24—Anthracenes; Hydrogenated anthracenes
FR0000392A 1999-04-23 2000-01-13 Derive 9-anthracene alkylacrylate,procede de preparation et polymeres qu'il permet d'obtenir Expired - Fee Related FR2792633B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-1999-0014763A KR100395904B1 (ko) 1999-04-23 1999-04-23 유기 반사방지 중합체 및 그의 제조방법

Publications (2)

Publication Number Publication Date
FR2792633A1 FR2792633A1 (fr) 2000-10-27
FR2792633B1 true FR2792633B1 (fr) 2007-06-08

Family

ID=19582078

Family Applications (4)

Application Number Title Priority Date Filing Date
FR0000392A Expired - Fee Related FR2792633B1 (fr) 1999-04-23 2000-01-13 Derive 9-anthracene alkylacrylate,procede de preparation et polymeres qu'il permet d'obtenir
FR0007514A Pending FR2793244A1 (fr) 1999-04-23 2000-06-13 4-formylphenylmethacrylate, procede de preparation et polymeres qu'il permet d'obtenir
FR0007516A Expired - Fee Related FR2793255B1 (fr) 1999-04-23 2000-06-13 Composition de revetement anti-reflechissant, procede de preparation et dispositif a semiconducteur
FR0007511A Expired - Fee Related FR2793254B1 (fr) 1999-04-23 2000-06-13 Composition de revetement anti-reflechissant, procede de preparation et dispositif a semiconducteur

Family Applications After (3)

Application Number Title Priority Date Filing Date
FR0007514A Pending FR2793244A1 (fr) 1999-04-23 2000-06-13 4-formylphenylmethacrylate, procede de preparation et polymeres qu'il permet d'obtenir
FR0007516A Expired - Fee Related FR2793255B1 (fr) 1999-04-23 2000-06-13 Composition de revetement anti-reflechissant, procede de preparation et dispositif a semiconducteur
FR0007511A Expired - Fee Related FR2793254B1 (fr) 1999-04-23 2000-06-13 Composition de revetement anti-reflechissant, procede de preparation et dispositif a semiconducteur

Country Status (10)

Country Link
US (2) US6368768B1 (US06368768-20020409-C00022.png)
JP (1) JP3851476B2 (US06368768-20020409-C00022.png)
KR (1) KR100395904B1 (US06368768-20020409-C00022.png)
CN (1) CN1215094C (US06368768-20020409-C00022.png)
DE (2) DE19962784A1 (US06368768-20020409-C00022.png)
FR (4) FR2792633B1 (US06368768-20020409-C00022.png)
GB (1) GB2349148B (US06368768-20020409-C00022.png)
IT (1) IT1308674B1 (US06368768-20020409-C00022.png)
NL (1) NL1014997C2 (US06368768-20020409-C00022.png)
TW (1) TW546318B (US06368768-20020409-C00022.png)

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US6605394B2 (en) 2001-05-03 2003-08-12 Applied Materials, Inc. Organic bottom antireflective coating for high performance mask making using optical imaging
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KR100351459B1 (ko) * 2001-05-30 2002-09-05 주식회사 하이닉스반도체 유기 반사방지 중합체 및 그의 제조방법
KR100351458B1 (ko) * 2001-05-30 2002-09-05 주식회사 하이닉스반도체 유기 반사방지 중합체 및 그의 제조방법
US6703169B2 (en) 2001-07-23 2004-03-09 Applied Materials, Inc. Method of preparing optically imaged high performance photomasks
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KR101156973B1 (ko) * 2005-03-02 2012-06-20 주식회사 동진쎄미켐 유기 반사방지막 형성용 유기 중합체 및 이를 포함하는 유기 조성물
EP1762895B1 (en) * 2005-08-29 2016-02-24 Rohm and Haas Electronic Materials, L.L.C. Antireflective Hard Mask Compositions
KR100703007B1 (ko) 2005-11-17 2007-04-06 삼성전자주식회사 감광성 유기 반사 방지막 형성용 조성물 및 이를 이용한패턴 형성 방법
KR100871770B1 (ko) * 2007-09-12 2008-12-05 주식회사 효성 안트라세닐 벤질기 발색단을 포함하는 공중합체, 상기공중합체의 제조방법, 상기 공중합체를 포함하는유기반사방지막 조성물 및 상기 조성물을 포함하는유기반사방지막
KR100920886B1 (ko) * 2007-12-13 2009-10-09 주식회사 효성 현상 가능한 유기 반사방지막 형성용 조성물 및 이로부터형성된 유기 반사방지막
KR100952465B1 (ko) * 2007-12-18 2010-04-13 제일모직주식회사 방향족 (메타)아크릴레이트 화합물 및 감광성 고분자, 및레지스트 조성물
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Also Published As

Publication number Publication date
JP2001098024A (ja) 2001-04-10
ITTO991099A0 (it) 1999-12-15
US6368768B1 (en) 2002-04-09
DE19964382B4 (de) 2008-08-14
FR2793254A1 (fr) 2000-11-10
ITTO991099A1 (it) 2001-06-15
US20020132183A1 (en) 2002-09-19
NL1014997C2 (nl) 2001-06-26
GB9927833D0 (en) 2000-01-26
KR100395904B1 (ko) 2003-08-27
DE19962784A1 (de) 2000-10-26
IT1308674B1 (it) 2002-01-09
FR2792633A1 (fr) 2000-10-27
FR2793254B1 (fr) 2006-09-22
GB2349148B (en) 2004-08-04
FR2793244A1 (fr) 2000-11-10
CN1215094C (zh) 2005-08-17
GB2349148A (en) 2000-10-25
TW546318B (en) 2003-08-11
FR2793255B1 (fr) 2006-09-22
NL1014997A1 (nl) 2000-10-24
CN1271720A (zh) 2000-11-01
FR2793255A1 (fr) 2000-11-10
JP3851476B2 (ja) 2006-11-29
KR20000067184A (ko) 2000-11-15

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