FR2783971B1 - Circuit semi-conducteur comprenant des motifs en surface et procede de reglage d'un outil par rapport a cette surface - Google Patents
Circuit semi-conducteur comprenant des motifs en surface et procede de reglage d'un outil par rapport a cette surfaceInfo
- Publication number
- FR2783971B1 FR2783971B1 FR9812249A FR9812249A FR2783971B1 FR 2783971 B1 FR2783971 B1 FR 2783971B1 FR 9812249 A FR9812249 A FR 9812249A FR 9812249 A FR9812249 A FR 9812249A FR 2783971 B1 FR2783971 B1 FR 2783971B1
- Authority
- FR
- France
- Prior art keywords
- tool
- adjusting
- respect
- semiconductor circuit
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54406—Marks applied to semiconductor devices or parts comprising alphanumeric information
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/5442—Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9812249A FR2783971B1 (fr) | 1998-09-30 | 1998-09-30 | Circuit semi-conducteur comprenant des motifs en surface et procede de reglage d'un outil par rapport a cette surface |
US09/407,507 US6539276B1 (en) | 1998-09-30 | 1999-09-28 | Semiconductor circuit having surface features and method of adjusting a tool with respect to this surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9812249A FR2783971B1 (fr) | 1998-09-30 | 1998-09-30 | Circuit semi-conducteur comprenant des motifs en surface et procede de reglage d'un outil par rapport a cette surface |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2783971A1 FR2783971A1 (fr) | 2000-03-31 |
FR2783971B1 true FR2783971B1 (fr) | 2002-08-23 |
Family
ID=9531041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9812249A Expired - Fee Related FR2783971B1 (fr) | 1998-09-30 | 1998-09-30 | Circuit semi-conducteur comprenant des motifs en surface et procede de reglage d'un outil par rapport a cette surface |
Country Status (2)
Country | Link |
---|---|
US (1) | US6539276B1 (fr) |
FR (1) | FR2783971B1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2884045A1 (fr) * | 2005-03-29 | 2006-10-06 | St Microelectronics Sa | Identification d'un circuit integre de reference pour equipement de prise et pose |
CN101399251B (zh) * | 2007-09-26 | 2012-06-06 | 中芯国际集成电路制造(上海)有限公司 | 存储器的布局方法和结构 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1330502A (en) * | 1970-09-21 | 1973-09-19 | Texas Instruments Ltd | Manufacture of masks |
JPS5745236A (en) * | 1980-09-02 | 1982-03-15 | Fujitsu Ltd | Manufacture of semiconductor device |
US4407933A (en) * | 1981-06-11 | 1983-10-04 | Bell Telephone Laboratories, Incorporated | Alignment marks for electron beam lithography |
JPS6066428A (ja) * | 1983-09-21 | 1985-04-16 | Fujitsu Ltd | 電子ビ−ム露光方法 |
JPH0619670B2 (ja) * | 1984-12-17 | 1994-03-16 | 株式会社デイスコ | 自動精密位置合せシステム |
JP2723508B2 (ja) * | 1985-10-21 | 1998-03-09 | 日本電気株式会社 | 電子線直接描画のためのアライメント方法 |
JPH0196920A (ja) * | 1987-10-09 | 1989-04-14 | Fujitsu Ltd | ウエーハの識別方法 |
JP2575795B2 (ja) * | 1988-04-28 | 1997-01-29 | 富士通株式会社 | 半導体装置の製造方法 |
JPH05343296A (ja) * | 1992-06-09 | 1993-12-24 | Canon Inc | 位置検出装置及びそれを用いた半導体素子の製造方法 |
JPH06318038A (ja) * | 1993-05-07 | 1994-11-15 | Nitto Denko Corp | 個体識別ラベル |
-
1998
- 1998-09-30 FR FR9812249A patent/FR2783971B1/fr not_active Expired - Fee Related
-
1999
- 1999-09-28 US US09/407,507 patent/US6539276B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2783971A1 (fr) | 2000-03-31 |
US6539276B1 (en) | 2003-03-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20080531 |