FR2770302B1 - Procede et dispositif de mesure de tension continue de circuits, par application d'une tension pulsee et par faisceau d'electrons - Google Patents

Procede et dispositif de mesure de tension continue de circuits, par application d'une tension pulsee et par faisceau d'electrons

Info

Publication number
FR2770302B1
FR2770302B1 FR9713372A FR9713372A FR2770302B1 FR 2770302 B1 FR2770302 B1 FR 2770302B1 FR 9713372 A FR9713372 A FR 9713372A FR 9713372 A FR9713372 A FR 9713372A FR 2770302 B1 FR2770302 B1 FR 2770302B1
Authority
FR
France
Prior art keywords
voltage
circuits
electron beam
applying pulsed
measuring continuous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9713372A
Other languages
English (en)
Other versions
FR2770302A1 (fr
Inventor
Michel Vallet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
SGS Thomson Microelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics SA filed Critical SGS Thomson Microelectronics SA
Priority to FR9713372A priority Critical patent/FR2770302B1/fr
Priority to US09/169,356 priority patent/US6175240B1/en
Publication of FR2770302A1 publication Critical patent/FR2770302A1/fr
Application granted granted Critical
Publication of FR2770302B1 publication Critical patent/FR2770302B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/307—Contactless testing using electron beams of integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR9713372A 1997-10-24 1997-10-24 Procede et dispositif de mesure de tension continue de circuits, par application d'une tension pulsee et par faisceau d'electrons Expired - Fee Related FR2770302B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9713372A FR2770302B1 (fr) 1997-10-24 1997-10-24 Procede et dispositif de mesure de tension continue de circuits, par application d'une tension pulsee et par faisceau d'electrons
US09/169,356 US6175240B1 (en) 1997-10-24 1998-10-09 Procedure and apparatus for measuring the DC voltage of circuits by applying a pulsed voltage and electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9713372A FR2770302B1 (fr) 1997-10-24 1997-10-24 Procede et dispositif de mesure de tension continue de circuits, par application d'une tension pulsee et par faisceau d'electrons

Publications (2)

Publication Number Publication Date
FR2770302A1 FR2770302A1 (fr) 1999-04-30
FR2770302B1 true FR2770302B1 (fr) 2000-01-07

Family

ID=9512625

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9713372A Expired - Fee Related FR2770302B1 (fr) 1997-10-24 1997-10-24 Procede et dispositif de mesure de tension continue de circuits, par application d'une tension pulsee et par faisceau d'electrons

Country Status (2)

Country Link
US (1) US6175240B1 (fr)
FR (1) FR2770302B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7612570B2 (en) * 2006-08-30 2009-11-03 Ricoh Company, Limited Surface-potential distribution measuring apparatus, image carrier, and image forming apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3531716A (en) * 1967-06-16 1970-09-29 Agency Ind Science Techn Method of testing an electronic device by use of an electron beam
JPH0740579B2 (ja) * 1986-02-28 1995-05-01 株式会社日立製作所 試料内部観測方法
JPH03101041A (ja) * 1989-09-14 1991-04-25 Hitachi Ltd 電子ビームによる電圧測定装置
JPH03209739A (ja) * 1990-01-11 1991-09-12 Mitsubishi Electric Corp 基板検査装置
JP2973554B2 (ja) * 1991-03-19 1999-11-08 富士通株式会社 電子ビーム装置による電圧測定方法

Also Published As

Publication number Publication date
US6175240B1 (en) 2001-01-16
FR2770302A1 (fr) 1999-04-30

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse

Effective date: 20070629