DE69314610T2 - Elektronenstrahllithografie-Verfahren und -Gerät - Google Patents
Elektronenstrahllithografie-Verfahren und -GerätInfo
- Publication number
- DE69314610T2 DE69314610T2 DE69314610T DE69314610T DE69314610T2 DE 69314610 T2 DE69314610 T2 DE 69314610T2 DE 69314610 T DE69314610 T DE 69314610T DE 69314610 T DE69314610 T DE 69314610T DE 69314610 T2 DE69314610 T2 DE 69314610T2
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- beam lithography
- lithography method
- electron
- lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
- H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/991,685 US5382498A (en) | 1992-12-16 | 1992-12-16 | Processes for electron lithography |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69314610D1 DE69314610D1 (de) | 1997-11-20 |
DE69314610T2 true DE69314610T2 (de) | 1998-02-12 |
Family
ID=25537459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69314610T Expired - Fee Related DE69314610T2 (de) | 1992-12-16 | 1993-12-02 | Elektronenstrahllithografie-Verfahren und -Gerät |
Country Status (5)
Country | Link |
---|---|
US (1) | US5382498A (de) |
EP (1) | EP0602833B1 (de) |
JP (1) | JP2843249B2 (de) |
CA (1) | CA2107795C (de) |
DE (1) | DE69314610T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5824441A (en) * | 1996-12-03 | 1998-10-20 | Lucent Technologies Inc. | Lithographic process for device fabrication utilizing back-scattered electron beam signal intensity for alignment |
US6069684A (en) * | 1998-02-04 | 2000-05-30 | International Business Machines Corporation | Electron beam projection lithography system (EBPS) |
US6051346A (en) * | 1998-04-29 | 2000-04-18 | Lucent Technologies Inc. | Process for fabricating a lithographic mask |
US6331711B1 (en) * | 1999-08-06 | 2001-12-18 | Etec Systems, Inc. | Correction for systematic, low spatial frequency critical dimension variations in lithography |
US6576529B1 (en) * | 1999-12-07 | 2003-06-10 | Agere Systems Inc. | Method of forming an alignment feature in or on a multilayered semiconductor structure |
DE10044199B9 (de) | 2000-09-07 | 2005-07-28 | Carl Zeiss Smt Ag | Ablenkanordnung und Projektionssystem für geladene Teilchen |
DE10109965A1 (de) | 2001-03-01 | 2002-09-12 | Zeiss Carl | Teilchenoptische Linsenanordnung und Verfahren unter Einsatz einer solchen Linsenanordnung |
AU2003275640A1 (en) * | 2002-10-28 | 2004-05-13 | Matsushita Electric Industrial Co., Ltd. | Electron beam exposure method and electron beam exposure system |
JP5809419B2 (ja) | 2011-02-18 | 2015-11-10 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE68928821D1 (de) * | 1988-06-01 | 1998-11-05 | Ims Ionen Mikrofab Syst | Ionenstrahllithographie |
US5130213A (en) * | 1989-08-07 | 1992-07-14 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
US5079112A (en) * | 1989-08-07 | 1992-01-07 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
US5258246A (en) * | 1989-08-07 | 1993-11-02 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
US5316879A (en) * | 1992-07-14 | 1994-05-31 | At&T Bell Laboratories | Sub-micron device fabrication using multiple aperture filter |
US5279925A (en) * | 1992-12-16 | 1994-01-18 | At&T Bell Laboratories | Projection electron lithographic procedure |
-
1992
- 1992-12-16 US US07/991,685 patent/US5382498A/en not_active Expired - Lifetime
-
1993
- 1993-10-18 CA CA002107795A patent/CA2107795C/en not_active Expired - Fee Related
- 1993-12-02 EP EP93309628A patent/EP0602833B1/de not_active Expired - Lifetime
- 1993-12-02 DE DE69314610T patent/DE69314610T2/de not_active Expired - Fee Related
- 1993-12-15 JP JP5342290A patent/JP2843249B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69314610D1 (de) | 1997-11-20 |
EP0602833A1 (de) | 1994-06-22 |
JP2843249B2 (ja) | 1999-01-06 |
CA2107795A1 (en) | 1994-06-17 |
EP0602833B1 (de) | 1997-10-15 |
JPH076949A (ja) | 1995-01-10 |
CA2107795C (en) | 1997-09-30 |
US5382498A (en) | 1995-01-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |