FR2694988B1 - Dispositif optique d'émission et de réception et procédé de fabrication. - Google Patents
Dispositif optique d'émission et de réception et procédé de fabrication.Info
- Publication number
- FR2694988B1 FR2694988B1 FR9310072A FR9310072A FR2694988B1 FR 2694988 B1 FR2694988 B1 FR 2694988B1 FR 9310072 A FR9310072 A FR 9310072A FR 9310072 A FR9310072 A FR 9310072A FR 2694988 B1 FR2694988 B1 FR 2694988B1
- Authority
- FR
- France
- Prior art keywords
- manufacturing
- optical transmission
- reception device
- reception
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005540 biological transmission Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
- H01S5/2018—Optical confinement, e.g. absorbing-, reflecting- or waveguide-layers
- H01S5/2027—Reflecting region or layer, parallel to the active layer, e.g. to modify propagation of the mode in the laser or to influence transverse modes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
- H01L31/125—Composite devices with photosensitive elements and electroluminescent elements within one single body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
- H01S5/0215—Bonding to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
- H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
- H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
- H01S5/4056—Edge-emitting structures emitting light in more than one direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/0014—Measuring characteristics or properties thereof
- H01S5/0028—Laser diodes used as detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
- H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
- H01S5/1035—Forward coupled structures [DFC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18305—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] with emission through the substrate, i.e. bottom emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18341—Intra-cavity contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/3235—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000 nm, e.g. InP-based 1300 nm and 1500 nm lasers
- H01S5/32391—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000 nm, e.g. InP-based 1300 nm and 1500 nm lasers based on In(Ga)(As)P
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21934692A JPH0669491A (ja) | 1992-08-18 | 1992-08-18 | 光送受信装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2694988A1 FR2694988A1 (fr) | 1994-02-25 |
FR2694988B1 true FR2694988B1 (fr) | 1995-02-17 |
Family
ID=16734015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9310072A Expired - Fee Related FR2694988B1 (fr) | 1992-08-18 | 1993-08-18 | Dispositif optique d'émission et de réception et procédé de fabrication. |
Country Status (3)
Country | Link |
---|---|
US (1) | US5533041A (fr) |
JP (1) | JPH0669491A (fr) |
FR (1) | FR2694988B1 (fr) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI945124A0 (fi) * | 1994-10-31 | 1994-10-31 | Valtion Teknillinen | Spektrometer |
DE4444470A1 (de) * | 1994-11-29 | 1996-05-30 | Hertz Inst Heinrich | Sender/Empfänger-Anordnung für ein optisches Duplexsystem |
KR100259490B1 (ko) * | 1995-04-28 | 2000-06-15 | 윤종용 | 광검출기 일체형 표면광 레이저와 이를 채용한 광픽업 장치 |
DE29615486U1 (de) * | 1996-09-05 | 1996-10-17 | Kinshofer Georg Prof Dr | Anordnung zur Messung der passiven optischen Netze |
FR2753577B1 (fr) * | 1996-09-13 | 1999-01-08 | Alsthom Cge Alcatel | Procede de fabrication d'un composant optoelectronique a semiconducteur et composant et matrice de composants fabriques selon ce procede |
US5914976A (en) * | 1997-01-08 | 1999-06-22 | W. L. Gore & Associates, Inc. | VCSEL-based multi-wavelength transmitter and receiver modules for serial and parallel optical links |
US5835521A (en) * | 1997-02-10 | 1998-11-10 | Motorola, Inc. | Long wavelength light emitting vertical cavity surface emitting laser and method of fabrication |
JP2950302B2 (ja) * | 1997-11-25 | 1999-09-20 | 日本電気株式会社 | 半導体レーザ |
JP3977920B2 (ja) * | 1998-05-13 | 2007-09-19 | 富士通株式会社 | 半導体装置の製造方法 |
US6731585B2 (en) * | 2000-03-03 | 2004-05-04 | Matsushita Electric Industrial Co., Ltd. | Optical pick-up head with semiconductor laser |
JP2002350793A (ja) * | 2001-05-23 | 2002-12-04 | Mitsubishi Electric Corp | 光電変換半導体装置 |
US7127669B2 (en) * | 2002-05-31 | 2006-10-24 | Kiribati Wireless Ventures, Llc | Redundant path communication methods and systems |
US7504665B2 (en) * | 2002-10-22 | 2009-03-17 | University College Cardiff Consultants, Ltd. | Semiconductor optical devices |
JP2004235190A (ja) | 2003-01-28 | 2004-08-19 | Sony Corp | 光半導体装置 |
JP4058633B2 (ja) * | 2003-07-10 | 2008-03-12 | セイコーエプソン株式会社 | 面発光型発光素子、光モジュール、光伝達装置 |
FR2858125B1 (fr) | 2003-07-23 | 2005-08-26 | Commissariat Energie Atomique | Diode a cavite resonante, fonctionnant a la meme longueur d'onde pour l'emission et la detection de lumiere |
JP3738849B2 (ja) * | 2003-08-07 | 2006-01-25 | セイコーエプソン株式会社 | 面発光型半導体レーザ、光モジュール、ならびに光伝達装置 |
KR100584333B1 (ko) * | 2004-01-08 | 2006-05-26 | 삼성전자주식회사 | 반도체 레이저 장치 및 그 제조방법 |
US7228683B2 (en) * | 2004-07-21 | 2007-06-12 | General Electric Company | Methods and apparatus for generating gas turbine engine thrust using a pulse detonator |
KR100663589B1 (ko) * | 2004-11-24 | 2007-01-02 | 삼성전자주식회사 | 분포귀환 반도체 레이저의 제조방법 |
KR100634538B1 (ko) * | 2005-02-05 | 2006-10-13 | 삼성전자주식회사 | 효율적인 냉각 구조를 갖는 반도체 발광 소자 및 그 제조방법 |
JP5382289B2 (ja) * | 2008-03-26 | 2014-01-08 | セイコーエプソン株式会社 | 発光装置 |
JP5769483B2 (ja) * | 2011-04-21 | 2015-08-26 | キヤノン株式会社 | 面発光レーザ及び画像形成装置 |
JP6825251B2 (ja) * | 2016-07-12 | 2021-02-03 | 富士ゼロックス株式会社 | 発光素子 |
GB2561590A (en) * | 2017-04-19 | 2018-10-24 | Quantum Base Ltd | A photonic device |
CN110416250B (zh) * | 2019-09-02 | 2024-04-16 | 电子科技大学 | 基于异质结薄膜光源的光耦、其放大集成电路及制作方法 |
JP2021097184A (ja) * | 2019-12-19 | 2021-06-24 | 株式会社沖データ | 発光サイリスタ、光プリントヘッド、及び画像形成装置 |
US11757253B2 (en) * | 2020-05-21 | 2023-09-12 | Lumentum Operations Llc | Vertical cavity surface emitting laser with active layer-specific addressability |
CN112327270A (zh) * | 2020-11-04 | 2021-02-05 | 国科光芯(海宁)科技股份有限公司 | 一种片上集成混沌雷达芯片及其制备方法 |
CN116364827B (zh) * | 2023-05-29 | 2023-08-29 | 江西兆驰半导体有限公司 | 一种mini LED及其制备方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4349906A (en) * | 1979-09-18 | 1982-09-14 | Xerox Corporation | Optically controlled integrated current diode lasers |
DE3046140A1 (de) * | 1980-12-06 | 1982-07-15 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | "signaluebertragungsverfahren, ein halbleiter-bauelement sowie ein elektro-optisches bauelement zur durchfuehrung des verfahrens" |
ATE76981T1 (de) * | 1985-01-07 | 1992-06-15 | Siemens Ag | Verfahren zur herstellung einer integriert optischen anordnung. |
DE3687162D1 (de) * | 1985-12-10 | 1993-01-07 | Siemens Ag | Integriert-optischer multiplex-demultiplex-modul fuer die optische nachrichtenuebertragung. |
JPS63111679A (ja) * | 1986-10-29 | 1988-05-16 | Mitsubishi Electric Corp | 光半導体素子 |
JPS63208294A (ja) * | 1987-02-24 | 1988-08-29 | Mitsubishi Electric Corp | 半導体レ−ザ |
US5220573A (en) * | 1989-03-10 | 1993-06-15 | Canon Kabushiki Kaisha | Optical apparatus using wavelength selective photocoupler |
FR2667207B1 (fr) * | 1990-09-21 | 1993-06-25 | Thomson Csf | Convertisseur de frequences lumineuses. |
JP2980435B2 (ja) * | 1991-09-12 | 1999-11-22 | 株式会社東芝 | 半導体装置 |
US5404373A (en) * | 1991-11-08 | 1995-04-04 | University Of New Mexico | Electro-optical device |
-
1992
- 1992-08-18 JP JP21934692A patent/JPH0669491A/ja not_active Withdrawn
-
1993
- 1993-08-18 FR FR9310072A patent/FR2694988B1/fr not_active Expired - Fee Related
-
1995
- 1995-02-28 US US08/395,530 patent/US5533041A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2694988A1 (fr) | 1994-02-25 |
JPH0669491A (ja) | 1994-03-11 |
US5533041A (en) | 1996-07-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20110502 |