FR2684794B1 - Procede de formation d'un film mince de thermistor. - Google Patents
Procede de formation d'un film mince de thermistor.Info
- Publication number
- FR2684794B1 FR2684794B1 FR9214798A FR9214798A FR2684794B1 FR 2684794 B1 FR2684794 B1 FR 2684794B1 FR 9214798 A FR9214798 A FR 9214798A FR 9214798 A FR9214798 A FR 9214798A FR 2684794 B1 FR2684794 B1 FR 2684794B1
- Authority
- FR
- France
- Prior art keywords
- forming
- thin film
- thermistor thin
- thermistor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5027—Oxide ceramics in general; Specific oxide ceramics not covered by C04B41/5029 - C04B41/5051
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
- C23C18/1216—Metal oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
- H01C17/06533—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06593—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the temporary binder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/04—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
- H01C7/042—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient mainly consisting of inorganic non-metallic substances
- H01C7/043—Oxides or oxidic compounds
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Electromagnetism (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Catalysts (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34913991A JP3161477B2 (ja) | 1991-12-06 | 1991-12-06 | マンガンコバルト酸化物薄膜の形成方法 |
JP01831392A JP3166786B2 (ja) | 1992-01-06 | 1992-01-06 | マンガンコバルト酸化物薄膜の形成方法 |
JP07635392A JP3191826B2 (ja) | 1992-02-27 | 1992-02-27 | マンガンコバルト酸化物薄膜の形成方法 |
JP07635492A JP3183303B2 (ja) | 1992-02-27 | 1992-02-27 | マンガンコバルト酸化物薄膜の形成方法 |
JP07635292A JP3166790B2 (ja) | 1992-02-27 | 1992-02-27 | マンガンコバルト酸化物薄膜の形成方法 |
JP09593792A JP3209235B2 (ja) | 1992-03-23 | 1992-03-23 | マンガンコバルト酸化物薄膜の形成方法 |
JP25074692A JP3183309B2 (ja) | 1992-08-26 | 1992-08-26 | マンガンコバルト銅酸化物薄膜の形成方法 |
JP28243692A JP3175746B2 (ja) | 1992-09-28 | 1992-09-28 | サーミスタ薄膜の形成方法 |
JP28243592A JP3183313B2 (ja) | 1992-09-28 | 1992-09-28 | マンガンニッケル系酸化物薄膜の形成方法 |
JP28243492A JP3183312B2 (ja) | 1992-09-28 | 1992-09-28 | マンガンコバルト系酸化物薄膜の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2684794A1 FR2684794A1 (fr) | 1993-06-11 |
FR2684794B1 true FR2684794B1 (fr) | 1996-08-02 |
Family
ID=27579690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9214798A Expired - Fee Related FR2684794B1 (fr) | 1991-12-06 | 1992-12-03 | Procede de formation d'un film mince de thermistor. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5273776A (fr) |
DE (1) | DE4240928C2 (fr) |
FR (1) | FR2684794B1 (fr) |
GB (1) | GB2262107B (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2290308A (en) * | 1994-06-14 | 1995-12-20 | British Ceramic Res Ltd | Decorative material |
US5497139A (en) * | 1994-09-23 | 1996-03-05 | Matsushita Electric Industrial Co., Ltd. | Temperature sensor and its manufacturing method |
JP2976028B1 (ja) * | 1998-10-13 | 1999-11-10 | 工業技術院長 | 緻密でエピタキシャルな金属酸化物膜の製造方法と、その金属酸化物前駆体及びその製造方法 |
WO2000055091A1 (fr) * | 1999-03-12 | 2000-09-21 | Nagase Chemtex Corporation | Compositions de formation de couches minces d'oxyde metallique |
DE19915525A1 (de) * | 1999-04-07 | 2000-11-02 | Bosch Gmbh Robert | Temperaturfühler mit wenigstens einer Leiterbahn und Verfahren zur Herstellung eines Temperaturfühlers |
KR100674692B1 (ko) | 1999-06-03 | 2007-01-26 | 마쯔시다덴기산교 가부시키가이샤 | 박막서미스터소자 및 박막서미스터소자의 제조방법 |
EP1371070B1 (fr) * | 2001-03-16 | 2011-03-09 | Vishay Intertechnology, Inc. | Thermistances a couche mince |
US6880234B2 (en) | 2001-03-16 | 2005-04-19 | Vishay Intertechnology, Inc. | Method for thin film NTC thermistor |
ES2197785B1 (es) * | 2001-12-18 | 2005-03-01 | Centro De Investigaciones Energeticas, Medioambientales Y Tecnologicas (C.I.E.M.A.T.) | Procedimiento para depositar recubrimientos de metales y oxidos metalicos. |
TR201900926T4 (tr) * | 2008-06-13 | 2019-02-21 | Ceres Ip Co Ltd | Seramik filmlerin kaplanması için yöntem. |
WO2011036730A1 (fr) * | 2009-09-28 | 2011-03-31 | 第一工業製薬株式会社 | Composition contenant un sel métallique, substrat, et procédé de production dudit substrat |
CN103241781B (zh) * | 2013-04-19 | 2014-09-03 | 浙江大学 | 一种制备多孔Co3O4粉体的方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2596284A (en) * | 1949-09-15 | 1952-05-13 | Petcar Res Corp | Method of forming thermistor by impregnation |
US3061476A (en) * | 1958-04-01 | 1962-10-30 | Barnes Eng Co | Method of making thermistor bolometers |
US3330697A (en) * | 1963-08-26 | 1967-07-11 | Sprague Electric Co | Method of preparing lead and alkaline earth titanates and niobates and coating method using the same to form a capacitor |
US3364565A (en) * | 1965-02-10 | 1968-01-23 | Victory Engineering Corp | Method of making a thermistor |
US3477055A (en) * | 1967-12-22 | 1969-11-04 | Gen Motors Corp | Thermistor construction |
BE785764A (fr) * | 1971-07-08 | 1973-01-03 | Glaverbel | |
FR2204454B1 (fr) * | 1972-10-30 | 1975-09-12 | Pro Catalyse | |
DE2428532C3 (de) * | 1973-06-20 | 1984-02-23 | Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka | Zusammensetzungen für einen Hochtemperatur-Heißleiter |
JPS608606B2 (ja) * | 1975-07-02 | 1985-03-04 | 富士写真フイルム株式会社 | 強磁性粉末の製法 |
DE2720049C3 (de) * | 1977-05-04 | 1980-07-10 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Dünnschicht-Heißleiter und Verfahren zu seiner Herstellung |
JPS5854089B2 (ja) * | 1979-06-22 | 1983-12-02 | 株式会社日立製作所 | 透明導電膜の形成方法 |
JPS6019610B2 (ja) * | 1979-12-14 | 1985-05-17 | 株式会社日立製作所 | 透明導電膜形成法 |
US4369105A (en) * | 1981-03-25 | 1983-01-18 | The Dow Chemical Company | Substituted cobalt oxide spinels |
JPH076072B2 (ja) * | 1986-08-08 | 1995-01-25 | 日本ペイント株式会社 | フエライト膜の形成方法 |
US4960618A (en) * | 1987-01-07 | 1990-10-02 | Tokyo Ohka Kogyo Co., Ltd. | Process for formation of metal oxide film |
EP0277020B1 (fr) * | 1987-01-30 | 1995-04-19 | Director-General of the Agency of Industrial Science and Technology | Procédé de fabrication d'un matériau supraconducteur |
JPS63266801A (ja) * | 1987-04-24 | 1988-11-02 | Ooizumi Seisakusho:Kk | 薄膜サ−ミスタの製造方法 |
US4897378A (en) * | 1987-05-22 | 1990-01-30 | Massachusetts Institute Of Technology | Preparation of thin film superconducting oxides |
JPH02146703A (ja) * | 1988-08-19 | 1990-06-05 | Fujikura Ltd | 薄膜抵抗体の製造方法 |
JPH0767048A (ja) * | 1993-08-30 | 1995-03-10 | Toshiba Corp | 表示制御装置 |
-
1992
- 1992-11-30 US US07/984,216 patent/US5273776A/en not_active Expired - Lifetime
- 1992-12-03 FR FR9214798A patent/FR2684794B1/fr not_active Expired - Fee Related
- 1992-12-03 GB GB9225339A patent/GB2262107B/en not_active Expired - Fee Related
- 1992-12-04 DE DE4240928A patent/DE4240928C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2262107A (en) | 1993-06-09 |
DE4240928A1 (fr) | 1993-06-09 |
GB2262107B (en) | 1995-01-18 |
DE4240928C2 (de) | 1995-11-02 |
FR2684794A1 (fr) | 1993-06-11 |
GB9225339D0 (en) | 1993-01-27 |
US5273776A (en) | 1993-12-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20100831 |