FR2670579A1 - Capteur semi-conducteur de debit. - Google Patents

Capteur semi-conducteur de debit. Download PDF

Info

Publication number
FR2670579A1
FR2670579A1 FR9015658A FR9015658A FR2670579A1 FR 2670579 A1 FR2670579 A1 FR 2670579A1 FR 9015658 A FR9015658 A FR 9015658A FR 9015658 A FR9015658 A FR 9015658A FR 2670579 A1 FR2670579 A1 FR 2670579A1
Authority
FR
France
Prior art keywords
substrate
face
zone
sensor according
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR9015658A
Other languages
English (en)
French (fr)
Other versions
FR2670579B1 (enExample
Inventor
Suski Jan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger SA
Original Assignee
Schlumberger SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9015658A priority Critical patent/FR2670579A1/fr
Application filed by Schlumberger SA filed Critical Schlumberger SA
Priority to EP91403361A priority patent/EP0490764B1/fr
Priority to AT91403361T priority patent/ATE135102T1/de
Priority to DK91403361.8T priority patent/DK0490764T3/da
Priority to DE69117694T priority patent/DE69117694T2/de
Priority to US07/805,768 priority patent/US5311775A/en
Priority to ES91403361T priority patent/ES2086509T3/es
Priority to JP3332301A priority patent/JPH04295724A/ja
Publication of FR2670579A1 publication Critical patent/FR2670579A1/fr
Application granted granted Critical
Publication of FR2670579B1 publication Critical patent/FR2670579B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
FR9015658A 1990-12-14 1990-12-14 Capteur semi-conducteur de debit. Granted FR2670579A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR9015658A FR2670579A1 (fr) 1990-12-14 1990-12-14 Capteur semi-conducteur de debit.
AT91403361T ATE135102T1 (de) 1990-12-14 1991-12-12 Halbleiter-durchflusssensor
DK91403361.8T DK0490764T3 (da) 1990-12-14 1991-12-12 Halvleder-gennemstrømningssensor
DE69117694T DE69117694T2 (de) 1990-12-14 1991-12-12 Halbleiter-Durchflusssensor
EP91403361A EP0490764B1 (fr) 1990-12-14 1991-12-12 Capteur semi-conducteur de débit
US07/805,768 US5311775A (en) 1990-12-14 1991-12-12 Semiconductor flow sensor
ES91403361T ES2086509T3 (es) 1990-12-14 1991-12-12 Captador semiconductor para caudal.
JP3332301A JPH04295724A (ja) 1990-12-14 1991-12-16 流量センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9015658A FR2670579A1 (fr) 1990-12-14 1990-12-14 Capteur semi-conducteur de debit.

Publications (2)

Publication Number Publication Date
FR2670579A1 true FR2670579A1 (fr) 1992-06-19
FR2670579B1 FR2670579B1 (enExample) 1994-07-13

Family

ID=9403230

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9015658A Granted FR2670579A1 (fr) 1990-12-14 1990-12-14 Capteur semi-conducteur de debit.

Country Status (8)

Country Link
US (1) US5311775A (enExample)
EP (1) EP0490764B1 (enExample)
JP (1) JPH04295724A (enExample)
AT (1) ATE135102T1 (enExample)
DE (1) DE69117694T2 (enExample)
DK (1) DK0490764T3 (enExample)
ES (1) ES2086509T3 (enExample)
FR (1) FR2670579A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002084748A3 (de) * 2001-04-14 2003-12-04 Bosch Gmbh Robert Verfahren zum erzeugen von optisch transparenten bereichen in einem siliziumsubstrat

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4233153C2 (de) * 1992-10-02 1995-08-17 Lang Apparatebau Gmbh Kalorimetrischer Durchflußmesser und Verfahren zu seiner Herstellung
US5392647A (en) * 1993-06-07 1995-02-28 Ricoh Seiki Company, Ltd. Flow sensor
DE19524634B4 (de) * 1995-07-06 2006-03-30 Robert Bosch Gmbh Vorrichtung zur Messung der Masse eines strömenden Mediums
WO1998036247A1 (de) * 1997-02-14 1998-08-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strömungssensorkomponente
US6230570B1 (en) 1997-08-26 2001-05-15 John Paul Clark Turbulent spot flowmeter
DE19808248A1 (de) * 1998-02-27 1999-09-02 Pierburg Ag Meßvorrichtung zur Messung der Masse eines strömenden Mediums
DE19812690C1 (de) * 1998-03-23 1999-11-18 Siemens Ag Träger für einen temperaturabhängigen Widerstand
US6032527A (en) * 1998-07-01 2000-03-07 Memsys, Inc. Solid state microanemometer
US7109842B1 (en) * 1998-12-07 2006-09-19 Honeywell International Inc. Robust fluid flow and property microsensor made of optimal material
DE19908664A1 (de) * 1999-03-01 2000-09-07 Abb Research Ltd Gaszähler
US6770503B1 (en) * 1999-10-21 2004-08-03 The Charles Stark Draper Laboratory, Inc. Integrated packaging of micromechanical sensors and associated control circuits
EP1164361A1 (de) * 2000-06-14 2001-12-19 Abb Research Ltd. Gaszähler
DE10032579B4 (de) * 2000-07-05 2020-07-02 Robert Bosch Gmbh Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement
DE10046622B4 (de) * 2000-09-20 2010-05-20 Robert Bosch Gmbh Verfahren zur Herstellung einer Membransensoreinheit sowie Membransensoreinheit
DE10046621B4 (de) * 2000-09-20 2010-08-05 Robert Bosch Gmbh Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
DE10058009A1 (de) * 2000-11-23 2002-06-06 Bosch Gmbh Robert Strömungssensor
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
JP3969564B2 (ja) * 2001-10-19 2007-09-05 株式会社山武 フローセンサ
EP1306349B1 (de) * 2001-10-24 2007-03-14 Robert Bosch Gmbh Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array
US7417601B2 (en) 2003-05-20 2008-08-26 Samsung Electronics Co., Ltd. Projector systems
DE102007034919A1 (de) * 2007-07-24 2009-03-12 Continental Automotive Gmbh Massenstromsensor
US7603898B2 (en) * 2007-12-19 2009-10-20 Honeywell International Inc. MEMS structure for flow sensor
JP5907688B2 (ja) * 2011-09-28 2016-04-26 アズビル株式会社 フローセンサ及びフローセンサの製造方法
CN113295224B (zh) * 2021-05-25 2022-07-22 中国科学院上海微系统与信息技术研究所 气液两用热式流量传感器及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0131318A1 (en) * 1983-05-18 1985-01-16 Bronkhorst High-Tech B.V. Fluid flow measuring device
US4680963A (en) * 1985-01-24 1987-07-21 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor flow velocity sensor
WO1989003512A1 (en) * 1987-10-14 1989-04-20 Rosemount Inc. Fluid flow detector

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS6131966A (ja) * 1984-07-25 1986-02-14 Toshiba Corp 半導体流速検出器
JPS6385363A (ja) * 1986-09-29 1988-04-15 Sharp Corp 流速検知素子
NL8702229A (nl) * 1987-09-18 1989-04-17 Bronkhorst High Tech Bv Richtingsgevoelige stroomsnelheidsmeter.
US4888988A (en) * 1987-12-23 1989-12-26 Siemens-Bendix Automotive Electronics L.P. Silicon based mass airflow sensor and its fabrication method
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0131318A1 (en) * 1983-05-18 1985-01-16 Bronkhorst High-Tech B.V. Fluid flow measuring device
US4680963A (en) * 1985-01-24 1987-07-21 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor flow velocity sensor
WO1989003512A1 (en) * 1987-10-14 1989-04-20 Rosemount Inc. Fluid flow detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002084748A3 (de) * 2001-04-14 2003-12-04 Bosch Gmbh Robert Verfahren zum erzeugen von optisch transparenten bereichen in einem siliziumsubstrat
US7419581B2 (en) 2001-04-14 2008-09-02 Robert Bosch Gmbh Method for producing optically transparent regions in a silicon substrate

Also Published As

Publication number Publication date
ES2086509T3 (es) 1996-07-01
US5311775A (en) 1994-05-17
DK0490764T3 (da) 1996-07-22
DE69117694T2 (de) 1996-10-02
EP0490764A1 (fr) 1992-06-17
JPH04295724A (ja) 1992-10-20
DE69117694D1 (de) 1996-04-11
FR2670579B1 (enExample) 1994-07-13
EP0490764B1 (fr) 1996-03-06
ATE135102T1 (de) 1996-03-15

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