ES2086509T3 - Captador semiconductor para caudal. - Google Patents

Captador semiconductor para caudal.

Info

Publication number
ES2086509T3
ES2086509T3 ES91403361T ES91403361T ES2086509T3 ES 2086509 T3 ES2086509 T3 ES 2086509T3 ES 91403361 T ES91403361 T ES 91403361T ES 91403361 T ES91403361 T ES 91403361T ES 2086509 T3 ES2086509 T3 ES 2086509T3
Authority
ES
Spain
Prior art keywords
flow
substrate
zone
face
zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91403361T
Other languages
English (en)
Inventor
Minh-Trang Chau
Didier Dominguez
Jan Suski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger SA
Original Assignee
Schlumberger SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger SA filed Critical Schlumberger SA
Application granted granted Critical
Publication of ES2086509T3 publication Critical patent/ES2086509T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

EL DETECTOR DE CAUDAL ESTA FORMADO A PARTIR DE UN SUSTRATO (1) DE SILICIO. UNA PRIMERA CARA (A) DEL SUSTRATO ESTA DOTADA DE UN ELEMENTO TERMICO (2) DISPUESTO EN UNA PRIMERA ZONA (R1) Y DE AL MENOS UN ELEMENTO TERMOMETRICO (4) DISPUESTO EN UNA SEGUNDA ZONA (R2), ESTANDO AISLADAS LA PRIMERA Y LA SEGUNDA ZONA UNA DE OTRA POR UNA TERCERA ZONA (R3) DE SILICIO OXIDADO; SEGUN LA INVENCION, EL DETECTOR ESTA ADAPTADO PARA RECIBIR LA CIRCULACION DEL FLUIDO (E) EN FRENTE DE LA SEGUNDA CARA (B) DEL SUSTRATO (1), FORMANDO TANTO LA PRIMERA COMO LA SEGUNDA ZONA (R1, R2) UN CORTOCIRCUITO TERMICO ENTRE LA PRIMERA Y LA SEGUNDA CARA (A, B) DE DICHO SUSTRATO.
ES91403361T 1990-12-14 1991-12-12 Captador semiconductor para caudal. Expired - Lifetime ES2086509T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9015658A FR2670579A1 (fr) 1990-12-14 1990-12-14 Capteur semi-conducteur de debit.

Publications (1)

Publication Number Publication Date
ES2086509T3 true ES2086509T3 (es) 1996-07-01

Family

ID=9403230

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91403361T Expired - Lifetime ES2086509T3 (es) 1990-12-14 1991-12-12 Captador semiconductor para caudal.

Country Status (8)

Country Link
US (1) US5311775A (es)
EP (1) EP0490764B1 (es)
JP (1) JPH04295724A (es)
AT (1) ATE135102T1 (es)
DE (1) DE69117694T2 (es)
DK (1) DK0490764T3 (es)
ES (1) ES2086509T3 (es)
FR (1) FR2670579A1 (es)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4233153C2 (de) * 1992-10-02 1995-08-17 Lang Apparatebau Gmbh Kalorimetrischer Durchflußmesser und Verfahren zu seiner Herstellung
US5392647A (en) * 1993-06-07 1995-02-28 Ricoh Seiki Company, Ltd. Flow sensor
DE19524634B4 (de) * 1995-07-06 2006-03-30 Robert Bosch Gmbh Vorrichtung zur Messung der Masse eines strömenden Mediums
WO1998036247A1 (de) * 1997-02-14 1998-08-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strömungssensorkomponente
US6230570B1 (en) 1997-08-26 2001-05-15 John Paul Clark Turbulent spot flowmeter
DE19808248A1 (de) * 1998-02-27 1999-09-02 Pierburg Ag Meßvorrichtung zur Messung der Masse eines strömenden Mediums
DE19812690C1 (de) * 1998-03-23 1999-11-18 Siemens Ag Träger für einen temperaturabhängigen Widerstand
US6032527A (en) * 1998-07-01 2000-03-07 Memsys, Inc. Solid state microanemometer
US7109842B1 (en) * 1998-12-07 2006-09-19 Honeywell International Inc. Robust fluid flow and property microsensor made of optimal material
DE19908664A1 (de) * 1999-03-01 2000-09-07 Abb Research Ltd Gaszähler
US6770503B1 (en) * 1999-10-21 2004-08-03 The Charles Stark Draper Laboratory, Inc. Integrated packaging of micromechanical sensors and associated control circuits
EP1164361A1 (de) * 2000-06-14 2001-12-19 Abb Research Ltd. Gaszähler
DE10032579B4 (de) * 2000-07-05 2020-07-02 Robert Bosch Gmbh Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement
DE10046621B4 (de) * 2000-09-20 2010-08-05 Robert Bosch Gmbh Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array
DE10046622B4 (de) * 2000-09-20 2010-05-20 Robert Bosch Gmbh Verfahren zur Herstellung einer Membransensoreinheit sowie Membransensoreinheit
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
DE10058009A1 (de) * 2000-11-23 2002-06-06 Bosch Gmbh Robert Strömungssensor
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
DE10118568A1 (de) * 2001-04-14 2002-10-17 Bosch Gmbh Robert Verfahren zum Erzeugen von optisch transparenten Bereichen in einem Siliziumsubstrat
JP3969564B2 (ja) * 2001-10-19 2007-09-05 株式会社山武 フローセンサ
EP1306349B1 (de) * 2001-10-24 2007-03-14 Robert Bosch Gmbh Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array
US7417601B2 (en) 2003-05-20 2008-08-26 Samsung Electronics Co., Ltd. Projector systems
DE102007034919A1 (de) * 2007-07-24 2009-03-12 Continental Automotive Gmbh Massenstromsensor
US7603898B2 (en) * 2007-12-19 2009-10-20 Honeywell International Inc. MEMS structure for flow sensor
JP5907688B2 (ja) * 2011-09-28 2016-04-26 アズビル株式会社 フローセンサ及びフローセンサの製造方法
CN113295224B (zh) * 2021-05-25 2022-07-22 中国科学院上海微系统与信息技术研究所 气液两用热式流量传感器及其制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
DE3485381D1 (de) * 1983-05-18 1992-02-06 Bronkhorst High Tech Bv Durchflussmessgeraet.
JPS6131966A (ja) * 1984-07-25 1986-02-14 Toshiba Corp 半導体流速検出器
JPS61170618A (ja) * 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc 流速検出用半導体センサ
JPS6385363A (ja) * 1986-09-29 1988-04-15 Sharp Corp 流速検知素子
NL8702229A (nl) * 1987-09-18 1989-04-17 Bronkhorst High Tech Bv Richtingsgevoelige stroomsnelheidsmeter.
US4909078A (en) * 1987-10-14 1990-03-20 Rosemount Inc. Fluid flow detector
US4888988A (en) * 1987-12-23 1989-12-26 Siemens-Bendix Automotive Electronics L.P. Silicon based mass airflow sensor and its fabrication method
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers

Also Published As

Publication number Publication date
EP0490764B1 (fr) 1996-03-06
EP0490764A1 (fr) 1992-06-17
DK0490764T3 (da) 1996-07-22
JPH04295724A (ja) 1992-10-20
FR2670579A1 (fr) 1992-06-19
ATE135102T1 (de) 1996-03-15
FR2670579B1 (es) 1994-07-13
US5311775A (en) 1994-05-17
DE69117694T2 (de) 1996-10-02
DE69117694D1 (de) 1996-04-11

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