FR2597552B1 - Pompe a vide moleculaire, notamment du type turbomoleculaire - Google Patents

Pompe a vide moleculaire, notamment du type turbomoleculaire

Info

Publication number
FR2597552B1
FR2597552B1 FR8704940A FR8704940A FR2597552B1 FR 2597552 B1 FR2597552 B1 FR 2597552B1 FR 8704940 A FR8704940 A FR 8704940A FR 8704940 A FR8704940 A FR 8704940A FR 2597552 B1 FR2597552 B1 FR 2597552B1
Authority
FR
France
Prior art keywords
vacuum pump
molecular vacuum
turbomolecular type
turbomolecular
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8704940A
Other languages
English (en)
French (fr)
Other versions
FR2597552A1 (fr
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PFEIFFER VAKUUMTECHNIK
Original Assignee
PFEIFFER VAKUUMTECHNIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PFEIFFER VAKUUMTECHNIK filed Critical PFEIFFER VAKUUMTECHNIK
Publication of FR2597552A1 publication Critical patent/FR2597552A1/fr
Application granted granted Critical
Publication of FR2597552B1 publication Critical patent/FR2597552B1/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
FR8704940A 1986-04-19 1987-04-08 Pompe a vide moleculaire, notamment du type turbomoleculaire Expired FR2597552B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863613344 DE3613344A1 (de) 1986-04-19 1986-04-19 Turbomolekular-vakuumpumpe fuer hoeheren druck

Publications (2)

Publication Number Publication Date
FR2597552A1 FR2597552A1 (fr) 1987-10-23
FR2597552B1 true FR2597552B1 (fr) 1988-11-04

Family

ID=6299120

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8704940A Expired FR2597552B1 (fr) 1986-04-19 1987-04-08 Pompe a vide moleculaire, notamment du type turbomoleculaire

Country Status (10)

Country Link
US (1) US4826394A (cg-RX-API-DMAC7.html)
JP (1) JPS62255597A (cg-RX-API-DMAC7.html)
BE (1) BE1000045A6 (cg-RX-API-DMAC7.html)
CA (1) CA1300579C (cg-RX-API-DMAC7.html)
CH (1) CH678088A5 (cg-RX-API-DMAC7.html)
DE (1) DE3613344A1 (cg-RX-API-DMAC7.html)
FR (1) FR2597552B1 (cg-RX-API-DMAC7.html)
GB (1) GB2189295B (cg-RX-API-DMAC7.html)
IT (1) IT1203343B (cg-RX-API-DMAC7.html)
NL (1) NL8700458A (cg-RX-API-DMAC7.html)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
DE3791053T1 (de) * 1987-12-25 1989-12-21 Valerij Borisovic Solochov Vakuum-molekularpumpe
DE3891201T1 (de) * 1988-01-05 1990-01-11 Valerij Borisovic Solochov Vakuum-molekularpumpe
FI894271A7 (fi) * 1988-02-26 1989-09-11 Sholokhov Valery B Turbomolekulaarinen tyhjöpumppu
CH676378A5 (cg-RX-API-DMAC7.html) * 1988-03-30 1991-01-15 Vladimir Pavlovich Sergeev
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
EP0363503B1 (de) * 1988-10-10 1993-11-24 Leybold Aktiengesellschaft Pumpenstufe für eine Hochvakuumpumpe
JPH0257156U (cg-RX-API-DMAC7.html) * 1988-10-14 1990-04-25
JPH07117067B2 (ja) * 1988-12-30 1995-12-18 株式会社島津製作所 分子ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
FR2723987A1 (fr) * 1994-08-23 1996-03-01 Commissariat Energie Atomique Pompe a vide cryomecanique
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
IT1296155B1 (it) * 1996-04-05 1999-06-09 Varian Spa Rotore di pompa turbomolecolare
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump
US6506025B1 (en) * 1999-06-23 2003-01-14 California Institute Of Technology Bladeless pump
DE19933332A1 (de) 1999-07-16 2001-01-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe für den Einsatz in einem System zur Druckregelung sowie Druckregelungssystem mit einer Reibungsvakuumpumpe dieser Art
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
US6514035B2 (en) 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
US6367247B1 (en) * 2000-05-25 2002-04-09 Don M. Yancey Air engine
SE519353C2 (sv) * 2000-11-15 2003-02-18 Volvo Aero Corp Stator till en gasturbin
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
JP2004083393A (ja) * 2002-06-27 2004-03-18 Toshiba Mach Co Ltd 光学素子成形装置
ITTO20030420A1 (it) * 2003-06-05 2004-12-06 Varian Spa Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102005003091A1 (de) * 2005-01-22 2006-07-27 Leybold Vacuum Gmbh Vakuum-Seitenkanalverdichter
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102014109004A1 (de) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Siegbahnstufe
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
JP2020026801A (ja) * 2018-08-09 2020-02-20 いすゞ自動車株式会社 ポンプ及び、ギヤ装置の潤滑構造

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
DE605902C (de) * 1932-01-08 1934-11-20 Hugo Seemann Dr Turbohochvakuumpumpe
CH234534A (de) * 1942-11-24 1944-09-30 Bbc Brown Boveri & Cie Molekularpumpe.
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
FR1256281A (fr) * 1960-04-30 1961-03-17 Procédé pour la préparation de l'acide 6-amino-pénicillanique
US3298314A (en) * 1965-01-29 1967-01-17 John F Kopczynski Fluid moving device
US3697190A (en) * 1970-11-03 1972-10-10 Walter D Haentjens Truncated conical drag pump
FR2224009A5 (cg-RX-API-DMAC7.html) * 1973-03-30 1974-10-25 Cit Alcatel
EP0129709A3 (en) * 1983-04-26 1985-03-06 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ

Also Published As

Publication number Publication date
IT1203343B (it) 1989-02-15
NL8700458A (nl) 1987-11-16
GB8709269D0 (en) 1987-05-20
US4826394A (en) 1989-05-02
FR2597552A1 (fr) 1987-10-23
DE3613344A1 (de) 1987-10-22
JPS62255597A (ja) 1987-11-07
GB2189295B (en) 1990-03-28
CH678088A5 (cg-RX-API-DMAC7.html) 1991-07-31
IT8719464A0 (it) 1987-02-24
CA1300579C (en) 1992-05-12
BE1000045A6 (fr) 1987-12-15
GB2189295A (en) 1987-10-21

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Legal Events

Date Code Title Description
ST Notification of lapse