FR2557595B1 - Procede de depot de revetements et revetements obtenus par ledit procede - Google Patents

Procede de depot de revetements et revetements obtenus par ledit procede

Info

Publication number
FR2557595B1
FR2557595B1 FR8321028A FR8321028A FR2557595B1 FR 2557595 B1 FR2557595 B1 FR 2557595B1 FR 8321028 A FR8321028 A FR 8321028A FR 8321028 A FR8321028 A FR 8321028A FR 2557595 B1 FR2557595 B1 FR 2557595B1
Authority
FR
France
Prior art keywords
coatings
depositing
coatings obtained
depositing coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8321028A
Other languages
English (en)
French (fr)
Other versions
FR2557595A1 (fr
Inventor
A G Gavrilov
L S Guzei
V P Zhed
E I Kurbatova
V N Panin
A K Sinelschikov
V G Padalka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INSTR I
Original Assignee
INSTR I
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INSTR I filed Critical INSTR I
Publication of FR2557595A1 publication Critical patent/FR2557595A1/fr
Application granted granted Critical
Publication of FR2557595B1 publication Critical patent/FR2557595B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Materials For Medical Uses (AREA)
  • Food-Manufacturing Devices (AREA)
FR8321028A 1983-08-25 1983-12-29 Procede de depot de revetements et revetements obtenus par ledit procede Expired FR2557595B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1983/000030 WO1985001071A1 (fr) 1983-08-25 1983-08-25 Procede de depot d'un revetement

Publications (2)

Publication Number Publication Date
FR2557595A1 FR2557595A1 (fr) 1985-07-05
FR2557595B1 true FR2557595B1 (fr) 1986-07-11

Family

ID=21616808

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8321028A Expired FR2557595B1 (fr) 1983-08-25 1983-12-29 Procede de depot de revetements et revetements obtenus par ledit procede

Country Status (15)

Country Link
JP (1) JPS60502110A (da)
AT (1) AT382892B (da)
AU (1) AU559857B2 (da)
BR (1) BR8307748A (da)
CA (1) CA1216252A (da)
CH (1) CH666054A5 (da)
DE (1) DE3390523C2 (da)
DK (1) DK159385A (da)
FI (1) FI80296C (da)
FR (1) FR2557595B1 (da)
GB (1) GB2155044B (da)
NL (1) NL8320315A (da)
NO (1) NO851558L (da)
SE (1) SE454705B (da)
WO (1) WO1985001071A1 (da)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH669347A5 (da) * 1986-05-28 1989-03-15 Vni Instrument Inst
CH671238A5 (da) * 1986-11-06 1989-08-15 Vni Instrument Inst
AT388394B (de) * 1987-01-09 1989-06-12 Vni Instrument Inst Verfahren zur herstellung von schneidwerkzeug
FR2609726B1 (fr) * 1987-01-20 1989-05-26 Instr I Procede de fabrication d'outils de coupe
EP0404973A1 (de) * 1989-06-27 1991-01-02 Hauzer Holding B.V. Verfahren und Vorrichtung zur Beschichtung von Substraten
DE59004614D1 (de) * 1989-06-27 1994-03-24 Hauzer Holding Verfahren und vorrichtung zur beschichtung von substraten.
KR100777148B1 (ko) * 2000-06-30 2007-11-19 생-고뱅 어브레이시브즈, 인코포레이티드 초연삭제에 금속으로 코팅하는 방법
PL2236641T3 (pl) 2009-03-30 2012-05-31 Oerlikon Trading Ag Sposób wstępnej obróbki podłoży w procesie PVD

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428546A (en) * 1966-09-27 1969-02-18 Atomic Energy Commission Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) * 1972-03-13 1975-05-13 Granville Phillips Co Anti-wear thin film coatings and method for making same
US3912826A (en) * 1972-08-21 1975-10-14 Airco Inc Method of physical vapor deposition
CA1041881A (en) * 1974-09-11 1978-11-07 Niels N. Engel Coated steel product and process of producing the same
US4163071A (en) * 1977-07-05 1979-07-31 Union Carbide Corp Method for forming hard wear-resistant coatings
JPS5462183A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Outside parts for pocket watch
DE3030149C3 (de) * 1979-08-09 1996-12-19 Mitsubishi Materials Corp Schneidplättchen und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
AU559857B2 (en) 1987-03-19
CA1216252A (en) 1987-01-06
FI851485L (fi) 1985-04-12
DK159385D0 (da) 1985-04-09
BR8307748A (pt) 1985-07-02
SE8501521L (sv) 1985-03-27
FI80296B (fi) 1990-01-31
FR2557595A1 (fr) 1985-07-05
NL8320315A (nl) 1985-07-01
FI80296C (fi) 1990-05-10
AT382892B (de) 1987-04-27
GB2155044B (en) 1987-11-18
DK159385A (da) 1985-04-09
FI851485A0 (fi) 1985-04-12
GB2155044A (en) 1985-09-18
ATA908483A (de) 1986-09-15
CH666054A5 (de) 1988-06-30
SE8501521D0 (sv) 1985-03-27
WO1985001071A1 (fr) 1985-03-14
DE3390523C2 (de) 1990-01-18
JPS60502110A (ja) 1985-12-05
SE454705B (sv) 1988-05-24
NO851558L (no) 1985-04-18
AU2073583A (en) 1985-03-29
DE3390523T1 (de) 1985-08-08

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Legal Events

Date Code Title Description
ST Notification of lapse