FR2530011B1 - Dispositif de mesure capacitif de deplacements - Google Patents

Dispositif de mesure capacitif de deplacements

Info

Publication number
FR2530011B1
FR2530011B1 FR8310307A FR8310307A FR2530011B1 FR 2530011 B1 FR2530011 B1 FR 2530011B1 FR 8310307 A FR8310307 A FR 8310307A FR 8310307 A FR8310307 A FR 8310307A FR 2530011 B1 FR2530011 B1 FR 2530011B1
Authority
FR
France
Prior art keywords
displacements
capacitive measurement
capacitive
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8310307A
Other languages
English (en)
Other versions
FR2530011A1 (fr
Inventor
Christophe W Burckhardt
Jacques Fournier
Philippe Stauber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesa SARL
Original Assignee
Tesa SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesa SARL filed Critical Tesa SARL
Publication of FR2530011A1 publication Critical patent/FR2530011A1/fr
Application granted granted Critical
Publication of FR2530011B1 publication Critical patent/FR2530011B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/06—Continuously compensating for, or preventing, undesired influence of physical parameters
    • H03M1/08—Continuously compensating for, or preventing, undesired influence of physical parameters of noise
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12—Analogue/digital converters
    • H03M1/22—Analogue/digital converters pattern-reading type
    • H03M1/24—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
    • H03M1/28—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
    • H03M1/30—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding incremental

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
FR8310307A 1982-07-07 1983-06-22 Dispositif de mesure capacitif de deplacements Expired FR2530011B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH4133/82A CH648929A5 (fr) 1982-07-07 1982-07-07 Dispositif de mesure capacitif de deplacement.

Publications (2)

Publication Number Publication Date
FR2530011A1 FR2530011A1 (fr) 1984-01-13
FR2530011B1 true FR2530011B1 (fr) 1986-11-28

Family

ID=4270450

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8310307A Expired FR2530011B1 (fr) 1982-07-07 1983-06-22 Dispositif de mesure capacitif de deplacements

Country Status (10)

Country Link
US (1) US4543526A (fr)
JP (1) JPS5923218A (fr)
BR (1) BR8303577A (fr)
CH (1) CH648929A5 (fr)
DE (1) DE3324578C2 (fr)
FR (1) FR2530011B1 (fr)
GB (1) GB2123629B (fr)
IN (1) IN159378B (fr)
IT (1) IT1162890B (fr)
SE (1) SE455230B (fr)

Families Citing this family (50)

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US4677578A (en) * 1982-04-05 1987-06-30 Armco Inc. Non-contact sensing system for determining the relative elongation in a moving flat steel strip
US4633249A (en) * 1983-05-18 1986-12-30 Mitutoyo Mfg. Co., Ltd. Displacement detector utilizing change of capacitance
DE3338108A1 (de) * 1983-10-20 1985-05-02 Robert 5446 Engeln Wolff Digitale messvorrichtung fuer drehwinkelabhaengige groessen
DE3340782C2 (de) * 1983-11-11 1985-12-05 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Kapazitive Längen- und Winkelmeßeinrichtung
CH666122A5 (fr) * 1986-04-10 1988-06-30 Hans Ulrich Meyer Capteur capacitif de position.
US4857828A (en) * 1986-05-30 1989-08-15 Control Logic (Proprietary) Limited Method and apparatus for detecting presence of objects
US4794393A (en) * 1986-08-22 1988-12-27 Imran Mir A Device for measuring parameters on electrocardiogram strip recordings
DE3637529A1 (de) * 1986-09-02 1988-03-17 Hengstler Gmbh Kapazitiver linear- oder drehgeber zum steuern und positionieren von bewegten gegenstaenden
US4896098A (en) * 1987-01-08 1990-01-23 Massachusetts Institute Of Technology Turbulent shear force microsensor
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
DE3834200A1 (de) * 1988-10-07 1990-04-12 Rexroth Mannesmann Gmbh Kapazitiver wegaufnehmer
US4958115A (en) * 1988-11-28 1990-09-18 At&T Bell Laboratories Capacitively commutated brushless DC servomotors
US5049824A (en) * 1988-12-12 1991-09-17 Mitutoyo Corp. Phase discrimination type electrostatic capacity detector
US5012237A (en) * 1989-05-26 1991-04-30 Cummins Electronics Company, Inc. Reflected electrostatic field angle resolver
JPH0318759A (ja) * 1989-06-15 1991-01-28 Akebono Brake Ind Co Ltd 輪速検出装置
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
DE4201813A1 (de) * 1992-01-24 1993-07-29 Pav Praezisions Apparatebau Ag Vorrichtung zum messen einer geometrischen groesse
FR2688315B1 (fr) * 1992-03-09 1994-05-27 Sagem Capteur accelerometrique capacitif et accelerometre non asservi en comportant application.
SE9202005L (sv) * 1992-06-29 1993-12-20 Johansson Ab C E Skalsystem för absolutmätning
US5321366A (en) * 1992-08-31 1994-06-14 Murata Mfg. Co. Ltd. Capacitance sensor apparatus of divided multi-electrode type
DE4308462A1 (de) * 1993-03-17 1994-09-22 Vdo Schindling Anordnung zur Signalverarbeitung für Absolutwertsensoren mit periodischen Strukturen, insbesondere für Positions- und Winkelsensoren
US5880683A (en) * 1993-07-22 1999-03-09 Bourns, Inc. Absolute digital position encoder
US5739775A (en) * 1993-07-22 1998-04-14 Bourns, Inc. Digital input and control device
DE4328525A1 (de) * 1993-08-25 1995-04-06 Mikroelektronik Und Technologi Längen- oder Winkelmeßeinrichtung
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
EP0747673B1 (fr) 1995-06-07 2003-03-26 Brown & Sharpe Tesa S.A. Dispositif de mesure capacitif
JP3125675B2 (ja) * 1996-03-29 2001-01-22 三菱電機株式会社 容量型センサインターフェース回路
EP0836076B1 (fr) * 1996-10-11 2002-05-22 Brown & Sharpe Tesa S.A. Dispositif de mesure de dimension capacitif
DE19715078A1 (de) * 1997-04-11 1998-10-15 Univ Ilmenau Tech Verfahren zur kapazitiven Weg- und Winkelmessung
KR100744103B1 (ko) * 1997-12-30 2007-12-20 주식회사 하이닉스반도체 플래쉬메모리장치의로우디코더
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
US6862832B2 (en) * 2002-07-17 2005-03-08 Ronnie G. Barrett Digital elevation knob
JP2006047135A (ja) * 2004-08-05 2006-02-16 Olympus Corp 静電エンコーダ
GB2419950A (en) * 2004-11-09 2006-05-10 Sharp Kk Capacitance measuring apparatus for LCD touch screen
JP2007093287A (ja) * 2005-09-27 2007-04-12 Tietech Co Ltd リニアモータ
CN101421913B (zh) * 2006-04-12 2012-07-18 诺沃-诺迪斯克有限公司 药品传输设备中的可移动安装元件的绝对位置的确定
US8330629B2 (en) 2007-04-19 2012-12-11 Hosiden Corporation Rotary input device and revolution sensor using the same
JP5171395B2 (ja) * 2007-07-31 2013-03-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
US7570066B2 (en) * 2007-11-01 2009-08-04 Seagate Technology Llc Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors
JP5153457B2 (ja) * 2008-05-29 2013-02-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
US8161823B2 (en) * 2008-10-28 2012-04-24 Pile Dynamics, Inc. Strain and displacement sensor and system and method for using the same
WO2010052275A2 (fr) 2008-11-06 2010-05-14 Novo Nordisk A/S Dispositif électroniquement assisté d'administration de médicament
US9021880B2 (en) 2010-04-30 2015-05-05 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
US9939932B2 (en) * 2014-03-21 2018-04-10 Advanced Sensor Technology Limited Position sensing device and method using self-capacitance
JP6371643B2 (ja) * 2014-09-03 2018-08-08 オリエンタルモーター株式会社 静電エンコーダ
GB2550967A (en) * 2016-06-03 2017-12-06 Brandenburg (Uk) Ltd Sensing of objects
CN106643455B (zh) * 2016-12-26 2018-11-30 清华大学 一种电容式旋变位移传感器
US10451519B2 (en) 2017-02-27 2019-10-22 Pile Dynamics, Inc. Non-contact strain measurement system and method for using the same
CA3043829A1 (fr) * 2018-05-22 2019-11-22 Chad Unterschultz Detection de position capacitive

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH538114A (de) * 1971-05-06 1973-06-15 Bauer Messinstrumente Ag Vorrichtung zur Digitalen, kapazitiven Messung der örtlichen Lage von Trennschichten zwischen mindestens zwei aneinandergrenzenden Medien
CH550378A (de) * 1972-09-07 1974-06-14 Maag Zahnraeder & Maschinen Ag Vorrichtung zur kapazitiven winkel- oder laengenmessung.
US3938113A (en) * 1974-06-17 1976-02-10 International Business Machines Corporation Differential capacitive position encoder
US3990005A (en) * 1974-09-03 1976-11-02 Ade Corporation Capacitive thickness gauging for ungrounded elements
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
JPS568508A (en) * 1979-07-02 1981-01-28 Nippon Soken Inc Rotation detector
DE3039483C2 (de) * 1980-10-18 1986-09-11 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale Längen- oder Winkelmeßeinrichtung

Also Published As

Publication number Publication date
JPH0376687B2 (fr) 1991-12-06
GB2123629B (en) 1986-01-08
IT1162890B (it) 1987-04-01
GB2123629A (en) 1984-02-01
SE8303619L (sv) 1984-01-08
IN159378B (fr) 1987-05-09
US4543526A (en) 1985-09-24
JPS5923218A (ja) 1984-02-06
BR8303577A (pt) 1984-02-14
SE455230B (sv) 1988-06-27
FR2530011A1 (fr) 1984-01-13
SE8303619D0 (sv) 1983-06-23
GB8316841D0 (en) 1983-07-27
CH648929A5 (fr) 1985-04-15
DE3324578C2 (de) 1985-06-20
DE3324578A1 (de) 1984-01-12
IT8367725A0 (it) 1983-07-01

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