FR2488238B1 - Procede de preparation de tetrafluorure de silicium en utilisant du fluorure d'hydrogene gazeux - Google Patents
Procede de preparation de tetrafluorure de silicium en utilisant du fluorure d'hydrogene gazeuxInfo
- Publication number
- FR2488238B1 FR2488238B1 FR8112956A FR8112956A FR2488238B1 FR 2488238 B1 FR2488238 B1 FR 2488238B1 FR 8112956 A FR8112956 A FR 8112956A FR 8112956 A FR8112956 A FR 8112956A FR 2488238 B1 FR2488238 B1 FR 2488238B1
- Authority
- FR
- France
- Prior art keywords
- preparation
- hydrogen gas
- silicon tetrafluoride
- gas fluoride
- fluoride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10705—Tetrafluoride
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8910480A JPS5934130B2 (ja) | 1980-07-02 | 1980-07-02 | 四弗化珪素の製造法 |
JP2011381A JPS604125B2 (ja) | 1981-02-16 | 1981-02-16 | 高純度四弗化珪素の製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2488238A1 FR2488238A1 (fr) | 1982-02-12 |
FR2488238B1 true FR2488238B1 (fr) | 1985-08-16 |
Family
ID=26357007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8112956A Expired FR2488238B1 (fr) | 1980-07-02 | 1981-07-01 | Procede de preparation de tetrafluorure de silicium en utilisant du fluorure d'hydrogene gazeux |
Country Status (5)
Country | Link |
---|---|
US (1) | US4382071A (fr) |
DE (1) | DE3125989C2 (fr) |
FR (1) | FR2488238B1 (fr) |
GB (1) | GB2079262B (fr) |
IT (1) | IT1137189B (fr) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS604127B2 (ja) * | 1981-08-06 | 1985-02-01 | セントラル硝子株式会社 | 四弗化珪素ガスの精製法 |
US4849315A (en) * | 1985-01-21 | 1989-07-18 | Xerox Corporation | Processes for restoring hydrogenated and halogenated amorphous silicon imaging members |
US5030536A (en) * | 1989-12-26 | 1991-07-09 | Xerox Corporation | Processes for restoring amorphous silicon imaging members |
US5143706A (en) * | 1990-06-25 | 1992-09-01 | Phillips Petroleum Company | Sulfur absorbants |
US5242670A (en) * | 1992-07-02 | 1993-09-07 | Gehringer Ronald C | Method for hydrofluoric acid digestion of silica/alumina matrix material for the production of silicon tetrafluoride, aluminum fluoride and other residual metal fluorides and oxides |
US20020198230A1 (en) * | 1993-09-24 | 2002-12-26 | Howard M. Kingston | Method and apparatus for microwave assisted chemical reactions |
US5888468A (en) * | 1998-06-05 | 1999-03-30 | Starmet Corp. | Method for producing silicon tetrafluoride from uranium tetrafluoride |
US5918106A (en) * | 1998-06-05 | 1999-06-29 | Starmet Corp. | Method for producing uranium oxide and a non-radioactive fluorine compound from uranium tetrafluoride and a solid oxide compound |
US5901338A (en) * | 1998-06-05 | 1999-05-04 | Starmet Corporation | Method for producing uranium oxide and silicon tetrafluoride from uranium tetrafluoride, silicon, and a gaseous oxide |
US6033642A (en) * | 1999-03-29 | 2000-03-07 | Starmet Corporation | Method for producing silicon tetrafluoride from uranium oxyfluoride |
US6096281A (en) * | 1999-03-29 | 2000-08-01 | Starmet Corporation | Method for producing uranium oxide from uranium oxyfluoride |
US6086836A (en) * | 1999-03-29 | 2000-07-11 | Starmet Corporation | Method for producing uranium oxide from uranium oxyfluoride and silicon |
JP3909385B2 (ja) * | 2001-07-12 | 2007-04-25 | 昭和電工株式会社 | テトラフルオロシランの製造方法およびその用途 |
US7666379B2 (en) * | 2001-07-16 | 2010-02-23 | Voltaix, Inc. | Process and apparatus for removing Bronsted acid impurities in binary halides |
JP4014451B2 (ja) * | 2001-09-11 | 2007-11-28 | セントラル硝子株式会社 | 四フッ化珪素の製造法 |
RU2182558C1 (ru) * | 2001-09-28 | 2002-05-20 | Зао "Астор-Электроникс" | Способ получения тетрафторида кремния |
ES2258216T3 (es) * | 2002-01-18 | 2006-08-16 | Power Avenue | Procedimiento para la fabricacion de silicio. |
TW200512159A (en) * | 2003-09-25 | 2005-04-01 | Showa Denko Kk | Method for producing tetrafluorosilane |
DE102005024041A1 (de) * | 2005-05-25 | 2006-11-30 | City Solar Ag | Verfahren zur Herstellung von Silicium aus Halogensilanen |
DE102006043929B4 (de) * | 2006-09-14 | 2016-10-06 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von festen Polysilanmischungen |
US8388925B2 (en) | 2009-12-30 | 2013-03-05 | Memc Electronic Materials, Inc. | Methods for producing aluminum trifluoride |
US8529860B2 (en) * | 2009-12-30 | 2013-09-10 | Memc Electronics Materials, Inc. | Methods for producing silicon tetrafluoride |
KR101215490B1 (ko) | 2010-06-11 | 2012-12-26 | 주식회사 케이씨씨 | 다양한 플루오라이드 원료들과 비정질 실리카 및 황산을 이용한 사불화규소의 연속 제조방법 |
RU2454366C2 (ru) * | 2010-07-19 | 2012-06-27 | Открытое акционерное общество "Научно-исследовательский институт полупроводникового машиностроения ОАО "НИИПМ" | Способ получения тетрафторида кремния и устройство для его реализации |
DE102010045260A1 (de) * | 2010-09-14 | 2012-03-15 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von fluorierten Polysilanen |
KR20130015596A (ko) * | 2011-08-04 | 2013-02-14 | 주식회사 케이씨씨 | 실리카와 불화수소를 이용한 사불화규소의 연속제조방법 |
FI125535B (en) | 2013-09-02 | 2015-11-13 | Teknologian Tutkimuskeskus Vtt Oy | Method and apparatus for determining the siloxane content of a gas |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2833628A (en) * | 1954-06-09 | 1958-05-06 | Grace W R & Co | Manufacture of silicon tetrafluoride |
US2861872A (en) * | 1955-03-30 | 1958-11-25 | Columbian Carbon | Method for generating silicon tetrafluoride |
GB1080662A (en) * | 1964-02-05 | 1967-08-23 | Cabot Corp | Production of silicon tetrafluoride |
US3645678A (en) * | 1970-03-09 | 1972-02-29 | Wellman Lord Inc | Concentrating fluosilicic acid |
US3674431A (en) * | 1970-07-01 | 1972-07-04 | Cities Service Co | Generation of silicon tetrafluoride |
US4206189A (en) * | 1977-01-04 | 1980-06-03 | Belov Viktor Y | Method of producing hydrogen fluoride and silicon dioxide from silicon tetra-fluoride |
-
1981
- 1981-06-26 GB GB8119767A patent/GB2079262B/en not_active Expired
- 1981-07-01 US US06/279,614 patent/US4382071A/en not_active Expired - Fee Related
- 1981-07-01 DE DE3125989A patent/DE3125989C2/de not_active Expired
- 1981-07-01 FR FR8112956A patent/FR2488238B1/fr not_active Expired
- 1981-07-02 IT IT22716/81A patent/IT1137189B/it active
Also Published As
Publication number | Publication date |
---|---|
DE3125989C2 (de) | 1983-12-15 |
IT1137189B (it) | 1986-09-03 |
DE3125989A1 (de) | 1982-03-18 |
FR2488238A1 (fr) | 1982-02-12 |
GB2079262A (en) | 1982-01-20 |
US4382071A (en) | 1983-05-03 |
IT8122716A0 (it) | 1981-07-02 |
GB2079262B (en) | 1984-03-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |