JPS53126258A - Method of producing silicon wafer - Google Patents
Method of producing silicon waferInfo
- Publication number
- JPS53126258A JPS53126258A JP4092177A JP4092177A JPS53126258A JP S53126258 A JPS53126258 A JP S53126258A JP 4092177 A JP4092177 A JP 4092177A JP 4092177 A JP4092177 A JP 4092177A JP S53126258 A JPS53126258 A JP S53126258A
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- producing silicon
- producing
- wafer
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4092177A JPS5936821B2 (en) | 1977-04-12 | 1977-04-12 | Silicon wafer manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4092177A JPS5936821B2 (en) | 1977-04-12 | 1977-04-12 | Silicon wafer manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53126258A true JPS53126258A (en) | 1978-11-04 |
JPS5936821B2 JPS5936821B2 (en) | 1984-09-06 |
Family
ID=12593952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4092177A Expired JPS5936821B2 (en) | 1977-04-12 | 1977-04-12 | Silicon wafer manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5936821B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5664438A (en) * | 1979-10-31 | 1981-06-01 | Mitsubishi Metal Corp | Adhesive for fixing holding plate of semiconductor monocrystalline ingot |
JPS63274700A (en) * | 1987-04-03 | 1988-11-11 | ワッカー・ジルトロニク・ゲゼルシャフト・フュア・ハルブライターマテリアリエン・ミット・ベシュレンクテル・ハフツング | Method of removing slice sawing accessory means residual piece and remover |
CN104718599A (en) * | 2012-09-04 | 2015-06-17 | 索泰克公司 | Pseudo substrate with improved efficiency of usage of single crystal material |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6354911A (en) * | 1986-08-27 | 1988-03-09 | Hitachi Ltd | Filter body for room air cleaner |
-
1977
- 1977-04-12 JP JP4092177A patent/JPS5936821B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5664438A (en) * | 1979-10-31 | 1981-06-01 | Mitsubishi Metal Corp | Adhesive for fixing holding plate of semiconductor monocrystalline ingot |
JPS63274700A (en) * | 1987-04-03 | 1988-11-11 | ワッカー・ジルトロニク・ゲゼルシャフト・フュア・ハルブライターマテリアリエン・ミット・ベシュレンクテル・ハフツング | Method of removing slice sawing accessory means residual piece and remover |
CN104718599A (en) * | 2012-09-04 | 2015-06-17 | 索泰克公司 | Pseudo substrate with improved efficiency of usage of single crystal material |
KR20160041840A (en) * | 2012-09-04 | 2016-04-18 | 소이텍 | Pseudo substrate with improved efficiency of usage of single crystal material |
US10910256B2 (en) | 2012-09-04 | 2021-02-02 | Soitec | Pseudo-substrate with improved efficiency of usage of single crystal material |
Also Published As
Publication number | Publication date |
---|---|
JPS5936821B2 (en) | 1984-09-06 |
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