JPS53126258A - Method of producing silicon wafer - Google Patents

Method of producing silicon wafer

Info

Publication number
JPS53126258A
JPS53126258A JP4092177A JP4092177A JPS53126258A JP S53126258 A JPS53126258 A JP S53126258A JP 4092177 A JP4092177 A JP 4092177A JP 4092177 A JP4092177 A JP 4092177A JP S53126258 A JPS53126258 A JP S53126258A
Authority
JP
Japan
Prior art keywords
silicon wafer
producing silicon
producing
wafer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4092177A
Other languages
Japanese (ja)
Other versions
JPS5936821B2 (en
Inventor
Kentarou Sakamoto
Yoshitomo Hoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON DENSHI KINZOKU KK
Mitsubishi Metal Corp
Original Assignee
NIPPON DENSHI KINZOKU KK
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON DENSHI KINZOKU KK, Mitsubishi Metal Corp filed Critical NIPPON DENSHI KINZOKU KK
Priority to JP4092177A priority Critical patent/JPS5936821B2/en
Publication of JPS53126258A publication Critical patent/JPS53126258A/en
Publication of JPS5936821B2 publication Critical patent/JPS5936821B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP4092177A 1977-04-12 1977-04-12 Silicon wafer manufacturing method Expired JPS5936821B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4092177A JPS5936821B2 (en) 1977-04-12 1977-04-12 Silicon wafer manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4092177A JPS5936821B2 (en) 1977-04-12 1977-04-12 Silicon wafer manufacturing method

Publications (2)

Publication Number Publication Date
JPS53126258A true JPS53126258A (en) 1978-11-04
JPS5936821B2 JPS5936821B2 (en) 1984-09-06

Family

ID=12593952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4092177A Expired JPS5936821B2 (en) 1977-04-12 1977-04-12 Silicon wafer manufacturing method

Country Status (1)

Country Link
JP (1) JPS5936821B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664438A (en) * 1979-10-31 1981-06-01 Mitsubishi Metal Corp Adhesive for fixing holding plate of semiconductor monocrystalline ingot
JPS63274700A (en) * 1987-04-03 1988-11-11 ワッカー・ジルトロニク・ゲゼルシャフト・フュア・ハルブライターマテリアリエン・ミット・ベシュレンクテル・ハフツング Method of removing slice sawing accessory means residual piece and remover
CN104718599A (en) * 2012-09-04 2015-06-17 索泰克公司 Pseudo substrate with improved efficiency of usage of single crystal material

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6354911A (en) * 1986-08-27 1988-03-09 Hitachi Ltd Filter body for room air cleaner

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664438A (en) * 1979-10-31 1981-06-01 Mitsubishi Metal Corp Adhesive for fixing holding plate of semiconductor monocrystalline ingot
JPS63274700A (en) * 1987-04-03 1988-11-11 ワッカー・ジルトロニク・ゲゼルシャフト・フュア・ハルブライターマテリアリエン・ミット・ベシュレンクテル・ハフツング Method of removing slice sawing accessory means residual piece and remover
CN104718599A (en) * 2012-09-04 2015-06-17 索泰克公司 Pseudo substrate with improved efficiency of usage of single crystal material
KR20160041840A (en) * 2012-09-04 2016-04-18 소이텍 Pseudo substrate with improved efficiency of usage of single crystal material
US10910256B2 (en) 2012-09-04 2021-02-02 Soitec Pseudo-substrate with improved efficiency of usage of single crystal material

Also Published As

Publication number Publication date
JPS5936821B2 (en) 1984-09-06

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