FR2476914B1 - Dispositif mosfet vertical avec electrode de blindage - Google Patents

Dispositif mosfet vertical avec electrode de blindage

Info

Publication number
FR2476914B1
FR2476914B1 FR8103443A FR8103443A FR2476914B1 FR 2476914 B1 FR2476914 B1 FR 2476914B1 FR 8103443 A FR8103443 A FR 8103443A FR 8103443 A FR8103443 A FR 8103443A FR 2476914 B1 FR2476914 B1 FR 2476914B1
Authority
FR
France
Prior art keywords
shielding electrode
mosfet device
vertical mosfet
vertical
shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8103443A
Other languages
English (en)
French (fr)
Other versions
FR2476914A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of FR2476914A1 publication Critical patent/FR2476914A1/fr
Application granted granted Critical
Publication of FR2476914B1 publication Critical patent/FR2476914B1/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66Vertical DMOS [VDMOS] FETs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222Capacitive arrangements or effects of, or between wiring layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR8103443A 1980-02-22 1981-02-20 Dispositif mosfet vertical avec electrode de blindage Expired FR2476914B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12371580A 1980-02-22 1980-02-22

Publications (2)

Publication Number Publication Date
FR2476914A1 FR2476914A1 (fr) 1981-08-28
FR2476914B1 true FR2476914B1 (fr) 1985-10-18

Family

ID=22410424

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8103443A Expired FR2476914B1 (fr) 1980-02-22 1981-02-20 Dispositif mosfet vertical avec electrode de blindage

Country Status (8)

Country Link
JP (1) JPS56131961A (enrdf_load_stackoverflow)
DE (1) DE3105693A1 (enrdf_load_stackoverflow)
FR (1) FR2476914B1 (enrdf_load_stackoverflow)
GB (1) GB2070331B (enrdf_load_stackoverflow)
IT (1) IT1135091B (enrdf_load_stackoverflow)
PL (1) PL136606B1 (enrdf_load_stackoverflow)
SE (1) SE456291B (enrdf_load_stackoverflow)
YU (1) YU41520B (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57141964A (en) * 1981-02-26 1982-09-02 Nippon Telegr & Teleph Corp <Ntt> Insulated gate type field effect transistor
DE3210353A1 (de) * 1982-03-20 1983-09-22 Robert Bosch Gmbh, 7000 Stuttgart Monolithisch integrierte darlingtonschaltung
EP0205639A1 (en) * 1985-06-25 1986-12-30 Eaton Corporation Bidirectional power fet with substrate referenced shield
EP0207178A1 (en) * 1985-06-25 1987-01-07 Eaton Corporation Bidirectional power fet with field shaping
US4577208A (en) * 1982-09-23 1986-03-18 Eaton Corporation Bidirectional power FET with integral avalanche protection
DE3465225D1 (en) * 1983-02-17 1987-09-10 Nissan Motor A vertical-type mosfet and method of fabricating the same
EP0205640A1 (en) * 1985-06-25 1986-12-30 Eaton Corporation Lateral bidirectional shielded notch fet
SG165138A1 (en) * 2000-07-12 2010-10-28 Inst Of Microelectronics A semiconductor device
WO2004066395A2 (en) * 2003-01-21 2004-08-05 North-West University Fast switching power insulated gate semiconductor device
US7276747B2 (en) * 2005-04-25 2007-10-02 Semiconductor Components Industries, L.L.C. Semiconductor device having screening electrode and method
CN102569386B (zh) * 2010-12-17 2015-02-04 上海华虹宏力半导体制造有限公司 具有屏蔽栅的vdmos器件及其制备方法
CN102569385B (zh) * 2010-12-17 2015-04-08 上海华虹宏力半导体制造有限公司 具有屏蔽栅的vdmos结构及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1132810A (en) * 1966-03-30 1968-11-06 Matsushita Electronics Corp Field-effect transistor having insulated gates
GB1316555A (enrdf_load_stackoverflow) * 1969-08-12 1973-05-09
US3845495A (en) * 1971-09-23 1974-10-29 Signetics Corp High voltage, high frequency double diffused metal oxide semiconductor device
GB1423449A (en) * 1973-07-27 1976-02-04 Standard Telephones Cables Ltd Semiconductor device
JPS52106688A (en) * 1976-03-05 1977-09-07 Nec Corp Field-effect transistor

Also Published As

Publication number Publication date
DE3105693A1 (de) 1981-11-26
YU41520B (en) 1987-08-31
DE3105693C2 (enrdf_load_stackoverflow) 1992-12-10
JPS56131961A (en) 1981-10-15
GB2070331B (en) 1984-05-23
GB2070331A (en) 1981-09-03
IT8119216A0 (it) 1981-01-20
JPH0213830B2 (enrdf_load_stackoverflow) 1990-04-05
SE8100148L (sv) 1981-08-23
PL136606B1 (en) 1986-03-31
YU42481A (en) 1983-06-30
PL229786A1 (enrdf_load_stackoverflow) 1981-09-18
FR2476914A1 (fr) 1981-08-28
SE456291B (sv) 1988-09-19
IT1135091B (it) 1986-08-20

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Legal Events

Date Code Title Description
ST Notification of lapse