FR2469005A1 - Jonction josephson de supraconducteurs a base d'oxyde et son procede de fabrication - Google Patents

Jonction josephson de supraconducteurs a base d'oxyde et son procede de fabrication

Info

Publication number
FR2469005A1
FR2469005A1 FR8023545A FR8023545A FR2469005A1 FR 2469005 A1 FR2469005 A1 FR 2469005A1 FR 8023545 A FR8023545 A FR 8023545A FR 8023545 A FR8023545 A FR 8023545A FR 2469005 A1 FR2469005 A1 FR 2469005A1
Authority
FR
France
Prior art keywords
oxide
film
superconducting
bix
perowskite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8023545A
Other languages
English (en)
French (fr)
Other versions
FR2469005B1 (enExample
Inventor
Minoru Suzuki
Toshiaki Murakami
Takahiro Inamura
Takashi Inukai
Youichi Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14312679A external-priority patent/JPS5666080A/ja
Priority claimed from JP1202780A external-priority patent/JPS56109824A/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of FR2469005A1 publication Critical patent/FR2469005A1/fr
Application granted granted Critical
Publication of FR2469005B1 publication Critical patent/FR2469005B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/816—Sputtering, including coating, forming, or etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/816—Sputtering, including coating, forming, or etching
    • Y10S505/817—Sputtering, including coating, forming, or etching forming josephson element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
FR8023545A 1979-11-05 1980-11-04 Jonction josephson de supraconducteurs a base d'oxyde et son procede de fabrication Granted FR2469005A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14312679A JPS5666080A (en) 1979-11-05 1979-11-05 Tunnel-junction type josephson element and manufacture thereof
JP1202780A JPS56109824A (en) 1980-02-05 1980-02-05 Manufacture of oxide superconductive thin film

Publications (2)

Publication Number Publication Date
FR2469005A1 true FR2469005A1 (fr) 1981-05-08
FR2469005B1 FR2469005B1 (enExample) 1984-04-27

Family

ID=26347563

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8023545A Granted FR2469005A1 (fr) 1979-11-05 1980-11-04 Jonction josephson de supraconducteurs a base d'oxyde et son procede de fabrication

Country Status (2)

Country Link
US (1) US4316785A (enExample)
FR (1) FR2469005A1 (enExample)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2545990A1 (fr) * 1983-05-14 1984-11-16 Nippon Telegraph & Telephone Dispositif photodetecteur ayant des jonctions de josephson
EP0329507A1 (fr) * 1988-02-02 1989-08-23 Thomson-Csf Dispositif en couches minces de matériau supraconducteur, et procédé de réalisation
EP0277885A3 (en) * 1987-02-05 1989-10-11 Sumitomo Electric Industries Limited Process for preparing a superconducting thin film
EP0285132A3 (en) * 1987-03-30 1990-04-25 Sumitomo Electric Industries Limited Method for producing thin film of oxide superconductor
EP0280273A3 (en) * 1987-02-24 1990-05-09 Kawatetsu Mining Company, Ltd. Manufacturing method of conductive or superconductive thin film
EP0282839A3 (en) * 1987-03-18 1990-07-25 International Business Machines Corporation Films of high tc oxide superconductors and method for making the same
EP0328398A3 (en) * 1988-02-10 1990-11-14 Sharp Kabushiki Kaisha Superconductive logic device
EP0280308A3 (en) * 1987-02-27 1990-12-12 Hitachi, Ltd. Superconducting device
EP0292959B1 (en) * 1987-05-26 1994-03-02 Sumitomo Electric Industries Limited Superconducting member
EP0430798B1 (en) * 1989-11-27 1997-04-02 Sumitomo Electric Industries, Ltd. Tunnel junction device composed of compound oxide superconductor material and method for fabricating the same
EP0390704B1 (en) * 1989-03-31 1998-12-23 Sumitomo Electric Industries, Ltd. Tunnel junction type Josephson device and method for fabricating the same
EP0292436B1 (en) * 1987-05-18 1999-11-24 International Business Machines Corporation High current conductors and high field magnets using anisotropic superconductors

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US4432134A (en) * 1982-05-10 1984-02-21 Rockwell International Corporation Process for in-situ formation of niobium-insulator-niobium Josephson tunnel junction devices
US4514441A (en) * 1982-11-17 1985-04-30 International Standard Electric Corporation Dielectric materials
JPS6065582A (ja) * 1983-09-20 1985-04-15 Nippon Telegr & Teleph Corp <Ntt> 粒界ジヨセフソン接合型光検出素子
US7056866B1 (en) * 1987-01-12 2006-06-06 University Of Houston-University Park Superconductivity in square-planar compound systems
AU598113B2 (en) † 1987-03-14 1990-06-14 Sumitomo Electric Industries, Ltd. Process for depositing a superconducting thin film
US5175140A (en) * 1987-03-19 1992-12-29 Sumitomo Electric Industries, Ltd. High Tc superconducting material
JPS63232208A (ja) * 1987-03-20 1988-09-28 Hideomi Koinuma 導電性又は超伝導性薄膜の製造方法
US4768069A (en) * 1987-03-23 1988-08-30 Westinghouse Electric Corp. Superconducting Josephson junctions
US5262398A (en) * 1987-03-24 1993-11-16 Sumitomo Electric Industries, Ltd. Ceramic oxide superconductive composite material
DE3887765T2 (de) * 1987-03-25 1994-09-22 Sumitomo Electric Industries Verfahren zur Herstellung einer dicken supraleitenden Schicht.
US5204318A (en) * 1987-03-27 1993-04-20 Massachusetts Institute Of Technology Preparation of superconducting oxides and oxide-metal composites
US5071826A (en) * 1987-03-30 1991-12-10 Hewlett-Packard Company Organometallic silver additives for ceramic superconductors
US5474975A (en) * 1987-04-01 1995-12-12 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an elongated member from a superconducting ceramic material
AU599223B2 (en) * 1987-04-15 1990-07-12 Semiconductor Energy Laboratory Co. Ltd. Superconducting ceramic pattern and its manufacturing method
EP0289412B1 (en) * 1987-04-22 1992-01-29 Sumitomo Electric Industries Limited Process for producing a superconducting article
CA1329952C (en) * 1987-04-27 1994-05-31 Yoshihiko Imanaka Multi-layer superconducting circuit substrate and process for manufacturing same
US5017551A (en) * 1987-05-04 1991-05-21 Eastman Kodak Company Barrier layer containing conductive articles
US4880770A (en) * 1987-05-04 1989-11-14 Eastman Kodak Company Metalorganic deposition process for preparing superconducting oxide films
US5286713A (en) * 1987-05-08 1994-02-15 Fujitsu Limited Method for manufacturing an oxide superconducting circuit board by printing
US5057485A (en) * 1987-05-15 1991-10-15 Hitachi, Ltd. Light detecting superconducting Josephson device
CA1328242C (en) * 1987-05-18 1994-04-05 Nobuhiko Fujita Process for manufacturing a superconductor and a method for producing a superconducting circuit
US4908346A (en) * 1987-07-01 1990-03-13 Eastman Kodak Company Crystalline rare earth alkaline earth copper oxide thick film circuit element with superconducting onset transition temperature in excess of 77%
DE3855246T2 (de) * 1987-07-06 1996-12-05 Sumitomo Electric Industries Supraleitende dünne Schicht und Verfahren zu ihrer Herstellung
NL8701718A (nl) * 1987-07-21 1989-02-16 Philips Nv Werkwijze voor het aanbrengen van dunne lagen van oxidisch supergeleidend materiaal.
JPS6431475A (en) * 1987-07-28 1989-02-01 Univ Tokyo Superconducting device and forming method thereof
DE3726016A1 (de) * 1987-08-05 1989-02-16 Siemens Ag Verfahren zur herstellung eines schichtartigen aufbaus aus einem oxidkeramischen supralteitermaterial
JPH03502212A (ja) * 1987-08-14 1991-05-23 ジ・オハイオ・ステイト・ユニバーシテイ 機械で加工できる熱伝導性で高強度のセラミツク超電導複合物
US4892861A (en) * 1987-08-14 1990-01-09 Aluminum Company Of America Liquid phase sintered superconducting cermet
US5225394A (en) * 1987-08-31 1993-07-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing high Tc superconducting circuits
US4931424A (en) * 1987-09-04 1990-06-05 Henty David L Method for formation of high temperature superconductor films with reduced substrate heating
US5132280A (en) * 1987-09-25 1992-07-21 At&T Bell Laboratories Method of producing a superconductive oxide layer on a substrate
US4918051A (en) * 1987-09-30 1990-04-17 General Motors Corporation Metalorganic deposition of superconducting Eu -Ba -Cu O thin films by rapid thermal annealing
US4983577A (en) * 1987-12-22 1991-01-08 General Motors Corporation Metalorganic deposition of superconducting Yb-Ba-Cu-O thin films by rapid thermal annealing
US5143894A (en) * 1987-10-14 1992-09-01 Mordechai Rothschild Formation and high resolution patterning of superconductors
AU610260B2 (en) * 1987-10-16 1991-05-16 Furukawa Electric Co. Ltd., The Oxide superconductor shaped body and method of manufacturing the same
EP0316143A3 (en) * 1987-11-09 1989-07-26 Ametek Inc. Formation of superconducting articles by electrodeposition
EP0316275A3 (de) * 1987-11-10 1989-08-09 Ciba-Geigy Ag Verfahren zur Herstellung von supraleitenden Materialien in an sich beliebiger Form
US4843060A (en) * 1987-11-23 1989-06-27 The United States Of America As Represented By The Secretary Of The Navy Method for growing patterned thin films of superconductors
US5795849A (en) * 1987-12-21 1998-08-18 Hickman; Paul L. Bulk ceramic superconductor structures
DE3834964A1 (de) * 1988-01-27 1989-08-10 Siemens Ag Verfahren zur herstellung mindestens einer schicht aus einem metalloxidischen supraleitermaterial mit hoher sprungtemperatur
GB2215548B (en) * 1988-02-26 1991-10-23 Gen Electric Co Plc A method of fabricating superconducting electronic devices
US4962087A (en) * 1988-03-04 1990-10-09 Litton Systems, Inc. Epitaxial superconducting scructure on lattice matched lanthanum orthogallate
US5041417A (en) * 1988-03-25 1991-08-20 Eastman Kodak Company Conductive articles and intermediates containing heavy pnictide mixed alkaline earth oxide layers
US4912087A (en) * 1988-04-15 1990-03-27 Ford Motor Company Rapid thermal annealing of superconducting oxide precursor films on Si and SiO2 substrates
US4943558A (en) * 1988-04-15 1990-07-24 Ford Motor Company Preparation of superconducting oxide films using a pre-oxygen nitrogen anneal
GB8809548D0 (en) * 1988-04-22 1988-05-25 Somekh R E Epitaxial barrier layers in thin film technology
WO1989010813A1 (en) * 1988-05-13 1989-11-16 Research Corporation Technologies, Inc. Ceramic electrode material and electrical devices formed therewith
DE3822905A1 (de) * 1988-07-06 1990-01-11 Siemens Ag Josephson-tunnelelement mi metalloxidischem supraleitermaterial und verfahren zur herstellung des elements
US5106819A (en) * 1988-07-08 1992-04-21 Semiconductor Energy Laboratory Co., Ltd. Oxide superconducting tunnel junctions and manufacturing method for the same
US5047385A (en) * 1988-07-20 1991-09-10 The Board Of Trustees Of The Leland Stanford Junior University Method of forming superconducting YBa2 Cu3 O7-x thin films with controlled crystal orientation
US5077266A (en) * 1988-09-14 1991-12-31 Hitachi, Ltd. Method of forming weak-link josephson junction, and superconducting device employing the junction
US5362709A (en) * 1988-09-22 1994-11-08 Semiconductor Energy Laboratory, Co., Ltd. Superconducting device
US5135908A (en) * 1989-08-07 1992-08-04 The Trustees Of Columbia University In The City Of New York Method of patterning superconducting films
JP2790494B2 (ja) * 1989-10-13 1998-08-27 松下電器産業株式会社 超伝導素子
DE69113010T2 (de) * 1990-12-19 1996-05-09 At & T Corp Artikel mit supraleiter/isolator Lagenstruktur und Verfahren zur Herstellung des Artikels.
DE4124773C2 (de) * 1991-07-26 1996-10-10 Forschungszentrum Juelich Gmbh Josephson-Element aus supraleitender Keramik mit perowskitähnlicher Struktur und Verfahren zu seiner Herstellung
US5593918A (en) * 1994-04-22 1997-01-14 Lsi Logic Corporation Techniques for forming superconductive lines
US5578226A (en) * 1995-07-18 1996-11-26 Trw Inc. Multi-layered superconductive interconnects
JPH11195768A (ja) * 1997-10-22 1999-07-21 Fujitsu Ltd ペロブスカイト型酸化物膜を含む電子装置とその製造方法及び強誘電体キャパシタ
RU2199170C2 (ru) * 2000-06-27 2003-02-20 Дочернее государственное предприятие "Институт ядерной физики" Национального ядерного центра Республики Казахстан Способ формирования сверхпроводящего пленочного покрытия и проводник на его основе
WO2004079450A1 (en) * 2003-03-06 2004-09-16 Yissum Research Development Company Of The Hebrew University Of Jerusalem Method for manufacturing a patterned structure
JP4462432B2 (ja) * 2005-08-16 2010-05-12 セイコーエプソン株式会社 ターゲット
CN113517386B (zh) 2020-08-06 2022-05-31 阿里巴巴集团控股有限公司 约瑟夫森结、约瑟夫森结的制备方法、装置及超导电路

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Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2545990A1 (fr) * 1983-05-14 1984-11-16 Nippon Telegraph & Telephone Dispositif photodetecteur ayant des jonctions de josephson
US5478800A (en) * 1987-02-05 1995-12-26 Sumitomo Electric Industries, Ltd. Process for preparing a superconducting thin film
EP0277885A3 (en) * 1987-02-05 1989-10-11 Sumitomo Electric Industries Limited Process for preparing a superconducting thin film
EP0280273A3 (en) * 1987-02-24 1990-05-09 Kawatetsu Mining Company, Ltd. Manufacturing method of conductive or superconductive thin film
EP0673073A1 (en) * 1987-02-27 1995-09-20 Hitachi, Ltd. Method of manufacturing a superconducting device
US5552375A (en) * 1987-02-27 1996-09-03 Hitachi, Ltd. Method for forming high Tc superconducting devices
US6069369A (en) * 1987-02-27 2000-05-30 Hitachi, Ltd. Superconducting device
EP0280308A3 (en) * 1987-02-27 1990-12-12 Hitachi, Ltd. Superconducting device
US5126315A (en) * 1987-02-27 1992-06-30 Hitachi, Ltd. High tc superconducting device with weak link between two superconducting electrodes
EP0282839A3 (en) * 1987-03-18 1990-07-25 International Business Machines Corporation Films of high tc oxide superconductors and method for making the same
US5017550A (en) * 1987-03-30 1991-05-21 Sumitomo Electric Industries, Ltd. Method for producing thin film of oxide superconductor
EP0285132A3 (en) * 1987-03-30 1990-04-25 Sumitomo Electric Industries Limited Method for producing thin film of oxide superconductor
EP0292436B1 (en) * 1987-05-18 1999-11-24 International Business Machines Corporation High current conductors and high field magnets using anisotropic superconductors
EP0292959B1 (en) * 1987-05-26 1994-03-02 Sumitomo Electric Industries Limited Superconducting member
EP0329507A1 (fr) * 1988-02-02 1989-08-23 Thomson-Csf Dispositif en couches minces de matériau supraconducteur, et procédé de réalisation
US5298485A (en) * 1988-02-10 1994-03-29 Sharp Kabushiki Kaisha Superconductive logic device
EP0328398A3 (en) * 1988-02-10 1990-11-14 Sharp Kabushiki Kaisha Superconductive logic device
EP0390704B1 (en) * 1989-03-31 1998-12-23 Sumitomo Electric Industries, Ltd. Tunnel junction type Josephson device and method for fabricating the same
EP0430798B1 (en) * 1989-11-27 1997-04-02 Sumitomo Electric Industries, Ltd. Tunnel junction device composed of compound oxide superconductor material and method for fabricating the same

Also Published As

Publication number Publication date
US4316785A (en) 1982-02-23
FR2469005B1 (enExample) 1984-04-27

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