FR2461353A1 - Procede et dispositif pour corriger l'astigmatisme dans des microscopes electroniques a balayage et equipements analogues - Google Patents

Procede et dispositif pour corriger l'astigmatisme dans des microscopes electroniques a balayage et equipements analogues Download PDF

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Publication number
FR2461353A1
FR2461353A1 FR8015522A FR8015522A FR2461353A1 FR 2461353 A1 FR2461353 A1 FR 2461353A1 FR 8015522 A FR8015522 A FR 8015522A FR 8015522 A FR8015522 A FR 8015522A FR 2461353 A1 FR2461353 A1 FR 2461353A1
Authority
FR
France
Prior art keywords
astigmatism
correction
astigmatism correction
scanning
screen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8015522A
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English (en)
French (fr)
Other versions
FR2461353B1 (enExample
Inventor
Takashi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Publication of FR2461353A1 publication Critical patent/FR2461353A1/fr
Application granted granted Critical
Publication of FR2461353B1 publication Critical patent/FR2461353B1/fr
Granted legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR8015522A 1979-07-12 1980-07-11 Procede et dispositif pour corriger l'astigmatisme dans des microscopes electroniques a balayage et equipements analogues Granted FR2461353A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8840979A JPS5613649A (en) 1979-07-12 1979-07-12 Correcting method and device for astigmatism in scanning type electron microscope and the like

Publications (2)

Publication Number Publication Date
FR2461353A1 true FR2461353A1 (fr) 1981-01-30
FR2461353B1 FR2461353B1 (enExample) 1983-12-16

Family

ID=13941993

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8015522A Granted FR2461353A1 (fr) 1979-07-12 1980-07-11 Procede et dispositif pour corriger l'astigmatisme dans des microscopes electroniques a balayage et equipements analogues

Country Status (5)

Country Link
US (1) US4321468A (enExample)
JP (1) JPS5613649A (enExample)
DE (1) DE3025830C2 (enExample)
FR (1) FR2461353A1 (enExample)
GB (1) GB2058525B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147350A (en) * 1980-04-16 1981-11-16 Nichidenshi Tekunikusu:Kk Correction method and performing device of astigmatism
JPS5949161A (ja) * 1982-09-14 1984-03-21 Nippon Denso Co Ltd 有機電池
KR870001762B1 (ko) * 1983-10-31 1987-10-06 신닛뽕 가가꾸 고오교 가부시끼가이샤 마그네시아 클링커 및 그의 제조법
JP2835097B2 (ja) * 1989-09-21 1998-12-14 株式会社東芝 荷電ビームの非点収差補正方法
US5107113A (en) * 1990-12-26 1992-04-21 Bell Communications Research, Inc. Method and apparatus for correcting distortions in scanning tunneling microscope images
JP2946857B2 (ja) * 1991-08-20 1999-09-06 株式会社ニコン 荷電粒子線装置
JP2010078478A (ja) * 2008-09-26 2010-04-08 Toshiba Corp 欠陥検査装置および欠陥検査方法
JP6077960B2 (ja) * 2013-07-24 2017-02-08 日本電子株式会社 球面収差補正装置、球面収差補正方法、および荷電粒子線装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1913134A1 (de) * 1968-03-22 1969-10-02 Siemens Ag Verfahren zur Korrektur des Astigmatismus einer Elektronenlinse
FR2107544A5 (enExample) * 1970-09-11 1972-05-05 Jeol Ltd
US3753034A (en) * 1969-10-10 1973-08-14 Texas Instruments Inc Electron beam apparatus
FR2192374A1 (enExample) * 1972-07-11 1974-02-08 Jeol Ltd
GB2011656A (en) * 1977-12-29 1979-07-11 Jeol Ltd Method and means for correcting astigmatism in a scanning electron microscope or the like

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180738A (en) * 1977-07-30 1979-12-25 National Research Development Corporation Astigmatism in electron beam probe instruments
US4162403A (en) * 1978-07-26 1979-07-24 Advanced Metals Research Corp. Method and means for compensating for charge carrier beam astigmatism

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1913134A1 (de) * 1968-03-22 1969-10-02 Siemens Ag Verfahren zur Korrektur des Astigmatismus einer Elektronenlinse
US3753034A (en) * 1969-10-10 1973-08-14 Texas Instruments Inc Electron beam apparatus
FR2107544A5 (enExample) * 1970-09-11 1972-05-05 Jeol Ltd
FR2192374A1 (enExample) * 1972-07-11 1974-02-08 Jeol Ltd
GB2011656A (en) * 1977-12-29 1979-07-11 Jeol Ltd Method and means for correcting astigmatism in a scanning electron microscope or the like

Also Published As

Publication number Publication date
GB2058525A (en) 1981-04-08
DE3025830C2 (de) 1984-05-17
JPS5613649A (en) 1981-02-10
US4321468A (en) 1982-03-23
FR2461353B1 (enExample) 1983-12-16
DE3025830A1 (de) 1981-01-15
GB2058525B (en) 1983-07-20

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