GB2058525B - Correction of astigmatism in scanning electron microscopes and similar equipment - Google Patents

Correction of astigmatism in scanning electron microscopes and similar equipment

Info

Publication number
GB2058525B
GB2058525B GB8022332A GB8022332A GB2058525B GB 2058525 B GB2058525 B GB 2058525B GB 8022332 A GB8022332 A GB 8022332A GB 8022332 A GB8022332 A GB 8022332A GB 2058525 B GB2058525 B GB 2058525B
Authority
GB
United Kingdom
Prior art keywords
astigmatism
correction
scanning electron
similar equipment
electron microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8022332A
Other languages
English (en)
Other versions
GB2058525A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Publication of GB2058525A publication Critical patent/GB2058525A/en
Application granted granted Critical
Publication of GB2058525B publication Critical patent/GB2058525B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB8022332A 1979-07-12 1980-07-08 Correction of astigmatism in scanning electron microscopes and similar equipment Expired GB2058525B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8840979A JPS5613649A (en) 1979-07-12 1979-07-12 Correcting method and device for astigmatism in scanning type electron microscope and the like

Publications (2)

Publication Number Publication Date
GB2058525A GB2058525A (en) 1981-04-08
GB2058525B true GB2058525B (en) 1983-07-20

Family

ID=13941993

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8022332A Expired GB2058525B (en) 1979-07-12 1980-07-08 Correction of astigmatism in scanning electron microscopes and similar equipment

Country Status (5)

Country Link
US (1) US4321468A (enExample)
JP (1) JPS5613649A (enExample)
DE (1) DE3025830C2 (enExample)
FR (1) FR2461353A1 (enExample)
GB (1) GB2058525B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147350A (en) * 1980-04-16 1981-11-16 Nichidenshi Tekunikusu:Kk Correction method and performing device of astigmatism
JPS5949161A (ja) * 1982-09-14 1984-03-21 Nippon Denso Co Ltd 有機電池
KR870001762B1 (ko) * 1983-10-31 1987-10-06 신닛뽕 가가꾸 고오교 가부시끼가이샤 마그네시아 클링커 및 그의 제조법
JP2835097B2 (ja) * 1989-09-21 1998-12-14 株式会社東芝 荷電ビームの非点収差補正方法
US5107113A (en) * 1990-12-26 1992-04-21 Bell Communications Research, Inc. Method and apparatus for correcting distortions in scanning tunneling microscope images
JP2946857B2 (ja) * 1991-08-20 1999-09-06 株式会社ニコン 荷電粒子線装置
JP2010078478A (ja) * 2008-09-26 2010-04-08 Toshiba Corp 欠陥検査装置および欠陥検査方法
JP6077960B2 (ja) * 2013-07-24 2017-02-08 日本電子株式会社 球面収差補正装置、球面収差補正方法、および荷電粒子線装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1325540A (en) * 1969-10-10 1973-08-01 Texas Instruments Ltd Electron beam apparatus
JPS4922768B1 (enExample) * 1970-09-11 1974-06-11
JPS521869B2 (enExample) * 1972-07-11 1977-01-18
US4180738A (en) * 1977-07-30 1979-12-25 National Research Development Corporation Astigmatism in electron beam probe instruments
JPS5492050A (en) * 1977-12-29 1979-07-20 Jeol Ltd Method and apparatus for astigmatic correction of scanning electronic microscope and others
US4162403A (en) * 1978-07-26 1979-07-24 Advanced Metals Research Corp. Method and means for compensating for charge carrier beam astigmatism

Also Published As

Publication number Publication date
FR2461353A1 (fr) 1981-01-30
GB2058525A (en) 1981-04-08
DE3025830C2 (de) 1984-05-17
JPS5613649A (en) 1981-02-10
US4321468A (en) 1982-03-23
FR2461353B1 (enExample) 1983-12-16
DE3025830A1 (de) 1981-01-15

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950708