GB2126778B - Improvements relating to scanning electron and scanning optical microscopes - Google Patents

Improvements relating to scanning electron and scanning optical microscopes

Info

Publication number
GB2126778B
GB2126778B GB08322989A GB8322989A GB2126778B GB 2126778 B GB2126778 B GB 2126778B GB 08322989 A GB08322989 A GB 08322989A GB 8322989 A GB8322989 A GB 8322989A GB 2126778 B GB2126778 B GB 2126778B
Authority
GB
United Kingdom
Prior art keywords
scanning
improvements relating
optical microscopes
scanning electron
scanning optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08322989A
Other versions
GB2126778A (en
GB8322989D0 (en
Inventor
Eamon Francis Pius Maher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ERA Patents Ltd
Original Assignee
ERA Patents Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB838307560A external-priority patent/GB8307560D0/en
Application filed by ERA Patents Ltd filed Critical ERA Patents Ltd
Priority to GB08322989A priority Critical patent/GB2126778B/en
Publication of GB8322989D0 publication Critical patent/GB8322989D0/en
Publication of GB2126778A publication Critical patent/GB2126778A/en
Application granted granted Critical
Publication of GB2126778B publication Critical patent/GB2126778B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
GB08322989A 1982-08-26 1983-08-26 Improvements relating to scanning electron and scanning optical microscopes Expired GB2126778B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08322989A GB2126778B (en) 1982-08-26 1983-08-26 Improvements relating to scanning electron and scanning optical microscopes

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB8224510 1982-08-26
GB838307560A GB8307560D0 (en) 1983-03-18 1983-03-18 Scanning electron and optical microscopes
GB08322989A GB2126778B (en) 1982-08-26 1983-08-26 Improvements relating to scanning electron and scanning optical microscopes

Publications (3)

Publication Number Publication Date
GB8322989D0 GB8322989D0 (en) 1983-09-28
GB2126778A GB2126778A (en) 1984-03-28
GB2126778B true GB2126778B (en) 1985-12-04

Family

ID=27261719

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08322989A Expired GB2126778B (en) 1982-08-26 1983-08-26 Improvements relating to scanning electron and scanning optical microscopes

Country Status (1)

Country Link
GB (1) GB2126778B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8415709D0 (en) * 1984-06-20 1984-07-25 Dubilier Scient Ltd Scanning microscope
US5734498A (en) * 1994-05-09 1998-03-31 The Regents Of The University Of California Illuminator elements for conventional light microscopes
DE19929875A1 (en) * 1999-06-29 2001-01-04 Laser & Med Tech Gmbh Method and device for the rapid near-field optical examination of biological objects by means of a light source excited by particle beams

Also Published As

Publication number Publication date
GB2126778A (en) 1984-03-28
GB8322989D0 (en) 1983-09-28

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee