GB2161019B - Electron microscope with interchargeable lens - Google Patents

Electron microscope with interchargeable lens

Info

Publication number
GB2161019B
GB2161019B GB08510291A GB8510291A GB2161019B GB 2161019 B GB2161019 B GB 2161019B GB 08510291 A GB08510291 A GB 08510291A GB 8510291 A GB8510291 A GB 8510291A GB 2161019 B GB2161019 B GB 2161019B
Authority
GB
United Kingdom
Prior art keywords
interchargeable
lens
electron microscope
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08510291A
Other versions
GB8510291D0 (en
GB2161019A (en
Inventor
Hirotami Koike
Shigeru Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Publication of GB8510291D0 publication Critical patent/GB8510291D0/en
Publication of GB2161019A publication Critical patent/GB2161019A/en
Application granted granted Critical
Publication of GB2161019B publication Critical patent/GB2161019B/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1413—Means for interchanging parts of the lens, e. g. pole pieces within the tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Analytical Chemistry (AREA)
  • Nanotechnology (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB08510291A 1984-04-27 1985-04-23 Electron microscope with interchargeable lens Expired GB2161019B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8362884A JPS60230343A (en) 1984-04-27 1984-04-27 Electron lens assembly and electron ray device fitted with the assembly

Publications (3)

Publication Number Publication Date
GB8510291D0 GB8510291D0 (en) 1985-05-30
GB2161019A GB2161019A (en) 1986-01-02
GB2161019B true GB2161019B (en) 1988-11-16

Family

ID=13807733

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08510291A Expired GB2161019B (en) 1984-04-27 1985-04-23 Electron microscope with interchargeable lens

Country Status (2)

Country Link
JP (1) JPS60230343A (en)
GB (1) GB2161019B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2777840B2 (en) * 1990-11-30 1998-07-23 セイコーインスツルメンツ株式会社 Electron beam equipment
EP1530229B1 (en) 2003-11-04 2012-04-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam optical component for charged particle beams
AU2010307046B2 (en) 2009-10-12 2016-04-28 Perkinelmer U.S. Llc Assemblies for ion and electron sources and methods of use
EP2722866A1 (en) * 2012-10-22 2014-04-23 Fei Company Configurable charged-particle beam apparatus
CN110231354B (en) * 2019-05-31 2020-09-08 武汉大学 Non-laser-excited four-dimensional transmission electron microscope device and using method thereof
EP3872837A1 (en) * 2020-02-25 2021-09-01 The Provost, Fellows, Scholars and other Members of Board of Trinity College Dublin Pole piece for an electron microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3346736A (en) * 1964-09-22 1967-10-10 Applied Res Lab Inc Electron probe apparatus having an objective lens with an aperture for restricting fluid flow
US3345529A (en) * 1966-08-29 1967-10-03 Ibm Electron beam column with demountable flux-generating assembly and beam-forming elements

Also Published As

Publication number Publication date
GB8510291D0 (en) 1985-05-30
GB2161019A (en) 1986-01-02
JPS60230343A (en) 1985-11-15

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19960423