GB2152697B - Improvements in or relating to scanning optical microscopes - Google Patents

Improvements in or relating to scanning optical microscopes

Info

Publication number
GB2152697B
GB2152697B GB08426856A GB8426856A GB2152697B GB 2152697 B GB2152697 B GB 2152697B GB 08426856 A GB08426856 A GB 08426856A GB 8426856 A GB8426856 A GB 8426856A GB 2152697 B GB2152697 B GB 2152697B
Authority
GB
United Kingdom
Prior art keywords
relating
scanning optical
optical microscopes
microscopes
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08426856A
Other versions
GB2152697A (en
GB8426856D0 (en
Inventor
Martin Alan Brearley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB838328505A external-priority patent/GB8328505D0/en
Priority claimed from GB838328859A external-priority patent/GB8328859D0/en
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of GB8426856D0 publication Critical patent/GB8426856D0/en
Publication of GB2152697A publication Critical patent/GB2152697A/en
Application granted granted Critical
Publication of GB2152697B publication Critical patent/GB2152697B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/024Details of scanning heads ; Means for illuminating the original
    • H04N1/028Details of scanning heads ; Means for illuminating the original for picture information pick-up
    • H04N1/029Heads optically focused on only one picture element at a time
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1468Optical investigation techniques, e.g. flow cytometry with spatial resolution of the texture or inner structure of the particle
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/08Optical fibres; light guides
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/10Scanning
    • G01N2201/108Miscellaneous
    • G01N2201/1087Focussed scan beam, e.g. laser

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Microscoopes, Condenser (AREA)
GB08426856A 1983-10-25 1984-10-24 Improvements in or relating to scanning optical microscopes Expired GB2152697B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB838328505A GB8328505D0 (en) 1983-10-25 1983-10-25 Microscopes
GB838328859A GB8328859D0 (en) 1983-10-28 1983-10-28 Microscopes

Publications (3)

Publication Number Publication Date
GB8426856D0 GB8426856D0 (en) 1984-11-28
GB2152697A GB2152697A (en) 1985-08-07
GB2152697B true GB2152697B (en) 1987-03-25

Family

ID=26286936

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08426856A Expired GB2152697B (en) 1983-10-25 1984-10-24 Improvements in or relating to scanning optical microscopes

Country Status (1)

Country Link
GB (1) GB2152697B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6148114A (en) 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing
US6288782B1 (en) 1993-06-17 2001-09-11 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8531011D0 (en) * 1985-12-17 1986-01-29 Medical Res Council Confocal scanning microscope
NL8700612A (en) * 1987-03-13 1988-10-03 Tno CONFOCAL LASER SCANNING MICROSCOPE.
FR2626383B1 (en) * 1988-01-27 1991-10-25 Commissariat Energie Atomique EXTENDED FIELD SCAN AND DEPTH CONFOCAL OPTICAL MICROSCOPY AND DEVICES FOR CARRYING OUT THE METHOD
US4997242A (en) * 1988-03-07 1991-03-05 Medical Research Council Achromatic scanning system
US5144477A (en) * 1988-04-11 1992-09-01 Medical Research Council Method of operating a scanning confocal imaging system
US5032720A (en) * 1988-04-21 1991-07-16 White John G Confocal imaging system
US5029023A (en) * 1989-09-29 1991-07-02 Regents Of The University Of California Laser-amplified motion detector and method
WO1994018592A1 (en) * 1993-02-08 1994-08-18 Optiscan Pty Ltd Acn 060 658 754 Confocal microscope
GB9310267D0 (en) * 1993-05-19 1993-06-30 Medical Res Council Opticla scanning apparatus
US5479252A (en) * 1993-06-17 1995-12-26 Ultrapointe Corporation Laser imaging system for inspection and analysis of sub-micron particles
US6548796B1 (en) 1999-06-23 2003-04-15 Regents Of The University Of Minnesota Confocal macroscope

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4170398A (en) * 1978-05-03 1979-10-09 Koester Charles J Scanning microscopic apparatus with three synchronously rotating reflecting surfaces

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6288782B1 (en) 1993-06-17 2001-09-11 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
US6661515B2 (en) 1993-06-17 2003-12-09 Kla-Tencor Corporation Method for characterizing defects on semiconductor wafers
US6148114A (en) 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing

Also Published As

Publication number Publication date
GB2152697A (en) 1985-08-07
GB8426856D0 (en) 1984-11-28

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee