GB2152697B - Improvements in or relating to scanning optical microscopes - Google Patents
Improvements in or relating to scanning optical microscopesInfo
- Publication number
- GB2152697B GB2152697B GB08426856A GB8426856A GB2152697B GB 2152697 B GB2152697 B GB 2152697B GB 08426856 A GB08426856 A GB 08426856A GB 8426856 A GB8426856 A GB 8426856A GB 2152697 B GB2152697 B GB 2152697B
- Authority
- GB
- United Kingdom
- Prior art keywords
- relating
- scanning optical
- optical microscopes
- microscopes
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
- H04N1/029—Heads optically focused on only one picture element at a time
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1468—Optical investigation techniques, e.g. flow cytometry with spatial resolution of the texture or inner structure of the particle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/08—Optical fibres; light guides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/108—Miscellaneous
- G01N2201/1087—Focussed scan beam, e.g. laser
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB838328505A GB8328505D0 (en) | 1983-10-25 | 1983-10-25 | Microscopes |
GB838328859A GB8328859D0 (en) | 1983-10-28 | 1983-10-28 | Microscopes |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8426856D0 GB8426856D0 (en) | 1984-11-28 |
GB2152697A GB2152697A (en) | 1985-08-07 |
GB2152697B true GB2152697B (en) | 1987-03-25 |
Family
ID=26286936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08426856A Expired GB2152697B (en) | 1983-10-25 | 1984-10-24 | Improvements in or relating to scanning optical microscopes |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2152697B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6148114A (en) | 1996-11-27 | 2000-11-14 | Ultrapointe Corporation | Ring dilation and erosion techniques for digital image processing |
US6288782B1 (en) | 1993-06-17 | 2001-09-11 | Ultrapointe Corporation | Method for characterizing defects on semiconductor wafers |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8531011D0 (en) * | 1985-12-17 | 1986-01-29 | Medical Res Council | Confocal scanning microscope |
NL8700612A (en) * | 1987-03-13 | 1988-10-03 | Tno | CONFOCAL LASER SCANNING MICROSCOPE. |
FR2626383B1 (en) * | 1988-01-27 | 1991-10-25 | Commissariat Energie Atomique | EXTENDED FIELD SCAN AND DEPTH CONFOCAL OPTICAL MICROSCOPY AND DEVICES FOR CARRYING OUT THE METHOD |
US4997242A (en) * | 1988-03-07 | 1991-03-05 | Medical Research Council | Achromatic scanning system |
US5144477A (en) * | 1988-04-11 | 1992-09-01 | Medical Research Council | Method of operating a scanning confocal imaging system |
US5032720A (en) * | 1988-04-21 | 1991-07-16 | White John G | Confocal imaging system |
US5029023A (en) * | 1989-09-29 | 1991-07-02 | Regents Of The University Of California | Laser-amplified motion detector and method |
WO1994018592A1 (en) * | 1993-02-08 | 1994-08-18 | Optiscan Pty Ltd Acn 060 658 754 | Confocal microscope |
GB9310267D0 (en) * | 1993-05-19 | 1993-06-30 | Medical Res Council | Opticla scanning apparatus |
US5479252A (en) * | 1993-06-17 | 1995-12-26 | Ultrapointe Corporation | Laser imaging system for inspection and analysis of sub-micron particles |
US6548796B1 (en) | 1999-06-23 | 2003-04-15 | Regents Of The University Of Minnesota | Confocal macroscope |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4170398A (en) * | 1978-05-03 | 1979-10-09 | Koester Charles J | Scanning microscopic apparatus with three synchronously rotating reflecting surfaces |
-
1984
- 1984-10-24 GB GB08426856A patent/GB2152697B/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6288782B1 (en) | 1993-06-17 | 2001-09-11 | Ultrapointe Corporation | Method for characterizing defects on semiconductor wafers |
US6661515B2 (en) | 1993-06-17 | 2003-12-09 | Kla-Tencor Corporation | Method for characterizing defects on semiconductor wafers |
US6148114A (en) | 1996-11-27 | 2000-11-14 | Ultrapointe Corporation | Ring dilation and erosion techniques for digital image processing |
Also Published As
Publication number | Publication date |
---|---|
GB2152697A (en) | 1985-08-07 |
GB8426856D0 (en) | 1984-11-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |