FR2449972A1 - Tube protecteur resistant a chaud pour le traitement thermique de composants a semi-conducteurs - Google Patents

Tube protecteur resistant a chaud pour le traitement thermique de composants a semi-conducteurs

Info

Publication number
FR2449972A1
FR2449972A1 FR8003189A FR8003189A FR2449972A1 FR 2449972 A1 FR2449972 A1 FR 2449972A1 FR 8003189 A FR8003189 A FR 8003189A FR 8003189 A FR8003189 A FR 8003189A FR 2449972 A1 FR2449972 A1 FR 2449972A1
Authority
FR
France
Prior art keywords
hot
semiconductor components
resistant protective
protective tube
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8003189A
Other languages
English (en)
Other versions
FR2449972B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzschmelze GmbH
Heraeus Schott Quarzschmelze GmbH
Original Assignee
Heraeus Quarzschmelze GmbH
Heraeus Schott Quarzschmelze GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzschmelze GmbH, Heraeus Schott Quarzschmelze GmbH filed Critical Heraeus Quarzschmelze GmbH
Publication of FR2449972A1 publication Critical patent/FR2449972A1/fr
Application granted granted Critical
Publication of FR2449972B1 publication Critical patent/FR2449972B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/08—Reaction chambers; Selection of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7898—Pivoted valves
    • Y10T137/7902—Valve mounted on end of pipe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7904—Reciprocating valves
    • Y10T137/7922—Spring biased

Abstract

TUBE PROTECTEUR RESISTANT A CHAUD, ET NOTAMMENT TUBE EN VERRE QUARTZEUX POUR LE TRAITEMENT THERMIQUE DE COMPOSANTS A SEMI-CONDUCTEURS, DONT L'EXTREMITE D'ALIMENTATION EN GAZ DE TRAITEMENT EST RETRECIE ET DONT L'EXTREMITE OPPOSEE EST OBTUREE A L'EXCEPTION D'UNE SORTIE DE GAZ. POUR EVITER UNE DIFFUSION EN RETOUR DE L'AIR AMBIANT, L'EXTREMITE 4 NON RETRECIE DU TUBE EST OBTUREE PAR UN CLAPET 5, FIXE SUR UN ETRIER DE MAINTIEN 6, QUI EST SUSPENDU ET MOBILE SUR LE TUBE 1.
FR8003189A 1979-02-24 1980-02-13 Tube protecteur resistant a chaud pour le traitement thermique de composants a semi-conducteurs Granted FR2449972A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2907371A DE2907371C2 (de) 1979-02-24 1979-02-24 Hochtemperaturfestes Schutzrohr für Wärmebehandlung von Halbleiterbauelementen

Publications (2)

Publication Number Publication Date
FR2449972A1 true FR2449972A1 (fr) 1980-09-19
FR2449972B1 FR2449972B1 (fr) 1983-01-07

Family

ID=6063899

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8003189A Granted FR2449972A1 (fr) 1979-02-24 1980-02-13 Tube protecteur resistant a chaud pour le traitement thermique de composants a semi-conducteurs

Country Status (5)

Country Link
US (1) US4367768A (fr)
JP (1) JPS55117245A (fr)
DE (1) DE2907371C2 (fr)
FR (1) FR2449972A1 (fr)
GB (1) GB2043837B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5862334A (ja) * 1981-10-09 1983-04-13 Mazda Motor Corp エンジンのアイドル回転制御装置
DE3840588C1 (en) * 1988-12-02 1990-02-22 Westdeutsche Quarzschmelze Gmbh & Co. Kg, 2054 Geesthacht, De Quartz glass container for the thermal treatment of semiconductor wafers
US5492552A (en) * 1994-03-03 1996-02-20 Minnesota Mining And Manufacturing Company Holder for annealing fiber optic coils
US6000438A (en) * 1998-02-13 1999-12-14 Mcdermott Technology, Inc. Phase change insulation for subsea flowlines
JP5477145B2 (ja) * 2009-04-28 2014-04-23 三菱マテリアル株式会社 多結晶シリコン反応炉

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR809569A (fr) * 1935-08-09 1937-03-06 Int Hydrogenation Patents Co Soupape pour haute pression
DE1558003A1 (de) * 1967-05-31 1970-02-12 Telefunken Patent Diffusionsofen
DE2533433A1 (de) * 1974-07-26 1976-02-12 Monsanto Co Einrichtung und verfahren zur dotierung von halbleitermaterialien durch diffusion

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US418867A (en) * 1890-01-07 Discharge-door for steam digesters and retorts
US554344A (en) * 1896-02-11 Clean-out valve
US1246892A (en) * 1917-03-08 1917-11-20 Donnelly Mfg Company Relief-valve.
US2612406A (en) * 1948-08-12 1952-09-30 Kask Technical Corp Atomizing nozzle
US3274917A (en) * 1964-02-17 1966-09-27 Gleason Corp Protective cover for exhaust pipes
US3823685A (en) * 1971-08-05 1974-07-16 Ncr Co Processing apparatus
US3900597A (en) * 1973-12-19 1975-08-19 Motorola Inc System and process for deposition of polycrystalline silicon with silane in vacuum
US4173944A (en) * 1977-05-20 1979-11-13 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Silverplated vapor deposition chamber
JPS543646U (fr) * 1977-06-11 1979-01-11

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR809569A (fr) * 1935-08-09 1937-03-06 Int Hydrogenation Patents Co Soupape pour haute pression
DE1558003A1 (de) * 1967-05-31 1970-02-12 Telefunken Patent Diffusionsofen
DE2533433A1 (de) * 1974-07-26 1976-02-12 Monsanto Co Einrichtung und verfahren zur dotierung von halbleitermaterialien durch diffusion

Also Published As

Publication number Publication date
GB2043837B (en) 1983-03-23
US4367768A (en) 1983-01-11
DE2907371B1 (de) 1980-07-10
DE2907371C2 (de) 1981-03-12
FR2449972B1 (fr) 1983-01-07
JPS55117245A (en) 1980-09-09
GB2043837A (en) 1980-10-08

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