GB1348721A - Furnaces - Google Patents

Furnaces

Info

Publication number
GB1348721A
GB1348721A GB4101171A GB4101171A GB1348721A GB 1348721 A GB1348721 A GB 1348721A GB 4101171 A GB4101171 A GB 4101171A GB 4101171 A GB4101171 A GB 4101171A GB 1348721 A GB1348721 A GB 1348721A
Authority
GB
United Kingdom
Prior art keywords
furnace
protective gas
gap
sept
closing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4101171A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1348721A publication Critical patent/GB1348721A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0073—Seals
    • F27D99/0075—Gas curtain seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/045—Furnaces with controlled atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/045—Furnaces with controlled atmosphere
    • F27B9/047—Furnaces with controlled atmosphere the atmosphere consisting of protective gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/08—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated through chamber walls
    • F27B9/082—Muffle furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/54—Providing fillings in containers, e.g. gas fillings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Furnace Details (AREA)

Abstract

1348721 Continuous tubular furnace PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 2 Sept 1971 [5 Sept 1970] 41011/71 Heading F4B A furnace 1, in which is maintained a protective gas atmosphere, comprises a tubular furnace wall 2, and an inlet for the protective gas, e.g. nitrogen, at least the outlet of the furnace being open-ended. Air is prevented from entering via the open outlet by means of a diffusion trap, which comprises a gap 3 in the tubular furnace wall 2 surrounded by a closing member 4. The gap 3 creates turbulence in the gas flow, and any air 6 diffusing along the walls of the furnace is taken up in the gas current denoted by arrows 7 and is conveyed out of the furnace with the protective gas flow. In a second embodiment an aperture 8 is formed in the closing member 4 to supply a small quantity of protective gas to the gap 3.
GB4101171A 1970-09-05 1971-09-02 Furnaces Expired GB1348721A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7013164A NL7013164A (en) 1970-09-05 1970-09-05

Publications (1)

Publication Number Publication Date
GB1348721A true GB1348721A (en) 1974-03-20

Family

ID=19810967

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4101171A Expired GB1348721A (en) 1970-09-05 1971-09-02 Furnaces

Country Status (4)

Country Link
JP (1) JPS5110694B1 (en)
FR (1) FR2107308A5 (en)
GB (1) GB1348721A (en)
NL (1) NL7013164A (en)

Also Published As

Publication number Publication date
JPS5110694B1 (en) 1976-04-06
NL7013164A (en) 1972-03-07
FR2107308A5 (en) 1972-05-05
DE2143178A1 (en) 1972-03-16
DE2143178B2 (en) 1976-03-18

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee