FR2443137A1 - Procede pour ameliorer l'uniformite des couches epitaxiales, dispositif et produits obtenus - Google Patents

Procede pour ameliorer l'uniformite des couches epitaxiales, dispositif et produits obtenus

Info

Publication number
FR2443137A1
FR2443137A1 FR7833831A FR7833831A FR2443137A1 FR 2443137 A1 FR2443137 A1 FR 2443137A1 FR 7833831 A FR7833831 A FR 7833831A FR 7833831 A FR7833831 A FR 7833831A FR 2443137 A1 FR2443137 A1 FR 2443137A1
Authority
FR
France
Prior art keywords
chamber
technique
carrier gas
mfr
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7833831A
Other languages
English (en)
Inventor
Jean-Paul Chane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laboratoires dElectronique Philips SAS
Original Assignee
Laboratoires dElectronique et de Physique Appliquee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laboratoires dElectronique et de Physique Appliquee filed Critical Laboratoires dElectronique et de Physique Appliquee
Priority to FR7833831A priority Critical patent/FR2443137A1/fr
Publication of FR2443137A1 publication Critical patent/FR2443137A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention concerne l'amélioration des procédés de croissance épitaxiale en phase vapeur, en ce qui concerne l'homogénéité et la reproductibilité des mélanges gazeux. Les couches obtenues présentent ainsi une excellente uniformité. Le dispositif comprend une chambre d'homogénéisation et une source dite fractionnée. Application : couches minces, éléments semi-conducteurs.
FR7833831A 1978-11-30 1978-11-30 Procede pour ameliorer l'uniformite des couches epitaxiales, dispositif et produits obtenus Withdrawn FR2443137A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7833831A FR2443137A1 (fr) 1978-11-30 1978-11-30 Procede pour ameliorer l'uniformite des couches epitaxiales, dispositif et produits obtenus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7833831A FR2443137A1 (fr) 1978-11-30 1978-11-30 Procede pour ameliorer l'uniformite des couches epitaxiales, dispositif et produits obtenus

Publications (1)

Publication Number Publication Date
FR2443137A1 true FR2443137A1 (fr) 1980-06-27

Family

ID=9215547

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7833831A Withdrawn FR2443137A1 (fr) 1978-11-30 1978-11-30 Procede pour ameliorer l'uniformite des couches epitaxiales, dispositif et produits obtenus

Country Status (1)

Country Link
FR (1) FR2443137A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2579488A1 (fr) * 1985-03-26 1986-10-03 Canon Kk Procede pour regler la densite de particules fines
US4909914A (en) * 1985-05-11 1990-03-20 Canon Kabushiki Kaisha Reaction apparatus which introduces one reacting substance within a convergent-divergent nozzle
US4911805A (en) * 1985-03-26 1990-03-27 Canon Kabushiki Kaisha Apparatus and process for producing a stable beam of fine particles

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1268600B (de) * 1964-11-16 1968-05-22 Siemens Ag Verfahren zum epitaktischen Abscheiden einer einkristallinen, insbesondere dotiertenHalbleiterschicht
DE1457139A1 (de) * 1965-05-19 1969-03-27 Siemens Ag Verfahren zum Herstellen von Halbleiteranordnungen
US3617371A (en) * 1968-11-13 1971-11-02 Hewlett Packard Co Method and means for producing semiconductor material
US4000716A (en) * 1970-08-12 1977-01-04 Hitachi, Ltd. Epitaxial growth device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1268600B (de) * 1964-11-16 1968-05-22 Siemens Ag Verfahren zum epitaktischen Abscheiden einer einkristallinen, insbesondere dotiertenHalbleiterschicht
DE1457139A1 (de) * 1965-05-19 1969-03-27 Siemens Ag Verfahren zum Herstellen von Halbleiteranordnungen
US3617371A (en) * 1968-11-13 1971-11-02 Hewlett Packard Co Method and means for producing semiconductor material
US4000716A (en) * 1970-08-12 1977-01-04 Hitachi, Ltd. Epitaxial growth device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2579488A1 (fr) * 1985-03-26 1986-10-03 Canon Kk Procede pour regler la densite de particules fines
US4911805A (en) * 1985-03-26 1990-03-27 Canon Kabushiki Kaisha Apparatus and process for producing a stable beam of fine particles
US4909914A (en) * 1985-05-11 1990-03-20 Canon Kabushiki Kaisha Reaction apparatus which introduces one reacting substance within a convergent-divergent nozzle

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