FR2415368B1 - - Google Patents
Info
- Publication number
- FR2415368B1 FR2415368B1 FR7901510A FR7901510A FR2415368B1 FR 2415368 B1 FR2415368 B1 FR 2415368B1 FR 7901510 A FR7901510 A FR 7901510A FR 7901510 A FR7901510 A FR 7901510A FR 2415368 B1 FR2415368 B1 FR 2415368B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US87147778A | 1978-01-23 | 1978-01-23 | |
| US05/965,304 US4213698A (en) | 1978-12-01 | 1978-12-01 | Apparatus and method for holding and planarizing thin workpieces |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2415368A1 FR2415368A1 (fr) | 1979-08-17 |
| FR2415368B1 true FR2415368B1 (ru) | 1984-05-04 |
Family
ID=27128208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7901510A Granted FR2415368A1 (fr) | 1978-01-23 | 1979-01-22 | Procede de maintien de pieces minces |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS6015147B2 (ru) |
| DE (1) | DE2901968A1 (ru) |
| FR (1) | FR2415368A1 (ru) |
| GB (1) | GB2016166B (ru) |
| IT (1) | IT1118308B (ru) |
| NL (1) | NL7900497A (ru) |
| SE (1) | SE444526B (ru) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5754341A (ja) * | 1980-09-19 | 1982-03-31 | Hitachi Ltd | Usuitahojisochi |
| US4433835A (en) * | 1981-11-30 | 1984-02-28 | Tencor Instruments | Wafer chuck with wafer cleaning feature |
| JPS58153344A (ja) * | 1982-03-05 | 1983-09-12 | Hitachi Ltd | リテ−ナ式ウエハチヤツク |
| JPS59106118A (ja) * | 1982-12-10 | 1984-06-19 | Hitachi Ltd | 薄板変形装置 |
| JPS6099538A (ja) * | 1983-11-01 | 1985-06-03 | 横河・ヒュ−レット・パッカ−ド株式会社 | ピンチヤツク |
| US4656791A (en) * | 1984-09-27 | 1987-04-14 | Libbey-Owens-Ford Company | Abrasive fluid jet cutting support |
| GB2189328B (en) * | 1986-03-03 | 1990-12-19 | Canon Kk | Optical system adjustment device for camera |
| US4903681A (en) * | 1987-02-24 | 1990-02-27 | Tokyo Seimitus Co., Ltd. | Method and apparatus for cutting a cylindrical material |
| NL8701603A (nl) * | 1987-07-08 | 1989-02-01 | Philips & Du Pont Optical | Vacuuminrichting voor het vastzuigen van werkstukken. |
| US6228438B1 (en) * | 1999-08-10 | 2001-05-08 | Unakis Balzers Aktiengesellschaft | Plasma reactor for the treatment of large size substrates |
| JP2003142566A (ja) * | 2001-11-07 | 2003-05-16 | New Creation Co Ltd | 真空吸着器及びその製造方法 |
| DE20206490U1 (de) * | 2002-04-24 | 2002-07-18 | J. Schmalz GmbH, 72293 Glatten | Blocksauger |
| JP5810517B2 (ja) * | 2010-12-02 | 2015-11-11 | 富士電機株式会社 | 吸着装置および吸着方法 |
| DE102011001879A1 (de) | 2011-04-07 | 2012-10-11 | Jenoptik Automatisierungstechnik Gmbh | Vorrichtung zum Spannen verformter Wafer |
| JP6178683B2 (ja) * | 2013-09-25 | 2017-08-09 | 芝浦メカトロニクス株式会社 | 吸着ステージ、貼合装置、および貼合方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB280154A (en) * | 1926-11-02 | 1928-03-28 | Wesel Mfg Company F | Improvements in photo-engravers' printing frame |
| FR1517154A (fr) * | 1967-03-02 | 1968-03-15 | Elektromat Veb | Procédé et dispositif pour le prélèvement de petits corps à surfaces adhérentes |
| DE1646147A1 (de) * | 1967-05-13 | 1971-01-07 | Telefunken Patent | Vorrichtung zur Halterung einer Halbleiterscheibe bei der UEbertragung eines Musters durch Kontaktkopie oder durch Projektionsmaskierung |
| US3627338A (en) * | 1969-10-09 | 1971-12-14 | Sheldon Thompson | Vacuum chuck |
| US3747282A (en) * | 1971-11-29 | 1973-07-24 | E Katzke | Apparatus for polishing wafers |
-
1979
- 1979-01-10 SE SE7900230A patent/SE444526B/sv not_active IP Right Cessation
- 1979-01-18 IT IT67112/79A patent/IT1118308B/it active
- 1979-01-19 DE DE19792901968 patent/DE2901968A1/de active Granted
- 1979-01-22 FR FR7901510A patent/FR2415368A1/fr active Granted
- 1979-01-22 NL NL7900497A patent/NL7900497A/xx not_active Application Discontinuation
- 1979-01-23 GB GB7902425A patent/GB2016166B/en not_active Expired
- 1979-01-23 JP JP54005656A patent/JPS6015147B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7900497A (nl) | 1979-07-25 |
| JPS6015147B2 (ja) | 1985-04-17 |
| GB2016166B (en) | 1982-06-09 |
| JPS54120585A (en) | 1979-09-19 |
| FR2415368A1 (fr) | 1979-08-17 |
| IT7967112A0 (it) | 1979-01-18 |
| GB2016166A (en) | 1979-09-19 |
| IT1118308B (it) | 1986-02-24 |
| DE2901968C2 (ru) | 1988-08-11 |
| SE7900230L (sv) | 1979-07-24 |
| SE444526B (sv) | 1986-04-21 |
| DE2901968A1 (de) | 1979-07-26 |